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Journal Articles
Effect of the repeated application of First Contact™ polymer on xenon-difluoride passivated lithium fluoride on aluminum surfaces for space telescopes
Available to PurchaseJoshua Vawdrey, James Hamilton, Drew Watson, Lauren Miner, Osemudiamhen Destiny Amienghemhen, Walter Paxton, David Allred
J. Vac. Sci. Technol. A 43, 043408 (2025)
Published: May 2025
Journal Articles
J. Vac. Sci. Technol. A 42, 063401 (2024)
Published: September 2024
Journal Articles
Immersion ellipsometry for the uncorrelated determination of ultrathin film thickness and index of refraction: Theory and examples
J. Vac. Sci. Technol. A 42, 053401 (2024)
Published: July 2024
Journal Articles
Optical studies of pure and (Cu, Co) doped nickel zinc ferrite films deposited on quartz substrate
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J. Vac. Sci. Technol. A 41, 023404 (2023)
Published: February 2023
Journal Articles
In situ spectroscopic ellipsometry and rigorous coupled wave analysis for real time profile evolution of atomic layer deposited films inside SiO2 nanotrenches
J. Vac. Sci. Technol. A 40, 062403 (2022)
Published: September 2022
Includes: Supplementary data
Journal Articles
Michael Snure, Michael J. Motala, Timothy A. Prusnick, Evan M. Smith, David Moore, Christopher Muratore, Shivashankar R. Vangala, Nicholas R. Glavin
J. Vac. Sci. Technol. A 40, 042202 (2022)
Published: June 2022
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In situ monitoring atomic layer doping processes for Al-doped ZnO layers: Competitive nature of surface reactions between metal precursors
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J. Vac. Sci. Technol. A 40, 042401 (2022)
Published: May 2022
Includes: Supplementary data
Journal Articles
Optical constants of single-crystalline Ni(100) from 77 to 770 K from ellipsometry measurements
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J. Vac. Sci. Technol. A 40, 033202 (2022)
Published: March 2022
Journal Articles
Mechanism of SiN etching rate fluctuation in atomic layer etching
Available to PurchaseAkiko Hirata, Masanaga Fukasawa, Katsuhisa Kugimiya, Kojiro Nagaoka, Kazuhiro Karahashi, Satoshi Hamaguchi, Hayato Iwamoto
J. Vac. Sci. Technol. A 38, 062601 (2020)
Published: November 2020
Journal Articles
Resolving self-limiting growth in silicon nitride plasma enhanced atomic layer deposition with tris-dimethylamino silane precursor
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J. Vac. Sci. Technol. A 38, 062406 (2020)
Published: October 2020
Includes: Supplementary data
Journal Articles
Effect of two-step post-treatment on optical properties, microstructure, and nanosecond laser damage threshold of HfO2/TiO2/SiO2 multilayer high reflection films
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J. Vac. Sci. Technol. A 37, 061503 (2019)
Published: October 2019
Journal Articles
Properties of sputtered ZnS and ZnS:A (A = Er, Yb) films grown at low substrate temperatures
Available to PurchaseCarlos A. Ortiz, Astrid L. Giraldo-Betancur, Martín A. Hernández-Landaverde, Marius Ramírez-Cardona, Arturo Mendoza-Galván, Sergio Jiménez-Sandoval
J. Vac. Sci. Technol. A 35, 031505 (2017)
Published: March 2017
Journal Articles
Timothy Nathan Nunley, Travis I. Willett-Gies, Jacqueline A. Cooke, Felicia S. Manciu, Premysl Marsik, Christian Bernhard, Stefan Zollner
J. Vac. Sci. Technol. A 34, 051507 (2016)
Published: August 2016
Journal Articles
Optical constants and band structure of trigonal NiO
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J. Vac. Sci. Technol. A 33, 061203 (2015)
Published: October 2015
Journal Articles
Nucleation and growth of MgO atomic layer deposition: A real-time spectroscopic ellipsometry study
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J. Vac. Sci. Technol. A 31, 06F101 (2013)
Published: July 2013
Journal Articles
Tin oxide atomic layer deposition from tetrakis(dimethylamino)tin and water
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J. Vac. Sci. Technol. A 31, 061503 (2013)
Published: July 2013
Includes: Supplementary data
Journal Articles
Characterization of low temperature deposited atomic layer deposition TiO2 for MEMS applications
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J. Vac. Sci. Technol. A 31, 01A148 (2013)
Published: December 2012
Journal Articles
Spectroscopic ellipsometry of superparamagnetic nanoparticles in thin films of poly(N-isopropylacrylamide)
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J. Vac. Sci. Technol. A 30, 041514 (2012)
Published: June 2012
Includes: Supplementary data
Journal Articles
Growth characteristics, material properties, and optical properties of zinc oxysulfide films deposited by atomic layer deposition
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J. Vac. Sci. Technol. A 30, 01A135 (2012)
Published: December 2011
Includes: Supplementary data
Journal Articles
Real-time spectroscopic ellipsometric investigation of adsorption and desorption in atomic layer deposition: A case study for the strontium bis(tri-isopropylcyclopentadienyl)/water process
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J. Vac. Sci. Technol. A 30, 01A133 (2012)
Published: December 2011
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