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Journal Articles
Investigation on properties of the TiSiN/TiSi-diamondlike carbon multilayer coatings prepared by hybrid deposition technique
Available to PurchaseMenghui Chen, Mai Yang, Tao Huang, Yibing Su, Yuzhe Han, Qizhong Li, Meijun Yang, Song Zhang, Takashi Goto, Rong Tu
J. Vac. Sci. Technol. A 43, 023107 (2025)
Published: March 2025
Journal Articles
Layer thickness dependent interface strengthening of nanolayered W/NbMoTaW medium-entropy alloys
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J. Vac. Sci. Technol. A 43, 013401 (2025)
Published: December 2024
Journal Articles
MOCVD grown ultraviolet microlight-emitting diodes with an InGaN/GaN/AlGaN active region design
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J. Vac. Sci. Technol. A 41, 062706 (2023)
Published: November 2023
Journal Articles
Correlation of interfacial and dielectric characteristics in atomic layer deposited Al2O3/TiO2 nanolaminates grown with different precursor purge times
Available to PurchasePartha Sarathi Padhi, R. S. Ajimsha, S. K. Rai, Sushmita Bhartiya, Aniruddha Bose, Bidyadhar Das, Manoj Kumar Tiwari, Pankaj Misra
J. Vac. Sci. Technol. A 41, 063201 (2023)
Published: September 2023
Includes: Supplementary data
Journal Articles
Stefan Schmult, Pascal Appelt, Claudia Silva, Steffen Wirth, Andre Wachowiak, Andreas Großer, Thomas Mikolajick
J. Vac. Sci. Technol. A 41, 042702 (2023)
Published: May 2023
Journal Articles
Design of InGaN-ZnSnGa2N4 quantum wells for high-efficiency amber light emitting diodes
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J. Vac. Sci. Technol. A 41, 033206 (2023)
Published: April 2023
Journal Articles
Exploration of the nonideal behavior observed in engineered, multilayer MgO/Ag/MgO photocathodes
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J. Vac. Sci. Technol. A 39, 063202 (2021)
Published: September 2021
Journal Articles
Atomic layer deposition onto fabrics of carbon and silicon carbide fibers: Preparation of multilayers comprising alumina, titania-furfuryl alcohol hybrid, and titanium phosphate
Pauline Dill, Florian Pachel, Christian Militzer, Alexander Held, Georg Puchas, Stefan Knohl, Walter Krenkel, Christoph Tegenkamp, Werner Andreas Goedel
J. Vac. Sci. Technol. A 39, 052406 (2021)
Published: August 2021
Includes: Supplementary data
Journal Articles
Enhancement in the tribological performance of WSx/a-C multilayer films with Al sublayers in vacuum
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J. Vac. Sci. Technol. A 39, 033404 (2021)
Published: March 2021
Journal Articles
Effects of electrochemical potentiostatic activation on carrier transport in AlGaN-based deep-ultraviolet light-emitting diodes
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J. Vac. Sci. Technol. A 39, 023410 (2021)
Published: February 2021
Includes: Supplementary data
Journal Articles
Low-energy high-flux ion bombardment-induced interfacial mixing during Al2O3 plasma-enhanced atomic layer deposition
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J. Vac. Sci. Technol. A 38, 052407 (2020)
Published: August 2020
Journal Articles
Atomic layer etching of AlGaN using Cl2 and Ar gas chemistry and UV damage evaluation
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J. Vac. Sci. Technol. A 37, 021002 (2019)
Published: January 2019
Journal Articles
Nicholas G. Becker, Anna L. Butterworth, Murielle Salome, Stephen R. Sutton, Vincent De Andrade, Andrey Sokolov, Andrew J. Westphal, Thomas Proslier
J. Vac. Sci. Technol. A 36, 02D403 (2018)
Published: February 2018
Includes: Supplementary data
Journal Articles
Effect of surface pretreatment on interfacial chemical bonding states of atomic layer deposited ZrO2 on AlGaN
Available to PurchaseGang Ye, Hong Wang, Serene Lay Geok Ng, Rong Ji, Subramaniam Arulkumaran, Geok Ing Ng, Yang Li, Zhi Hong Liu, Kian Siong Ang
J. Vac. Sci. Technol. A 33, 05E117 (2015)
Published: July 2015
Journal Articles
Optical radiation selective photodetectors based on III nitrides
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J. Vac. Sci. Technol. A 26, 970–973 (2008)
Published: July 2008
Journal Articles
Influence of cathode material and Si Cl 4 gas on inductively coupled plasma etching of AlGaN layers with Cl 2 ∕ Ar plasma
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J. Vac. Sci. Technol. A 22, 2336–2341 (2004)
Published: October 2004
Journal Articles
Microstructural analysis of Ti/Al/Ti/Au ohmic contacts to n-AlGaN/GaN
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J. Vac. Sci. Technol. A 20, 1004–1010 (2002)
Published: May 2002
Journal Articles
Competing strain relaxation mechanisms in organometallic vapor-phase epitaxy of strain-compensated GaInP/InAsP multilayers on InP(001)
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J. Vac. Sci. Technol. A 16, 776–780 (1998)
Published: March 1998
Journal Articles
Low-pressure organometallic vapor phase epitaxy of coherent InGaAsP/InP and InGaAsP/InAsP multilayers on InP(001)
Available to PurchaseS. Guillon, R. Y.-F. Yip, P. Desjardins, M. Chicoine, Z. Bougrioua, M. Beaudoin, A. Aı̈t-Ouali, R. A. Masut
J. Vac. Sci. Technol. A 16, 781–785 (1998)
Published: March 1998
Journal Articles
Studies of metallic multilayer structures, optical properties, and oxidation using in situ spectroscopic ellipsometry
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J. Vac. Sci. Technol. A 16, 429–435 (1998)
Published: March 1998
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