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Journal Articles

Effect of the repeated application of First Contact™ polymer on xenon-difluoride passivated lithium fluoride on aluminum surfaces for space telescopes

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Joshua Vawdrey, James Hamilton, Drew Watson, Lauren Miner, Osemudiamhen Destiny Amienghemhen, Walter Paxton, David Allred
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043408 (2025)
https://doi.org/10.1116/6.0004601
Published: May 2025
View articletitled, Effect of the repeated application of First Contact™ polymer on xenon-difluoride passivated lithium fluoride on aluminum surfaces for space telescopes
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Journal Articles

Analysis of pulsed direct current reactive magnetron sputtering on a silicon target

Open Access
E. Teran-Hinojosa, R. Sanginés, N. Abundiz-Cisneros, J. Aguila-Muñoz, R. Machorro-Mejia
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063401 (2024)
https://doi.org/10.1116/5.0222096
Published: September 2024
View articletitled, Analysis of pulsed direct current reactive magnetron sputtering on a silicon target
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Journal Articles

Immersion ellipsometry for the uncorrelated determination of ultrathin film thickness and index of refraction: Theory and examples

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Samira Jafari, Blaine Johs, Matthew R. Linford
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053401 (2024)
https://doi.org/10.1116/6.0003511
Published: July 2024
View articletitled, Immersion ellipsometry for the uncorrelated determination of ultrathin film thickness and index of refraction: Theory and examples
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Journal Articles

Optical studies of pure and (Cu, Co) doped nickel zinc ferrite films deposited on quartz substrate

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Sneha Kothapally, Sushma Kotru, Roni Paul, Jaber A. Abu Qahouq
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023404 (2023)
https://doi.org/10.1116/6.0002262
Published: February 2023
View articletitled, Optical studies of pure and (Cu, Co) doped nickel zinc ferrite films deposited on quartz substrate
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Journal Articles

In situ spectroscopic ellipsometry and rigorous coupled wave analysis for real time profile evolution of atomic layer deposited films inside SiO2 nanotrenches

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S. Novia Berriel, Corbin Feit, Nick Keller, Nicholas G. Rudawski, Parag Banerjee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 062403 (2022)
https://doi.org/10.1116/6.0001937
Published: September 2022
View articletitled, In situ spectroscopic ellipsometry and rigorous coupled wave analysis for real time profile evolution of atomic layer deposited films inside SiO2 nanotrenches
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Includes: Supplementary data
Journal Articles

Two step synthesis of ultrathin transition metal tellurides

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Michael Snure, Michael J. Motala, Timothy A. Prusnick, Evan M. Smith, David Moore, Christopher Muratore, Shivashankar R. Vangala, Nicholas R. Glavin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 042202 (2022)
https://doi.org/10.1116/6.0001893
Published: June 2022
View articletitled, Two step synthesis of ultrathin transition metal tellurides
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Journal Articles

In situ monitoring atomic layer doping processes for Al-doped ZnO layers: Competitive nature of surface reactions between metal precursors

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Adnan Mohammad, Saidjafarzoda Ilhom, Deepa Shukla, Necmi Biyikli
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 042401 (2022)
https://doi.org/10.1116/6.0001772
Published: May 2022
View articletitled, In situ monitoring atomic layer doping processes for Al-doped ZnO layers: Competitive nature of surface reactions between metal precursors
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Includes: Supplementary data
Journal Articles

Optical constants of single-crystalline Ni(100) from 77 to 770 K from ellipsometry measurements

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Farzin Abadizaman, Jaden Love, Stefan Zollner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033202 (2022)
https://doi.org/10.1116/6.0001763
Published: March 2022
View articletitled, Optical constants of single-crystalline Ni(100) from 77 to 770 K from ellipsometry measurements
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Journal Articles

Mechanism of SiN etching rate fluctuation in atomic layer etching

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Akiko Hirata, Masanaga Fukasawa, Katsuhisa Kugimiya, Kojiro Nagaoka, Kazuhiro Karahashi, Satoshi Hamaguchi, Hayato Iwamoto
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 062601 (2020)
https://doi.org/10.1116/6.0000257
Published: November 2020
View articletitled, Mechanism of SiN etching rate fluctuation in atomic layer etching
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Journal Articles

Resolving self-limiting growth in silicon nitride plasma enhanced atomic layer deposition with tris-dimethylamino silane precursor

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Triratna Muneshwar, Ken Cadien
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 062406 (2020)
https://doi.org/10.1116/6.0000493
Published: October 2020
View articletitled, Resolving self-limiting growth in silicon nitride plasma enhanced atomic layer deposition with tris-dimethylamino silane precursor
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Includes: Supplementary data
Journal Articles

Effect of two-step post-treatment on optical properties, microstructure, and nanosecond laser damage threshold of HfO2/TiO2/SiO2 multilayer high reflection films

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Sida Mao, Jie Fan, Yonggang Zou, Yunping Lan, Yingtian Xu, Jiabin Zhang, Jianing Dong, Xiaohui Ma
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 061503 (2019)
https://doi.org/10.1116/1.5116294
Published: October 2019
View articletitled, Effect of two-step post-treatment on optical properties, microstructure, and nanosecond laser damage threshold of HfO2/TiO2/SiO2 multilayer high reflection films
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Journal Articles

Properties of sputtered ZnS and ZnS:A (A = Er, Yb) films grown at low substrate temperatures

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Carlos A. Ortiz, Astrid L. Giraldo-Betancur, Martín A. Hernández-Landaverde, Marius Ramírez-Cardona, Arturo Mendoza-Galván, Sergio Jiménez-Sandoval
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 031505 (2017)
https://doi.org/10.1116/1.4978946
Published: March 2017
View articletitled, Properties of sputtered ZnS and ZnS:A (A = Er, Yb) films grown at low substrate temperatures
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Journal Articles

Optical constants, band gap, and infrared-active phonons of (LaAlO3)0.3(Sr2AlTaO6)0.35 (LSAT) from spectroscopic ellipsometry

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Timothy Nathan Nunley, Travis I. Willett-Gies, Jacqueline A. Cooke, Felicia S. Manciu, Premysl Marsik, Christian Bernhard, Stefan Zollner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 051507 (2016)
https://doi.org/10.1116/1.4960356
Published: August 2016
View articletitled, Optical constants, band gap, and infrared-active phonons of (LaAlO3)0.3(Sr2AlTaO6)0.35 (LSAT) from spectroscopic ellipsometry
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Journal Articles

Optical constants and band structure of trigonal NiO

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Ayana Ghosh, Cayla M. Nelson, Lina S. Abdallah, Stefan Zollner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 061203 (2015)
https://doi.org/10.1116/1.4932514
Published: October 2015
View articletitled, Optical constants and band structure of trigonal NiO
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Journal Articles

Nucleation and growth of MgO atomic layer deposition: A real-time spectroscopic ellipsometry study

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Han Wang, Kan Fu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 06F101 (2013)
https://doi.org/10.1116/1.4816776
Published: July 2013
View articletitled, Nucleation and growth of MgO atomic layer deposition: A real-time spectroscopic ellipsometry study
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Journal Articles

Tin oxide atomic layer deposition from tetrakis(dimethylamino)tin and water

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Marja N. Mullings, Carl Hägglund, Stacey F. Bent
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 061503 (2013)
https://doi.org/10.1116/1.4812717
Published: July 2013
View articletitled, Tin oxide atomic layer deposition from tetrakis(dimethylamino)tin and water
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Includes: Supplementary data
Journal Articles

Characterization of low temperature deposited atomic layer deposition TiO2 for MEMS applications

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Yujian Huang, Gregory Pandraud, Pasqualina M. Sarro
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 01A148 (2013)
https://doi.org/10.1116/1.4772664
Published: December 2012
View articletitled, Characterization of low temperature deposited atomic layer deposition TiO2 for MEMS applications
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Journal Articles

Spectroscopic ellipsometry of superparamagnetic nanoparticles in thin films of poly(N-isopropylacrylamide)

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Sebastian Rauch, Klaus-Jochen Eichhorn, Manfred Stamm, Petra Uhlmann
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 041514 (2012)
https://doi.org/10.1116/1.4727737
Published: June 2012
View articletitled, Spectroscopic ellipsometry of superparamagnetic nanoparticles in thin films of poly(N-isopropylacrylamide)
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Includes: Supplementary data
Journal Articles

Growth characteristics, material properties, and optical properties of zinc oxysulfide films deposited by atomic layer deposition

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Jonathan R. Bakke, Jukka T. Tanskanen, Carl Hägglund, Tapani A. Pakkanen, Stacey F. Bent
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 01A135 (2012)
https://doi.org/10.1116/1.3664758
Published: December 2011
View articletitled, Growth characteristics, material properties, and optical properties of zinc oxysulfide films deposited by atomic layer deposition
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Includes: Supplementary data
Journal Articles

Real-time spectroscopic ellipsometric investigation of adsorption and desorption in atomic layer deposition: A case study for the strontium bis(tri-isopropylcyclopentadienyl)/water process

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Han Wang (王瀚), Xiaoqiang Jiang (蒋晓强), Brian G. Willis
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 01A133 (2012)
https://doi.org/10.1116/1.3664757
Published: December 2011
View articletitled, Real-time spectroscopic ellipsometric investigation of adsorption and desorption in atomic layer deposition: A case study for the strontium bis(tri-isopropylcyclopentadienyl)/water process
Open the PDF for Real-time spectroscopic ellipsometric investigation of adsorption and desorption in atomic layer deposition: A case study for the strontium bis(tri-isopropylcyclopentadienyl)/water process in another window