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Journal Articles

Correlation of interfacial and dielectric characteristics in atomic layer deposited Al2O3/TiO2 nanolaminates grown with different precursor purge times

Partha Sarathi Padhi, R. S. Ajimsha, S. K. Rai, Sushmita Bhartiya, Aniruddha Bose, Bidyadhar Das, Manoj Kumar Tiwari, Pankaj Misra
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063201 (2023)
https://doi.org/10.1116/6.0002849
Published: September 2023
View article titled, Correlation of interfacial and dielectric characteristics in atomic layer deposited Al<sub>2</sub>O<sub>3</sub>/TiO<sub>2</sub> nanolaminates grown with different precursor purge times
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Includes: Supplementary data
Journal Articles

Correlating elemental compositions and charge carrier profiles in ultra-pure GaN/AlGaN stacks grown by molecular beam epitaxy

Stefan Schmult, Pascal Appelt, Claudia Silva, Steffen Wirth, Andre Wachowiak, Andreas Großer, Thomas Mikolajick
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 042702 (2023)
https://doi.org/10.1116/6.0002652
Published: May 2023
View article titled, Correlating elemental compositions and charge carrier profiles in ultra-pure GaN/AlGaN stacks grown by molecular beam epitaxy
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Journal Articles

Design of InGaN-ZnSnGa2N4 quantum wells for high-efficiency amber light emitting diodes

Kaitian Zhang, Chenxi Hu, Vijay Gopal Thirupakuzi Vangipuram, Kathleen Kash, Hongping Zhao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033206 (2023)
https://doi.org/10.1116/6.0002524
Published: April 2023
View article titled, Design of InGaN-ZnSnGa<sub>2</sub>N<sub>4</sub> quantum wells for high-efficiency amber light emitting diodes
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Journal Articles

Exploration of the nonideal behavior observed in engineered, multilayer MgO/Ag/MgO photocathodes

ZhengRong Lee, Linda Spentzouris, Manfred Mascheck, Jeff Terry
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063202 (2021)
https://doi.org/10.1116/6.0001136
Published: September 2021
View article titled, Exploration of the nonideal behavior observed in engineered, multilayer MgO/Ag/MgO photocathodes
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Journal Articles

Atomic layer deposition onto fabrics of carbon and silicon carbide fibers: Preparation of multilayers comprising alumina, titania-furfuryl alcohol hybrid, and titanium phosphate

Pauline Dill, Florian Pachel, Christian Militzer, Alexander Held, Georg Puchas, Stefan Knohl, Walter Krenkel, Christoph Tegenkamp, Werner Andreas Goedel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 052406 (2021)
https://doi.org/10.1116/6.0001193
Published: August 2021
View article titled, Atomic layer deposition onto fabrics of carbon and silicon carbide fibers: Preparation of multilayers comprising alumina, titania-furfuryl alcohol hybrid, and titanium phosphate
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Includes: Supplementary data
Journal Articles

Enhancement in the tribological performance of WSx/a-C multilayer films with Al sublayers in vacuum

Fang-er Yang, Wan-kun Zhang, Gong-qi Wang, Tao Wang, Xiao-hua Zheng
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 033404 (2021)
https://doi.org/10.1116/6.0000785
Published: March 2021
View article titled, Enhancement in the tribological performance of WS<em><sub>x</sub></em>/a-C multilayer films with Al sublayers in vacuum
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Journal Articles

Effects of electrochemical potentiostatic activation on carrier transport in AlGaN-based deep-ultraviolet light-emitting diodes

Dong Yeong Kim, Hyunwoong Kang, Koh Eun Lee, Rak Jun Choi, June Key Lee, Jaehee Cho
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 023410 (2021)
https://doi.org/10.1116/6.0000827
Published: February 2021
View article titled, Effects of electrochemical potentiostatic activation on carrier transport in AlGaN-based deep-ultraviolet light-emitting diodes
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Includes: Supplementary data
Journal Articles

Low-energy high-flux ion bombardment-induced interfacial mixing during Al2O3 plasma-enhanced atomic layer deposition

Masaki Hirayama, Shigetoshi Sugawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 052407 (2020)
https://doi.org/10.1116/6.0000388
Published: August 2020
View article titled, Low-energy high-flux ion bombardment-induced interfacial mixing during Al<sub>2</sub>O<sub>3</sub> plasma-enhanced atomic layer deposition
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Journal Articles

Atomic layer etching of AlGaN using Cl2 and Ar gas chemistry and UV damage evaluation

Hiroyuki Fukumizu, Makoto Sekine, Masaru Hori, Koji Kanomaru, Takuo Kikuchi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021002 (2019)
https://doi.org/10.1116/1.5063795
Published: January 2019
View article titled, Atomic layer etching of AlGaN using Cl<sub>2</sub> and Ar gas chemistry and UV damage evaluation
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Journal Articles

Atomic layer deposition of 2D and 3D standards for synchrotron-based quantitative composition and structure analysis methods

Nicholas G. Becker, Anna L. Butterworth, Murielle Salome, Stephen R. Sutton, Vincent De Andrade, Andrey Sokolov, Andrew J. Westphal, Thomas Proslier
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 02D403 (2018)
https://doi.org/10.1116/1.5025240
Published: February 2018
View article titled, Atomic layer deposition of 2D and 3D standards for synchrotron-based quantitative composition and structure analysis methods
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Includes: Supplementary data
Journal Articles

Effect of surface pretreatment on interfacial chemical bonding states of atomic layer deposited ZrO2 on AlGaN

Gang Ye, Hong Wang, Serene Lay Geok Ng, Rong Ji, Subramaniam Arulkumaran, Geok Ing Ng, Yang Li, Zhi Hong Liu, Kian Siong Ang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 05E117 (2015)
https://doi.org/10.1116/1.4927164
Published: July 2015
View article titled, Effect of surface pretreatment on interfacial chemical bonding states of atomic layer deposited ZrO<sub>2</sub> on AlGaN
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Journal Articles

Optical radiation selective photodetectors based on III nitrides

R. Pillai, D. Starikov, C. Boney, A. Bensaoula
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 970–973 (2008)
https://doi.org/10.1116/1.2940347
Published: July 2008
View article titled, Optical radiation selective photodetectors based on III nitrides
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Journal Articles

Influence of cathode material and Si Cl 4 gas on inductively coupled plasma etching of AlGaN layers with Cl 2 ∕ Ar plasma

Evgeny Zhirnov, Sergei Stepanov, Wang Nang Wang, Y. G. Shreter, D. V. Takhin, N. I. Bochkareva
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 2336–2341 (2004)
https://doi.org/10.1116/1.1798711
Published: October 2004
View article titled, Influence of cathode material and Si Cl 4 gas on inductively coupled plasma etching of AlGaN layers with Cl 2 ∕ Ar plasma
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Journal Articles

Microstructural analysis of Ti/Al/Ti/Au ohmic contacts to n-AlGaN/GaN

J. Chen, D. G. Ivey, J. Bardwell, Y. Liu, H. Tang, J. B. Webb
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 1004–1010 (2002)
https://doi.org/10.1116/1.1472428
Published: May 2002
View article titled, Microstructural analysis of Ti/Al/Ti/Au ohmic contacts to <em>n</em>-AlGaN/GaN
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Journal Articles

Studies of metallic multilayer structures, optical properties, and oxidation using in situ spectroscopic ellipsometry

Xiang Gao, Jeff Hale, Scott Heckens, John A. Woollam
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 16, 429–435 (1998)
https://doi.org/10.1116/1.581094
Published: March 1998
View article titled, Studies of metallic multilayer structures, optical properties, and oxidation using <em>in situ</em> spectroscopic ellipsometry
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Journal Articles

Low-pressure organometallic vapor phase epitaxy of coherent InGaAsP/InP and InGaAsP/InAsP multilayers on InP(001)

S. Guillon, R. Y.-F. Yip, P. Desjardins, M. Chicoine, Z. Bougrioua, M. Beaudoin, A. Aı̈t-Ouali, R. A. Masut
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 16, 781–785 (1998)
https://doi.org/10.1116/1.581521
Published: March 1998
View article titled, Low-pressure organometallic vapor phase epitaxy of coherent InGaAsP/InP and InGaAsP/InAsP multilayers on InP(001)
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Journal Articles

Competing strain relaxation mechanisms in organometallic vapor-phase epitaxy of strain-compensated GaInP/InAsP multilayers on InP(001)

P. Desjardins, L. Isnard, H. Marchand, R. A. Masut
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 16, 776–780 (1998)
https://doi.org/10.1116/1.581058
Published: March 1998
View article titled, Competing strain relaxation mechanisms in organometallic vapor-phase epitaxy of strain-compensated GaInP/InAsP multilayers on InP(001)
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Journal Articles

Dependence of x‐ray absorption magnetic circular dichroism on layer periodicity in iron–platinum multilayers

A. F. Jankowski, G. D. Waddill, J. G. Tobin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 12, 2215–2218 (1994)
https://doi.org/10.1116/1.579117
Published: July 1994
View article titled, Dependence of x‐ray absorption magnetic circular dichroism on layer periodicity in iron–platinum multilayers
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