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Journal Articles

Some considerations in nanoindentation measurement and analysis by atomic force microscopy

Irit Rosenhek-Goldian, Sidney R. Cohen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062801 (2023)
https://doi.org/10.1116/6.0003136
Published: November 2023
View article titled, Some considerations in nanoindentation measurement and analysis by atomic force microscopy
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Journal Articles

Fabrication of antireflective coatings with self-cleaning function using Si–Ti modified hollow silicon mixed sol

Yufan Li, Yong Zheng, Yuze Du, Xi Zhang, Wangwang Wang, Jin Lv
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063411 (2023)
https://doi.org/10.1116/6.0003082
Published: November 2023
View article titled, Fabrication of antireflective coatings with self-cleaning function using Si–Ti modified hollow silicon mixed sol
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Journal Articles

Electron-enhanced atomic layer deposition of Ru thin films using Ru(DMBD)(CO)3 and effect of forming gas anneal

Michael A. Collings, Marcel Junige, Andrew S. Cavanagh, Victor Wang, Andrew C. Kummel, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062408 (2023)
https://doi.org/10.1116/6.0002938
Published: November 2023
View article titled, Electron-enhanced atomic layer deposition of Ru thin films using Ru(DMBD)(CO)<sub>3</sub> and effect of forming gas anneal
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Journal Articles

Investigation of mechanical and microstructural properties of sputter-deposited Zr-Ni3Al coatings

Sunil Kumar Tiwari, Akula Umamaheswara Rao, Archana Singh Kharb, Vipin Chawla, Neha Sardana, Devesh Kumar Avasthi, Amit Kumar Chawla
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063407 (2023)
https://doi.org/10.1116/6.0003022
Published: October 2023
View article titled, Investigation of mechanical and microstructural properties of sputter-deposited Zr-Ni<sub>3</sub>Al coatings
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Journal Articles

Formation of thin films via cold-rolled/annealed nickel sputtering targets

Sixie Li, Ming Wen, Chuanjun Wang, Yiqing Wang, Yue Shen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063405 (2023)
https://doi.org/10.1116/6.0003033
Published: October 2023
View article titled, Formation of thin films via cold-rolled/annealed nickel sputtering targets
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Journal Articles

Phase composition of polycrystalline HfNx (0.45 ≤ x ≤ 1.60) and effects of low-energy ion irradiation on microstructure, texture, and physical properties

Hwan-Seok Seo, Taeyoon Lee, Hyungjun Kim, Ivan Petrov, J. E. Greene
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063406 (2023)
https://doi.org/10.1116/6.0003072
Published: October 2023
View article titled, Phase composition of polycrystalline HfN<sub>x</sub> (0.45 ≤ x ≤ 1.60) and effects of low-energy ion irradiation on microstructure, texture, and physical properties
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Journal Articles

Oxygen plasma treatment of TeO2—B2O3 (boro-tellurite) thin films

Uğur Demirkol, Çağrı Durmuş, Tamer Akan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063006 (2023)
https://doi.org/10.1116/6.0002879
Published: October 2023
View article titled, Oxygen plasma treatment of TeO<sub>2</sub>—B<sub>2</sub>O<sub>3</sub> (boro-tellurite) thin films
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Journal Articles

Plasma-enhanced atomic layer deposition of crystalline Ga2S3 thin films

Femi Mathew, Nithin Poonkottil, Eduardo Solano, Dirk Poelman, Zeger Hens, Christophe Detavernier, Jolien Dendooven
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 060401 (2023)
https://doi.org/10.1116/6.0002993
Published: October 2023
View article titled, Plasma-enhanced atomic layer deposition of crystalline Ga<sub>2</sub>S<sub>3</sub> thin films
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Includes: Supplementary data
Journal Articles

Solid-source metal-organic MBE for elemental Ir and Ru films

Sreejith Nair, Kyle Noordhoek, Dooyong Lee, Christopher J. Bartel, Bharat Jalan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062701 (2023)
https://doi.org/10.1116/6.0002955
Published: September 2023
View article titled, Solid-source metal-organic MBE for elemental Ir and Ru films
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Includes: Supplementary data
Journal Articles

Competition between ion beam sputtering and self-organization of point defects for surface nanostructuring on germanium

Naoto Oishi, Tatsuya Yasuoka, Toshiyuki Kawaharamura, Noriko Nitta
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063101 (2023)
https://doi.org/10.1116/6.0002878
Published: September 2023
View article titled, Competition between ion beam sputtering and self-organization of point defects for surface nanostructuring on germanium
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Includes: Supplementary data
Journal Articles

Plasma-enhanced atomic layer deposition of crystalline GaN thin films on quartz substrates with sharp interfaces

Sanjie Liu, Yangfeng Li, Qing Liu, Jiayou Tao, Xinhe Zheng
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052405 (2023)
https://doi.org/10.1116/6.0002639
Published: August 2023
View article titled, Plasma-enhanced atomic layer deposition of crystalline GaN thin films on quartz substrates with sharp interfaces
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Journal Articles

Quasiatomic layer etching of silicon nitride enhanced by low temperature

Daniel N. Shanks, Rania K. Ahmed, John D. Femi-Oyetoro, Matthew R. Dickie, Andrew D. Beyer, Frank Greer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052601 (2023)
https://doi.org/10.1116/6.0002846
Published: August 2023
View article titled, Quasiatomic layer etching of silicon nitride enhanced by low temperature
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Journal Articles

Work function measurement by ultraviolet photoelectron spectroscopy: Versailles project on advanced materials and standards interlaboratory study

Jeong Won Kim, Ansoon Kim, Hui Ung Hwang, Jun Hyung Kim, Seungwook Choi, Norbert Koch, Dongguen Shin, Zhijuan Zhao, Fen Liu, Minki Choi, Kyu Myung Lee, Yongsup Park
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053211 (2023)
https://doi.org/10.1116/6.0002852
Published: August 2023
View article titled, Work function measurement by ultraviolet photoelectron spectroscopy: Versailles project on advanced materials and standards interlaboratory study
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Journal Articles

Study on effective dry etching of InGaZnO thin films under capacitively coupled plasma-reactive ion etching with a nonfluorine-based etching gas

Changyong Oh, Hyeong Wook Kim, Myeong Woo Ju, Jun Ho Song, Bo Sung Kim
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053007 (2023)
https://doi.org/10.1116/6.0002798
Published: August 2023
View article titled, Study on effective dry etching of InGaZnO thin films under capacitively coupled plasma-reactive ion etching with a nonfluorine-based etching gas
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Journal Articles

Atomic layer deposition of Al2O3 interlayer for improving AlN growth on silicon substrates

Rony Saha, Jonathan Anderson, Mark W. Holtz, Edwin L. Piner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053208 (2023)
https://doi.org/10.1116/6.0002760
Published: August 2023
View article titled, Atomic layer deposition of Al<sub>2</sub>O<sub>3</sub> interlayer for improving AlN growth on silicon substrates
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Journal Articles

Photoemission spectroscopy on photoresist materials: A protocol for analysis of radiation sensitive materials

Faegheh S. Sajjadian, Laura Galleni, Kevin M. Dorney, Dhirendra P. Singh, Fabian Holzmeier, Michiel J. van Setten, Stefan De Gendt, Thierry Conard
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053206 (2023)
https://doi.org/10.1116/6.0002808
Published: August 2023
View article titled, Photoemission spectroscopy on photoresist materials: A protocol for analysis of radiation sensitive materials
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Journal Articles

Effect of local pressure difference caused by argon flow on properties of DLC films on rubber

Haoran Zeng, Jiaqi Liu, Tao Yang, Qiaoyuan Deng, Feng Wen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053410 (2023)
https://doi.org/10.1116/6.0002806
Published: July 2023
View article titled, Effect of local pressure difference caused by argon flow on properties of DLC films on rubber
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Includes: Supplementary data
Journal Articles

Characterizing the composition, structure, and mechanical properties of magnetron sputtering physical vapor deposition TiN and TiSiN coatings

Gilad Zorn, Joshua Salisbury, Jae-Hyuk Her, Rachel Rose, Patrick Shower
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053106 (2023)
https://doi.org/10.1116/6.0002805
Published: July 2023
View article titled, Characterizing the composition, structure, and mechanical properties of magnetron sputtering physical vapor deposition TiN and TiSiN coatings
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Journal Articles

Enhanced structural and optical properties of semipolar ( 11 2 ¯ 2 ) AlGaN film with insertion of AlN/AlGaN superlattice

Xuguang Luo, Xiong Zhang, Ruiting Fang, Lin Chen, Shenyu Xu, Jia Cui, Zhiyi Lou, Yifeng Xu, Shuchang Wang, Guohua Hu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052705 (2023)
https://doi.org/10.1116/6.0002870
Published: July 2023
View article titled, Enhanced structural and optical properties of semipolar ( 11 2 ¯ 2 ) AlGaN film with insertion of AlN/AlGaN superlattice
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Journal Articles

Effect of the growth orientation on the physical properties of Sr2CoNbO6 thin films

Ajay Kumar, Ramcharan Meena, M. Miryala, K. Ueno, Rajendra S. Dhaka
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053409 (2023)
https://doi.org/10.1116/6.0002728
Published: July 2023
View article titled, Effect of the growth orientation on the physical properties of Sr<sub>2</sub>CoNbO<sub>6</sub> thin films
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