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Journal Articles

Effect of deformation temperature on the microstructure and texture evolution of Ti-6Al-4Zr-2Mo-6V alloy

Kuishan Sun, Lingyu Xu, Dejun Song, Yangyang Yan, Longteng Li, Yukun Wu, Yang Wang, Zhiqian Liao, Hao Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063211 (2024)
https://doi.org/10.1116/6.0003887
Published: October 2024
View article titled, Effect of deformation temperature on the microstructure and texture evolution of Ti-6Al-4Zr-2Mo-6V alloy
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Journal Articles

Regulation of precipitation and its influence on the performances of multicomponent β-Ti-based shape memory alloy through annealing treatment

Yaping Wang, Guohao Zhang, Yanqing Wu, Wei Liu, Yunfei Wang, Xinjian Cao, Xiao Liu, Lun Jiang, Haizhen Wang, Xiaoyang Yi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 062703 (2024)
https://doi.org/10.1116/6.0003904
Published: October 2024
View article titled, Regulation of precipitation and its influence on the performances of multicomponent β-Ti-based shape memory alloy through annealing treatment
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Journal Articles

Enhancing erosion resistance of ceramic/metal multilayer coating by crack inhibition design

Zhaolu Zhang, Yuxin Ren, Guangyu He, Zhufang Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053107 (2024)
https://doi.org/10.1116/6.0003857
Published: August 2024
View article titled, Enhancing erosion resistance of ceramic/metal multilayer coating by crack inhibition design
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Journal Articles

Nanomultilayer gradation strategy to improve mechanical properties of TiSiN/AlCrN hard coatings

Qizhong Li, Fazhen Liu, Mai Yang, Tenghua Gao, Baifeng Ji, Song Zhang, Rong Tu, Lianmeng Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053202 (2024)
https://doi.org/10.1116/6.0003763
Published: July 2024
View article titled, Nanomultilayer gradation strategy to improve mechanical properties of TiSiN/AlCrN hard coatings
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Journal Articles

Design principle of gradient elastic modulus transition layer via substrate mechanical property

Linfan Sun, Yi Ren, Biao Si, Yanwen Zhou
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043403 (2024)
https://doi.org/10.1116/6.0003673
Published: May 2024
View article titled, Design principle of gradient elastic modulus transition layer via substrate mechanical property
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Journal Articles

Effect of high temperature thermohydrogen treatment on the microstructure, martensitic transformation, and mechanical and corrosion behaviors of Ti-V-Al lightweight shape memory alloy

Xiaoyang Yi, Wei Liu, Gaofeng Liu, Yunfei Wang, Weijian Li, Guohao Zhang, Yanqing Wu, Shangzhou Zhang, Haizhen Wang, Bin Sun, Weihong Gao, Xianglong Meng, Zhiyong Gao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033105 (2024)
https://doi.org/10.1116/6.0003550
Published: April 2024
View article titled, Effect of high temperature thermohydrogen treatment on the microstructure, martensitic transformation, and mechanical and corrosion behaviors of Ti-V-Al lightweight shape memory alloy
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Journal Articles

Tailoring the performances of Ti-V-Al base shape memory alloys by defects engineering

Yunfei Wang, Wei Liu, Yanqing Wu, Guohao Zhang, Bin Sun, Weihong Gao, Xinxin Feng, Haizhen Wang, Xiaoyang Yi, Xianglong Meng, Zhiyong Gao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 022704 (2024)
https://doi.org/10.1116/6.0003257
Published: February 2024
View article titled, Tailoring the performances of Ti-V-Al base shape memory alloys by defects engineering
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Journal Articles

Selective strategy of reactive hysteresis loop for coatings on alloy substrates with different moduli

Biao Si, Linfan Sun, Zhiwei Su, KaiCe Zhang, Jing Guo, Minqi Hua, Yanwen Zhou
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 013405 (2024)
https://doi.org/10.1116/6.0003127
Published: December 2023
View article titled, Selective strategy of reactive hysteresis loop for coatings on alloy substrates with different moduli
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Journal Articles

Mechanical and optical properties of amorphous silicon nitride-based films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Brahim Ahammou, Paramita Bhattacharyya, Christophe Levallois, Fahmida Azmi, Jean-Pierre Landesman, Peter Mascher
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053113 (2023)
https://doi.org/10.1116/6.0002896
Published: August 2023
View article titled, Mechanical and optical properties of amorphous silicon nitride-based films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition
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Journal Articles

Variation in thermal stability of Ge1−xSnx films for infrared device applications

Amanda N. Lemire, Kevin A. Grossklaus, Thomas E. Vandervelde
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052701 (2023)
https://doi.org/10.1116/6.0002680
Published: July 2023
View article titled, Variation in thermal stability of Ge<sub>1−x</sub>Sn<sub>x</sub> films for infrared device applications
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Includes: Supplementary data
Journal Articles

Effect of tilted closed-field magnetron design on the microstructure and mechanical properties of TiZrNbTaN coatings

Editor’s Pick
Sanath Kumar Honnali, Charlotte Poterie, Arnaud le Febvrier, Daniel Lundin, Grzegorz Greczynski, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043402 (2023)
https://doi.org/10.1116/6.0002752
Published: May 2023
View article titled, Effect of tilted closed-field magnetron design on the microstructure and mechanical properties of TiZrNbTaN coatings
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Includes: Supplementary data
Journal Articles

Determination of stress in thin films using micro-machined buckled membranes

Editor’s Pick
C. Malhaire, M. Granata, D. Hofman, A. Amato, V. Martinez, G. Cagnoli, A. Lemaitre, N. Shcheblanov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043401 (2023)
https://doi.org/10.1116/6.0002590
Published: May 2023
View article titled, Determination of stress in thin films using micro-machined buckled membranes
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Journal Articles

Effect of plasma nitriding substrate current density on the adhesion strength of in situ PVD TiN coatings

Xin Zhang, Xiu-bo Tian, Chun-zhi Gong, Xiang-li Liu, Jin Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033405 (2023)
https://doi.org/10.1116/6.0002353
Published: April 2023
View article titled, Effect of plasma nitriding substrate current density on the adhesion strength of <em>in situ</em> PVD TiN coatings
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Journal Articles

Evaluation of stress and elastic energy relief efficiency in a hard coating with a metal interlayer—Using TiN/Ti as a model system

Jia-Hong Huang, I.-Sheng Ting, Peng-Wen Lin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023104 (2023)
https://doi.org/10.1116/6.0002358
Published: February 2023
View article titled, Evaluation of stress and elastic energy relief efficiency in a hard coating with a metal interlayer—Using TiN/Ti as a model system
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Journal Articles

Dependence of film structure on the film structure-independent equivalent film thickness in magnetron sputtering deposition of Ag thin films

Eiji Kusano
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 053405 (2022)
https://doi.org/10.1116/6.0001989
Published: September 2022
View article titled, Dependence of film structure on the film structure-independent equivalent film thickness in magnetron sputtering deposition of Ag thin films
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Journal Articles

Effect of electrochemical cycling on microstructures of nanocomposite silicon electrodes using hyperpolarized 129Xe and 7Li NMR spectroscopy

Yougang Mao, Naba K. Karan, Ravi Kumar, Russell Hopson, Pradeep R. Guduru, Brian W. Sheldon, Li-Qiong Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043203 (2022)
https://doi.org/10.1116/6.0001768
Published: May 2022
View article titled, Effect of electrochemical cycling on microstructures of nanocomposite silicon electrodes using hyperpolarized <sup>129</sup>Xe and <sup>7</sup>Li NMR spectroscopy
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Journal Articles

CrN/AlN nanolaminates: Architecture, residual stresses, and cracking behavior

K. Bobzin, T. Brögelmann, N. C. Kruppe, H. J. Maier, T. Heidenblut, H.-B. Besserer, C. Kahra, J. Janowitz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 013414 (2022)
https://doi.org/10.1116/6.0001462
Published: December 2021
View article titled, CrN/AlN nanolaminates: Architecture, residual stresses, and cracking behavior
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Journal Articles

Deposit and etchback approach for ultrathin Al2O3 films with low pinhole density using atomic layer deposition and atomic layer etching

Jonas C. Gertsch, Emanuele Sortino, Victor M. Bright, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 062602 (2021)
https://doi.org/10.1116/6.0001340
Published: November 2021
View article titled, Deposit and etchback approach for ultrathin Al<sub>2</sub>O<sub>3</sub> films with low pinhole density using atomic layer deposition and atomic layer etching
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Journal Articles

Plasma-enhanced atomic layer deposition: Correlating O 2 plasma parameters and species to blister formation and conformal film growth

Andreas Werbrouck, Kevin Van de Kerckhove, Diederik Depla, Dirk Poelman, Philippe F. Smet, Jolien Dendooven, Christophe Detavernier
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 062402 (2021)
https://doi.org/10.1116/6.0001094
Published: September 2021
View article titled, Plasma-enhanced atomic layer deposition: Correlating O 2 plasma parameters and species to blister formation and conformal film growth
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Includes: Supplementary data
Journal Articles

Hybrid molecular beam epitaxy growth of BaTiO3 films

Editor’s Pick
William Nunn, Sara Sandlass, Maike Wegner, Ryan Haislmaier, Abinash Kumar, Malleswararao Tangi, James LeBeau, Eckhard Quandt, Richard D. James, Bharat Jalan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 040404 (2021)
https://doi.org/10.1116/6.0001140
Published: June 2021
View article titled, Hybrid molecular beam epitaxy growth of BaTiO<sub>3</sub> films
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Includes: Supplementary data