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Journal Articles

Investigation on properties of the TiSiN/TiSi-diamondlike carbon multilayer coatings prepared by hybrid deposition technique

Menghui Chen, Mai Yang, Tao Huang, Yibing Su, Yuzhe Han, Qizhong Li, Meijun Yang, Song Zhang, Takashi Goto, Rong Tu

J. Vac. Sci. Technol. A 43, 023107 (2025)

https://doi.org/10.1116/6.0004356

Published: March 2025

View articletitled, Investigation on properties of the TiSiN/TiSi-diamondlike carbon multilayer coatings prepared by hybrid deposition technique

Journal Articles

Layer thickness dependent interface strengthening of nanolayered W/NbMoTaW medium-entropy alloys

Y. W. Zhang, Y. J. Ma, L. Wang, J. Cheng, Z. Y. Zhang, X. C. Shen, X. Hua, G. J. Li, Z. H. Cao

J. Vac. Sci. Technol. A 43, 013401 (2025)

https://doi.org/10.1116/6.0004067

Published: December 2024

View articletitled, Layer thickness dependent interface strengthening of nanolayered W/NbMoTaW medium-entropy alloys

Journal Articles

MOCVD grown ultraviolet microlight-emitting diodes with an InGaN/GaN/AlGaN active region design

Guangying Wang, Yuting Li, Cheng Liu, Qinchen Lin, Surjava Sanyal, Chirag Gupta, Shubhra S. Pasayat

J. Vac. Sci. Technol. A 41, 062706 (2023)

https://doi.org/10.1116/6.0002996

Published: November 2023

View articletitled, MOCVD grown ultraviolet microlight-emitting diodes with an InGaN/GaN/AlGaN active region design

Journal Articles

Correlation of interfacial and dielectric characteristics in atomic layer deposited Al₂O₃/TiO₂ nanolaminates grown with different precursor purge times

Partha Sarathi Padhi, R. S. Ajimsha, S. K. Rai, Sushmita Bhartiya, Aniruddha Bose, Bidyadhar Das, Manoj Kumar Tiwari, Pankaj Misra

J. Vac. Sci. Technol. A 41, 063201 (2023)

https://doi.org/10.1116/6.0002849

Published: September 2023

View articletitled, Correlation of interfacial and dielectric characteristics in atomic layer deposited Al2O3/TiO2 nanolaminates grown with different precursor purge times

Includes: Supplementary data

Journal Articles

Correlating elemental compositions and charge carrier profiles in ultra-pure GaN/AlGaN stacks grown by molecular beam epitaxy

Stefan Schmult, Pascal Appelt, Claudia Silva, Steffen Wirth, Andre Wachowiak, Andreas Großer, Thomas Mikolajick

J. Vac. Sci. Technol. A 41, 042702 (2023)

https://doi.org/10.1116/6.0002652

Published: May 2023

View articletitled, Correlating elemental compositions and charge carrier profiles in ultra-pure GaN/AlGaN stacks grown by molecular beam epitaxy

Journal Articles

Design of InGaN-ZnSnGa₂N₄ quantum wells for high-efficiency amber light emitting diodes

Kaitian Zhang, Chenxi Hu, Vijay Gopal Thirupakuzi Vangipuram, Kathleen Kash, Hongping Zhao

J. Vac. Sci. Technol. A 41, 033206 (2023)

https://doi.org/10.1116/6.0002524

Published: April 2023

View articletitled, Design of InGaN-ZnSnGa2N4 quantum wells for high-efficiency amber light emitting diodes

Journal Articles

Exploration of the nonideal behavior observed in engineered, multilayer MgO/Ag/MgO photocathodes

ZhengRong Lee, Linda Spentzouris, Manfred Mascheck, Jeff Terry

J. Vac. Sci. Technol. A 39, 063202 (2021)

https://doi.org/10.1116/6.0001136

Published: September 2021

View articletitled, Exploration of the nonideal behavior observed in engineered, multilayer MgO/Ag/MgO photocathodes

Journal Articles

Atomic layer deposition onto fabrics of carbon and silicon carbide fibers: Preparation of multilayers comprising alumina, titania-furfuryl alcohol hybrid, and titanium phosphate

Pauline Dill, Florian Pachel, Christian Militzer, Alexander Held, Georg Puchas, Stefan Knohl, Walter Krenkel, Christoph Tegenkamp, Werner Andreas Goedel

J. Vac. Sci. Technol. A 39, 052406 (2021)

https://doi.org/10.1116/6.0001193

Published: August 2021

View articletitled, Atomic layer deposition onto fabrics of carbon and silicon carbide fibers: Preparation of multilayers comprising alumina, titania-furfuryl alcohol hybrid, and titanium phosphate

Includes: Supplementary data

Journal Articles

Enhancement in the tribological performance of WS_x/a-C multilayer films with Al sublayers in vacuum

Fang-er Yang, Wan-kun Zhang, Gong-qi Wang, Tao Wang, Xiao-hua Zheng

J. Vac. Sci. Technol. A 39, 033404 (2021)

https://doi.org/10.1116/6.0000785

Published: March 2021

View articletitled, Enhancement in the tribological performance of WSx/a-C multilayer films with Al sublayers in vacuum

Journal Articles

Effects of electrochemical potentiostatic activation on carrier transport in AlGaN-based deep-ultraviolet light-emitting diodes

Dong Yeong Kim, Hyunwoong Kang, Koh Eun Lee, Rak Jun Choi, June Key Lee, Jaehee Cho

J. Vac. Sci. Technol. A 39, 023410 (2021)

https://doi.org/10.1116/6.0000827

Published: February 2021

View articletitled, Effects of electrochemical potentiostatic activation on carrier transport in AlGaN-based deep-ultraviolet light-emitting diodes

Includes: Supplementary data

Journal Articles

Low-energy high-flux ion bombardment-induced interfacial mixing during Al₂O₃ plasma-enhanced atomic layer deposition

Masaki Hirayama, Shigetoshi Sugawa

J. Vac. Sci. Technol. A 38, 052407 (2020)

https://doi.org/10.1116/6.0000388

Published: August 2020

View articletitled, Low-energy high-flux ion bombardment-induced interfacial mixing during Al2O3 plasma-enhanced atomic layer deposition

Journal Articles

Atomic layer etching of AlGaN using Cl₂ and Ar gas chemistry and UV damage evaluation

Hiroyuki Fukumizu, Makoto Sekine, Masaru Hori, Koji Kanomaru, Takuo Kikuchi

J. Vac. Sci. Technol. A 37, 021002 (2019)

https://doi.org/10.1116/1.5063795

Published: January 2019

View articletitled, Atomic layer etching of AlGaN using Cl2 and Ar gas chemistry and UV damage evaluation

Journal Articles

Atomic layer deposition of 2D and 3D standards for synchrotron-based quantitative composition and structure analysis methods

Nicholas G. Becker, Anna L. Butterworth, Murielle Salome, Stephen R. Sutton, Vincent De Andrade, Andrey Sokolov, Andrew J. Westphal, Thomas Proslier

J. Vac. Sci. Technol. A 36, 02D403 (2018)

https://doi.org/10.1116/1.5025240

Published: February 2018

View articletitled, Atomic layer deposition of 2D and 3D standards for synchrotron-based quantitative composition and structure analysis methods

Includes: Supplementary data

Journal Articles

Effect of surface pretreatment on interfacial chemical bonding states of atomic layer deposited ZrO₂ on AlGaN

Gang Ye, Hong Wang, Serene Lay Geok Ng, Rong Ji, Subramaniam Arulkumaran, Geok Ing Ng, Yang Li, Zhi Hong Liu, Kian Siong Ang

J. Vac. Sci. Technol. A 33, 05E117 (2015)

https://doi.org/10.1116/1.4927164

Published: July 2015

View articletitled, Effect of surface pretreatment on interfacial chemical bonding states of atomic layer deposited ZrO2 on AlGaN

Journal Articles

Optical radiation selective photodetectors based on III nitrides

R. Pillai, D. Starikov, C. Boney, A. Bensaoula

J. Vac. Sci. Technol. A 26, 970–973 (2008)

https://doi.org/10.1116/1.2940347

Published: July 2008

View articletitled, Optical radiation selective photodetectors based on III nitrides

Journal Articles

Influence of cathode material and Si Cl 4 gas on inductively coupled plasma etching of AlGaN layers with Cl 2 ∕ Ar plasma

Evgeny Zhirnov, Sergei Stepanov, Wang Nang Wang, Y. G. Shreter, D. V. Takhin, N. I. Bochkareva

J. Vac. Sci. Technol. A 22, 2336–2341 (2004)

https://doi.org/10.1116/1.1798711

Published: October 2004

View articletitled, Influence of cathode material and Si Cl 4 gas on inductively coupled plasma etching of AlGaN layers with Cl 2 ∕ Ar plasma

Journal Articles

Microstructural analysis of Ti/Al/Ti/Au ohmic contacts to n-AlGaN/GaN

J. Chen, D. G. Ivey, J. Bardwell, Y. Liu, H. Tang, J. B. Webb

J. Vac. Sci. Technol. A 20, 1004–1010 (2002)

https://doi.org/10.1116/1.1472428

Published: May 2002

View articletitled, Microstructural analysis of Ti/Al/Ti/Au ohmic contacts to n-AlGaN/GaN

Journal Articles

Competing strain relaxation mechanisms in organometallic vapor-phase epitaxy of strain-compensated GaInP/InAsP multilayers on InP(001)

P. Desjardins, L. Isnard, H. Marchand, R. A. Masut

J. Vac. Sci. Technol. A 16, 776–780 (1998)

https://doi.org/10.1116/1.581058

Published: March 1998

View articletitled, Competing strain relaxation mechanisms in organometallic vapor-phase epitaxy of strain-compensated GaInP/InAsP multilayers on InP(001)

Journal Articles

Low-pressure organometallic vapor phase epitaxy of coherent InGaAsP/InP and InGaAsP/InAsP multilayers on InP(001)

S. Guillon, R. Y.-F. Yip, P. Desjardins, M. Chicoine, Z. Bougrioua, M. Beaudoin, A. Aı̈t-Ouali, R. A. Masut

J. Vac. Sci. Technol. A 16, 781–785 (1998)

https://doi.org/10.1116/1.581521

Published: March 1998

View articletitled, Low-pressure organometallic vapor phase epitaxy of coherent InGaAsP/InP and InGaAsP/InAsP multilayers on InP(001)

Journal Articles

Studies of metallic multilayer structures, optical properties, and oxidation using in situ spectroscopic ellipsometry

Xiang Gao, Jeff Hale, Scott Heckens, John A. Woollam

J. Vac. Sci. Technol. A 16, 429–435 (1998)

https://doi.org/10.1116/1.581094

Published: March 1998

View articletitled, Studies of metallic multilayer structures, optical properties, and oxidation using in situ spectroscopic ellipsometry

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Investigation on properties of the TiSiN/TiSi-diamondlike carbon multilayer coatings prepared by hybrid deposition technique

Layer thickness dependent interface strengthening of nanolayered W/NbMoTaW medium-entropy alloys

MOCVD grown ultraviolet microlight-emitting diodes with an InGaN/GaN/AlGaN active region design

Correlation of interfacial and dielectric characteristics in atomic layer deposited Al₂O₃/TiO₂ nanolaminates grown with different precursor purge times

Correlating elemental compositions and charge carrier profiles in ultra-pure GaN/AlGaN stacks grown by molecular beam epitaxy

Design of InGaN-ZnSnGa₂N₄ quantum wells for high-efficiency amber light emitting diodes

Exploration of the nonideal behavior observed in engineered, multilayer MgO/Ag/MgO photocathodes

Atomic layer deposition onto fabrics of carbon and silicon carbide fibers: Preparation of multilayers comprising alumina, titania-furfuryl alcohol hybrid, and titanium phosphate

Enhancement in the tribological performance of WS_x/a-C multilayer films with Al sublayers in vacuum

Effects of electrochemical potentiostatic activation on carrier transport in AlGaN-based deep-ultraviolet light-emitting diodes

Low-energy high-flux ion bombardment-induced interfacial mixing during Al₂O₃ plasma-enhanced atomic layer deposition

Atomic layer etching of AlGaN using Cl₂ and Ar gas chemistry and UV damage evaluation

Atomic layer deposition of 2D and 3D standards for synchrotron-based quantitative composition and structure analysis methods

Effect of surface pretreatment on interfacial chemical bonding states of atomic layer deposited ZrO₂ on AlGaN

Optical radiation selective photodetectors based on III nitrides

Influence of cathode material and Si Cl 4 gas on inductively coupled plasma etching of AlGaN layers with Cl 2 ∕ Ar plasma

Microstructural analysis of Ti/Al/Ti/Au ohmic contacts to n-AlGaN/GaN

Competing strain relaxation mechanisms in organometallic vapor-phase epitaxy of strain-compensated GaInP/InAsP multilayers on InP(001)

Low-pressure organometallic vapor phase epitaxy of coherent InGaAsP/InP and InGaAsP/InAsP multilayers on InP(001)

Studies of metallic multilayer structures, optical properties, and oxidation using in situ spectroscopic ellipsometry

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