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Journal Articles

Optical studies of pure and (Cu, Co) doped nickel zinc ferrite films deposited on quartz substrate

Sneha Kothapally, Sushma Kotru, Roni Paul, Jaber A. Abu Qahouq
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023404 (2023)
https://doi.org/10.1116/6.0002262
Published: February 2023
View article titled, Optical studies of pure and (Cu, Co) doped nickel zinc ferrite films deposited on quartz substrate
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Journal Articles

In situ spectroscopic ellipsometry and rigorous coupled wave analysis for real time profile evolution of atomic layer deposited films inside SiO2 nanotrenches

S. Novia Berriel, Corbin Feit, Nick Keller, Nicholas G. Rudawski, Parag Banerjee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 062403 (2022)
https://doi.org/10.1116/6.0001937
Published: September 2022
View article titled, <em>In situ</em> spectroscopic ellipsometry and rigorous coupled wave analysis for real time profile evolution of atomic layer deposited films inside SiO<sub>2</sub> nanotrenches
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Includes: Supplementary data
Journal Articles

Two step synthesis of ultrathin transition metal tellurides

Michael Snure, Michael J. Motala, Timothy A. Prusnick, Evan M. Smith, David Moore, Christopher Muratore, Shivashankar R. Vangala, Nicholas R. Glavin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 042202 (2022)
https://doi.org/10.1116/6.0001893
Published: June 2022
View article titled, Two step synthesis of ultrathin transition metal tellurides
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Journal Articles

In situ monitoring atomic layer doping processes for Al-doped ZnO layers: Competitive nature of surface reactions between metal precursors

Adnan Mohammad, Saidjafarzoda Ilhom, Deepa Shukla, Necmi Biyikli
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 042401 (2022)
https://doi.org/10.1116/6.0001772
Published: May 2022
View article titled, <em>In situ</em> monitoring atomic layer doping processes for Al-doped ZnO layers: Competitive nature of surface reactions between metal precursors
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Includes: Supplementary data
Journal Articles

Optical constants of single-crystalline Ni(100) from 77 to 770 K from ellipsometry measurements

Farzin Abadizaman, Jaden Love, Stefan Zollner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033202 (2022)
https://doi.org/10.1116/6.0001763
Published: March 2022
View article titled, Optical constants of single-crystalline Ni(100) from 77 to 770 K from ellipsometry measurements
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Journal Articles

Mechanism of SiN etching rate fluctuation in atomic layer etching

Akiko Hirata, Masanaga Fukasawa, Katsuhisa Kugimiya, Kojiro Nagaoka, Kazuhiro Karahashi, Satoshi Hamaguchi, Hayato Iwamoto
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 062601 (2020)
https://doi.org/10.1116/6.0000257
Published: November 2020
View article titled, Mechanism of SiN etching rate fluctuation in atomic layer etching
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Journal Articles

Resolving self-limiting growth in silicon nitride plasma enhanced atomic layer deposition with tris-dimethylamino silane precursor

Triratna Muneshwar, Ken Cadien
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 062406 (2020)
https://doi.org/10.1116/6.0000493
Published: October 2020
View article titled, Resolving self-limiting growth in silicon nitride plasma enhanced atomic layer deposition with tris-dimethylamino silane precursor
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Includes: Supplementary data
Journal Articles

Effect of two-step post-treatment on optical properties, microstructure, and nanosecond laser damage threshold of HfO2/TiO2/SiO2 multilayer high reflection films

Sida Mao, Jie Fan, Yonggang Zou, Yunping Lan, Yingtian Xu, Jiabin Zhang, Jianing Dong, Xiaohui Ma
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 061503 (2019)
https://doi.org/10.1116/1.5116294
Published: October 2019
View article titled, Effect of two-step post-treatment on optical properties, microstructure, and nanosecond laser damage threshold of HfO<sub>2</sub>/TiO<sub>2</sub>/SiO<sub>2</sub> multilayer high reflection films
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Journal Articles

Properties of sputtered ZnS and ZnS:A (A = Er, Yb) films grown at low substrate temperatures

Carlos A. Ortiz, Astrid L. Giraldo-Betancur, Martín A. Hernández-Landaverde, Marius Ramírez-Cardona, Arturo Mendoza-Galván, Sergio Jiménez-Sandoval
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 031505 (2017)
https://doi.org/10.1116/1.4978946
Published: March 2017
View article titled, Properties of sputtered ZnS and ZnS:A (A = Er, Yb) films grown at low substrate temperatures
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Journal Articles

Optical constants, band gap, and infrared-active phonons of (LaAlO3)0.3(Sr2AlTaO6)0.35 (LSAT) from spectroscopic ellipsometry

Timothy Nathan Nunley, Travis I. Willett-Gies, Jacqueline A. Cooke, Felicia S. Manciu, Premysl Marsik, Christian Bernhard, Stefan Zollner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 051507 (2016)
https://doi.org/10.1116/1.4960356
Published: August 2016
View article titled, Optical constants, band gap, and infrared-active phonons of (LaAlO<sub>3</sub>)<sub>0.3</sub>(Sr<sub>2</sub>AlTaO<sub>6</sub>)<sub>0.35</sub> (LSAT) from spectroscopic ellipsometry
Open the PDF for Optical constants, band gap, and infrared-active phonons of (LaAlO<sub>3</sub>)<sub>0.3</sub>(Sr<sub>2</sub>AlTaO<sub>6</sub>)<sub>0.35</sub> (LSAT) from spectroscopic ellipsometry in another window
Journal Articles

Optical constants and band structure of trigonal NiO

Ayana Ghosh, Cayla M. Nelson, Lina S. Abdallah, Stefan Zollner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 061203 (2015)
https://doi.org/10.1116/1.4932514
Published: October 2015
View article titled, Optical constants and band structure of trigonal NiO
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Journal Articles

Nucleation and growth of MgO atomic layer deposition: A real-time spectroscopic ellipsometry study

Han Wang, Kan Fu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 06F101 (2013)
https://doi.org/10.1116/1.4816776
Published: July 2013
View article titled, Nucleation and growth of MgO atomic layer deposition: A real-time spectroscopic ellipsometry study
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Journal Articles

Tin oxide atomic layer deposition from tetrakis(dimethylamino)tin and water

Marja N. Mullings, Carl Hägglund, Stacey F. Bent
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 061503 (2013)
https://doi.org/10.1116/1.4812717
Published: July 2013
View article titled, Tin oxide atomic layer deposition from tetrakis(dimethylamino)tin and water
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Includes: Supplementary data
Journal Articles

Characterization of low temperature deposited atomic layer deposition TiO2 for MEMS applications

Yujian Huang, Gregory Pandraud, Pasqualina M. Sarro
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 01A148 (2013)
https://doi.org/10.1116/1.4772664
Published: December 2012
View article titled, Characterization of low temperature deposited atomic layer deposition TiO<sub>2</sub> for MEMS applications
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Journal Articles

Spectroscopic ellipsometry of superparamagnetic nanoparticles in thin films of poly(N-isopropylacrylamide)

Sebastian Rauch, Klaus-Jochen Eichhorn, Manfred Stamm, Petra Uhlmann
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 041514 (2012)
https://doi.org/10.1116/1.4727737
Published: June 2012
View article titled, Spectroscopic ellipsometry of superparamagnetic nanoparticles in thin films of poly(<em>N</em>-isopropylacrylamide)
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Includes: Supplementary data
Journal Articles

Growth characteristics, material properties, and optical properties of zinc oxysulfide films deposited by atomic layer deposition

Jonathan R. Bakke, Jukka T. Tanskanen, Carl Hägglund, Tapani A. Pakkanen, Stacey F. Bent
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 01A135 (2012)
https://doi.org/10.1116/1.3664758
Published: December 2011
View article titled, Growth characteristics, material properties, and optical properties of zinc oxysulfide films deposited by atomic layer deposition
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Includes: Supplementary data
Journal Articles

Real-time spectroscopic ellipsometric investigation of adsorption and desorption in atomic layer deposition: A case study for the strontium bis(tri-isopropylcyclopentadienyl)/water process

Han Wang (王瀚), Xiaoqiang Jiang (蒋晓强), Brian G. Willis
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 01A133 (2012)
https://doi.org/10.1116/1.3664757
Published: December 2011
View article titled, Real-time spectroscopic ellipsometric investigation of adsorption and desorption in atomic layer deposition: A case study for the strontium bis(tri-isopropylcyclopentadienyl)/water process
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Journal Articles

Evaluation of indium tin oxide films grown at room temperature by pulsed electron deposition

Harshan V. Nampoori, Veronica Rincon, Mengwei Chen, Sushma Kotru
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 671–674 (2010)
https://doi.org/10.1116/1.3378153
Published: June 2010
View article titled, Evaluation of indium tin oxide films grown at room temperature by pulsed electron deposition
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Journal Articles

Residual stress stability in fiber textured stoichiometric AlN film grown using rf magnetron sputtering

R. E. Sah, L. Kirste, M. Baeumler, P. Hiesinger, V. Cimalla, V. Lebedev, H. Baumann, H.-E. Zschau
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 394–399 (2010)
https://doi.org/10.1116/1.3360299
Published: March 2010
View article titled, Residual stress stability in fiber textured stoichiometric AlN film grown using rf magnetron sputtering
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Journal Articles

Optimal design of antireflection coating and experimental verification by plasma enhanced chemical vapor deposition in small displays

S. M. Yang, Y. C. Hsieh, C. A. Jeng
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 336–341 (2009)
https://doi.org/10.1116/1.3081962
Published: February 2009
View article titled, Optimal design of antireflection coating and experimental verification by plasma enhanced chemical vapor deposition in small displays
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