1-20 of 41
Microstructural properties
Close
Save search
Follow your search
Access your saved searches in your account
Close Modal
Sort by
Journal Articles

Investigation of mechanical and microstructural properties of sputter-deposited Zr-Ni3Al coatings

Sunil Kumar Tiwari, Akula Umamaheswara Rao, Archana Singh Kharb, Vipin Chawla, Neha Sardana, Devesh Kumar Avasthi, Amit Kumar Chawla
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063407 (2023)
https://doi.org/10.1116/6.0003022
Published: October 2023
View article titled, Investigation of mechanical and microstructural properties of sputter-deposited Zr-Ni<sub>3</sub>Al coatings
Open the PDF for Investigation of mechanical and microstructural properties of sputter-deposited Zr-Ni<sub>3</sub>Al coatings in another window
Journal Articles

Effect of tilted closed-field magnetron design on the microstructure and mechanical properties of TiZrNbTaN coatings

Sanath Kumar Honnali, Charlotte Poterie, Arnaud le Febvrier, Daniel Lundin, Grzegorz Greczynski, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043402 (2023)
https://doi.org/10.1116/6.0002752
Published: May 2023
View article titled, Effect of tilted closed-field magnetron design on the microstructure and mechanical properties of TiZrNbTaN coatings
Open the PDF for Effect of tilted closed-field magnetron design on the microstructure and mechanical properties of TiZrNbTaN coatings in another window
Includes: Supplementary data
Journal Articles

Research on the preparation and performance of anti-dust self-cleaning film on Mars dusty environment

Minglei Yang, Guangyu He, Jiao Chen, Zhaolu Zhang, Guanjun Yang, Zezhou Sun
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 013408 (2022)
https://doi.org/10.1116/6.0001346
Published: December 2021
View article titled, Research on the preparation and performance of anti-dust self-cleaning film on Mars dusty environment
Open the PDF for Research on the preparation and performance of anti-dust self-cleaning film on Mars dusty environment in another window
Journal Articles

Effect of anti-reflection coating on the performance of silicon solar cells with nanocrystalline quantum dots downshifting film

Ala H. Sabeeh, Alyssa N. Brigman, Jerzy Ruzyllo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 032802 (2021)
https://doi.org/10.1116/6.0000833
Published: May 2021
View article titled, Effect of anti-reflection coating on the performance of silicon solar cells with nanocrystalline quantum dots downshifting film
Open the PDF for Effect of anti-reflection coating on the performance of silicon solar cells with nanocrystalline quantum dots downshifting film in another window
Journal Articles

Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls

Elmeri Österlund, Heli Seppänen, Kristina Bespalova, Ville Miikkulainen, Mervi Paulasto-Kröckel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 032403 (2021)
https://doi.org/10.1116/6.0000724
Published: March 2021
View article titled, Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls
Open the PDF for Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls in another window
Includes: Supplementary data
Journal Articles

Plasma deposition—Impact of ions in plasma enhanced chemical vapor deposition, plasma enhanced atomic layer deposition, and applications to area selective deposition

Christophe Vallée, Marceline Bonvalot, Samia Belahcen, Taguhi Yeghoyan, Moustapha Jaffal, Rémi Vallat, Ahmad Chaker, Gautier Lefèvre, Sylvain David, Ahmad Bsiesy, Nicolas Possémé, Rémy Gassilloud, Agnès Granier
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 033007 (2020)
https://doi.org/10.1116/1.5140841
Published: April 2020
View article titled, Plasma deposition—Impact of ions in plasma enhanced chemical vapor deposition, plasma enhanced atomic layer deposition, and applications to area selective deposition
Open the PDF for Plasma deposition—Impact of ions in plasma enhanced chemical vapor deposition, plasma enhanced atomic layer deposition, and applications to area selective deposition in another window
Journal Articles

Atomic layer deposition of high-quality Pt thin film as an alternative interconnect replacing Cu

Seung-Min Han, Dip K. Nandi, Yong-Hwan Joo, Toshiyuki Shigetomi, Kazuharu Suzuki, Shunichi Nabeya, Ryosuke Harada, Soo-Hyun Kim
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 032404 (2020)
https://doi.org/10.1116/1.5134696
Published: March 2020
View article titled, Atomic layer deposition of high-quality Pt thin film as an alternative interconnect replacing Cu
Open the PDF for Atomic layer deposition of high-quality Pt thin film as an alternative interconnect replacing Cu in another window
Journal Articles

High temperature microstructure evolution and thermal shock resistance of plasma sprayed Al2O3-ZrO2-CeO2 coatings

Ce-ce Zhao, Xiao-wen Sun, Xing-yu Wang, Yong Yang, Chen Zhang, Yan-wei Wang, Yu-duo Ma, Yu-hang Cui, Lei Wang, Yan-chun Dong, You Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 023206 (2020)
https://doi.org/10.1116/1.5131578
Published: February 2020
View article titled, High temperature microstructure evolution and thermal shock resistance of plasma sprayed Al<sub>2</sub>O<sub>3</sub>-ZrO<sub>2</sub>-CeO<sub>2</sub> coatings
Open the PDF for High temperature microstructure evolution and thermal shock resistance of plasma sprayed Al<sub>2</sub>O<sub>3</sub>-ZrO<sub>2</sub>-CeO<sub>2</sub> coatings in another window
Journal Articles

Effect of microstructural changes in the biological behavior of magnetron sputtered ZnO thin films

Diogo Costa, Joel Borges, Maria F. Mota, Marco S. Rodrigues, Patrícia Pereira-Silva, Armando Ferreira, Cátia S. Pereira, Paula Sampaio, Filipe Vaz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 011501 (2019)
https://doi.org/10.1116/1.5048785
Published: December 2018
View article titled, Effect of microstructural changes in the biological behavior of magnetron sputtered ZnO thin films
Open the PDF for Effect of microstructural changes in the biological behavior of magnetron sputtered ZnO thin films in another window
Journal Articles

Low electrical resistivity in thin and ultrathin copper layers grown by high power impulse magnetron sputtering

Felipe Cemin, Daniel Lundin, Davide Cammilleri, Thomas Maroutian, Philippe Lecoeur, Tiberiu Minea
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 051506 (2016)
https://doi.org/10.1116/1.4959555
Published: July 2016
View article titled, Low electrical resistivity in thin and ultrathin copper layers grown by high power impulse magnetron sputtering
Open the PDF for Low electrical resistivity in thin and ultrathin copper layers grown by high power impulse magnetron sputtering in another window
Journal Articles

Annealing effect for SnS thin films prepared by high-vacuum evaporation

Naidu Revathi, Sergei Bereznev, Mihkel Loorits, Jaan Raudoja, Julia Lehner, Jelena Gurevits, Rainer Traksmaa, Valdek Mikli, Enn Mellikov, Olga Volobujeva
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 061506 (2014)
https://doi.org/10.1116/1.4896334
Published: September 2014
View article titled, Annealing effect for SnS thin films prepared by high-vacuum evaporation
Open the PDF for Annealing effect for SnS thin films prepared by high-vacuum evaporation in another window
Journal Articles

Process monitoring during AlNxOy deposition by reactive magnetron sputtering and correlation with the film's properties

Joel Borges, Nicolas Martin, Filipe Vaz, Luis Marques
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 021307 (2014)
https://doi.org/10.1116/1.4863957
Published: February 2014
View article titled, Process monitoring during AlN<sub>x</sub>O<sub>y</sub> deposition by reactive magnetron sputtering and correlation with the film's properties
Open the PDF for Process monitoring during AlN<sub>x</sub>O<sub>y</sub> deposition by reactive magnetron sputtering and correlation with the film's properties in another window
Journal Articles

Correlations of Cu(In, Ga)Se2 imaging with device performance, defects, and microstructural properties

Steve Johnston, Thomas Unold, Ingrid Repins, Ana Kanevce, Katherine Zaunbrecher, Fei Yan, Jian V. Li, Patricia Dippo, Rajalakshmi Sundaramoorthy, Kim M. Jones, Bobby To
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 04D111 (2012)
https://doi.org/10.1116/1.4714358
Published: May 2012
View article titled, Correlations of Cu(In, Ga)Se<sub>2</sub> imaging with device performance, defects, and microstructural properties
Open the PDF for Correlations of Cu(In, Ga)Se<sub>2</sub> imaging with device performance, defects, and microstructural properties in another window
Journal Articles

Electrical and microstructural properties of N + ion-implanted ZnO and ZnO:Ag thin films

Michelle A. Myers, Michael T. Myers, Chen-Fong Tsai, Joon Hwan Lee, Tianlin Lu, Lin Shao, Haiyan Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 29, 03A108 (2011)
https://doi.org/10.1116/1.3554836
Published: February 2011
View article titled, Electrical and microstructural properties of N + ion-implanted ZnO and ZnO:Ag thin films
Open the PDF for Electrical and microstructural properties of N + ion-implanted ZnO and ZnO:Ag thin films in another window
Journal Articles

Influence of deposition parameters on the microstructure and properties of nitrogen-doped diamondlike carbon films

L. Sun, H. K. Li, G. Q. Lin, C. Dong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 1299–1306 (2010)
https://doi.org/10.1116/1.3482010
Published: September 2010
View article titled, Influence of deposition parameters on the microstructure and properties of nitrogen-doped diamondlike carbon films
Open the PDF for Influence of deposition parameters on the microstructure and properties of nitrogen-doped diamondlike carbon films in another window
Journal Articles

Spectroellipsometric investigation of optical, morphological, and structural properties of reactively sputtered polycrystalline AlN films

T. Easwarakhanthan, S. S. Hussain, P. Pigeat
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 495–501 (2010)
https://doi.org/10.1116/1.3372833
Published: April 2010
View article titled, Spectroellipsometric investigation of optical, morphological, and structural properties of reactively sputtered polycrystalline AlN films
Open the PDF for Spectroellipsometric investigation of optical, morphological, and structural properties of reactively sputtered polycrystalline AlN films in another window
Journal Articles

Influence of N 2 gas pressure and negative bias voltage on the microstructure and properties of Cr–Si–N films by a hybrid coating system

Qimin Wang, In-Wook Park, Kwangho Kim
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 1188–1194 (2008)
https://doi.org/10.1116/1.2960558
Published: August 2008
View article titled, Influence of N 2 gas pressure and negative bias voltage on the microstructure and properties of Cr–Si–N films by a hybrid coating system
Open the PDF for Influence of N 2 gas pressure and negative bias voltage on the microstructure and properties of Cr–Si–N films by a hybrid coating system in another window
Journal Articles

Development of a cosputter-evaporation chamber for Fe–Ga films

N. A. Morley, S.-L. Yeh, S. Rigby, A. Javed, M. R. J. Gibbs
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 581–586 (2008)
https://doi.org/10.1116/1.2924416
Published: June 2008
View article titled, Development of a cosputter-evaporation chamber for Fe–Ga films
Open the PDF for Development of a cosputter-evaporation chamber for Fe–Ga films in another window
Journal Articles

Microstructural differences in thin film Zn Ga 2 O 4 : Mn phosphor produced by differences in sputtering gas pressure

Joo Han Kim, Paul H. Holloway
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 2164–2171 (2006)
https://doi.org/10.1116/1.2359737
Published: October 2006
View article titled, Microstructural differences in thin film Zn Ga 2 O 4 : Mn phosphor produced by differences in sputtering gas pressure
Open the PDF for Microstructural differences in thin film Zn Ga 2 O 4 : Mn phosphor produced by differences in sputtering gas pressure in another window
Journal Articles

Stress anisotropy and stress gradient in magnetron sputtered films with different deposition geometries

Z. B. Zhao, S. M. Yalisove, J. C. Bilello
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 195–201 (2006)
https://doi.org/10.1116/1.2150230
Published: February 2006
View article titled, Stress anisotropy and stress gradient in magnetron sputtered films with different deposition geometries
Open the PDF for Stress anisotropy and stress gradient in magnetron sputtered films with different deposition geometries in another window