Skip Nav Destination
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Format
Collections
Topics
Subjects
Journal
Article Type
Issue Section
Date
Availability
Journal Articles
Zaoyang Lin, Sven Dekelver, Daire Cott, Benjamin Groven, Stefanie Sergeant, Thierry Conard, Xiangyu Wu, Pierre Morin, Dennis Lin, Cesar Javier Lockhart de la Rosa, Gouri Sankar Kar, Annelies Delabie
J. Vac. Sci. Technol. A 42, 062202 (2024)
Published: October 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 063101 (2024)
Published: September 2024
Journal Articles
Yousra Traouli, Ufuk Kilic, Sema G. Kilic, Matthew Hilfiker, Daniel Schmidt, Stefan Schoeche, Eva Schubert, Mathias Schubert
J. Vac. Sci. Technol. A 42, 052403 (2024)
Published: September 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 052704 (2024)
Published: August 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 053103 (2024)
Published: July 2024
Journal Articles
Lena N. Majer, Sander Smink, Wolfgang Braun, Hongguang Wang, Peter A. van Aken, Jochen Mannhart, Felix V. E. Hensling
J. Vac. Sci. Technol. A 42, 052702 (2024)
Published: July 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 040801 (2024)
Published: May 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 042201 (2024)
Published: May 2024
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 42, 043406 (2024)
Published: May 2024
Includes: Supplementary data
Journal Articles
Subhashis Das, Nirosh M. Eldose, Hryhorii Stanchu, Fernando Maia de Oliveira, Mourad Benamara, Yuriy I. Mazur, Zhong Chen, Alan Mantooth, Gregory J. Salamo
J. Vac. Sci. Technol. A 42, 042702 (2024)
Published: May 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 032603 (2024)
Published: April 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 032707 (2024)
Published: April 2024
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 42, 033407 (2024)
Published: April 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 032704 (2024)
Published: April 2024
Journal Articles
Corbin Feit, Udit Kumar, Md. Rafiqul Islam, Luis Tomar, S. Novia Berriel, John T. Gaskins, Patrick E. Hopkins, Sudipta Seal, Parag Banerjee
J. Vac. Sci. Technol. A 42, 032407 (2024)
Published: April 2024
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 42, 032703 (2024)
Published: April 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 033404 (2024)
Published: March 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 032402 (2024)
Published: March 2024
Includes: Supplementary data
Journal Articles
D. Gogova, D. Q. Tran, V. Stanishev, V. Jokubavicius, L. Vines, M. Schubert, R. Yakimova, P. P. Paskov, V. Darakchieva
J. Vac. Sci. Technol. A 42, 022708 (2024)
Published: February 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 022706 (2024)
Published: February 2024
1