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Journal Articles

Mechanical and optical properties of amorphous silicon nitride-based films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Brahim Ahammou, Paramita Bhattacharyya, Christophe Levallois, Fahmida Azmi, Jean-Pierre Landesman, Peter Mascher
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053113 (2023)
https://doi.org/10.1116/6.0002896
Published: August 2023
View article titled, Mechanical and optical properties of amorphous silicon nitride-based films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition
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Journal Articles

Variation in thermal stability of Ge1−xSnx films for infrared device applications

Amanda N. Lemire, Kevin A. Grossklaus, Thomas E. Vandervelde
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052701 (2023)
https://doi.org/10.1116/6.0002680
Published: July 2023
View article titled, Variation in thermal stability of Ge<sub>1−x</sub>Sn<sub>x</sub> films for infrared device applications
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Includes: Supplementary data
Journal Articles

Effect of tilted closed-field magnetron design on the microstructure and mechanical properties of TiZrNbTaN coatings

Sanath Kumar Honnali, Charlotte Poterie, Arnaud le Febvrier, Daniel Lundin, Grzegorz Greczynski, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043402 (2023)
https://doi.org/10.1116/6.0002752
Published: May 2023
View article titled, Effect of tilted closed-field magnetron design on the microstructure and mechanical properties of TiZrNbTaN coatings
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Includes: Supplementary data
Journal Articles

Determination of stress in thin films using micro-machined buckled membranes

C. Malhaire, M. Granata, D. Hofman, A. Amato, V. Martinez, G. Cagnoli, A. Lemaitre, N. Shcheblanov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043401 (2023)
https://doi.org/10.1116/6.0002590
Published: May 2023
View article titled, Determination of stress in thin films using micro-machined buckled membranes
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Journal Articles

Effect of plasma nitriding substrate current density on the adhesion strength of in situ PVD TiN coatings

Xin Zhang, Xiu-bo Tian, Chun-zhi Gong, Xiang-li Liu, Jin Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033405 (2023)
https://doi.org/10.1116/6.0002353
Published: April 2023
View article titled, Effect of plasma nitriding substrate current density on the adhesion strength of <em>in situ</em> PVD TiN coatings
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Journal Articles

Evaluation of stress and elastic energy relief efficiency in a hard coating with a metal interlayer—Using TiN/Ti as a model system

Jia-Hong Huang, I.-Sheng Ting, Peng-Wen Lin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023104 (2023)
https://doi.org/10.1116/6.0002358
Published: February 2023
View article titled, Evaluation of stress and elastic energy relief efficiency in a hard coating with a metal interlayer—Using TiN/Ti as a model system
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Journal Articles

Dependence of film structure on the film structure-independent equivalent film thickness in magnetron sputtering deposition of Ag thin films

Eiji Kusano
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 053405 (2022)
https://doi.org/10.1116/6.0001989
Published: September 2022
View article titled, Dependence of film structure on the film structure-independent equivalent film thickness in magnetron sputtering deposition of Ag thin films
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Journal Articles

Effect of electrochemical cycling on microstructures of nanocomposite silicon electrodes using hyperpolarized 129Xe and 7Li NMR spectroscopy

Yougang Mao, Naba K. Karan, Ravi Kumar, Russell Hopson, Pradeep R. Guduru, Brian W. Sheldon, Li-Qiong Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043203 (2022)
https://doi.org/10.1116/6.0001768
Published: May 2022
View article titled, Effect of electrochemical cycling on microstructures of nanocomposite silicon electrodes using hyperpolarized <sup>129</sup>Xe and <sup>7</sup>Li NMR spectroscopy
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Journal Articles

CrN/AlN nanolaminates: Architecture, residual stresses, and cracking behavior

K. Bobzin, T. Brögelmann, N. C. Kruppe, H. J. Maier, T. Heidenblut, H.-B. Besserer, C. Kahra, J. Janowitz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 013414 (2022)
https://doi.org/10.1116/6.0001462
Published: December 2021
View article titled, CrN/AlN nanolaminates: Architecture, residual stresses, and cracking behavior
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Journal Articles

Deposit and etchback approach for ultrathin Al2O3 films with low pinhole density using atomic layer deposition and atomic layer etching

Jonas C. Gertsch, Emanuele Sortino, Victor M. Bright, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 062602 (2021)
https://doi.org/10.1116/6.0001340
Published: November 2021
View article titled, Deposit and etchback approach for ultrathin Al<sub>2</sub>O<sub>3</sub> films with low pinhole density using atomic layer deposition and atomic layer etching
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Journal Articles

Plasma-enhanced atomic layer deposition: Correlating O 2 plasma parameters and species to blister formation and conformal film growth

Andreas Werbrouck, Kevin Van de Kerckhove, Diederik Depla, Dirk Poelman, Philippe F. Smet, Jolien Dendooven, Christophe Detavernier
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 062402 (2021)
https://doi.org/10.1116/6.0001094
Published: September 2021
View article titled, Plasma-enhanced atomic layer deposition: Correlating O 2 plasma parameters and species to blister formation and conformal film growth
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Includes: Supplementary data
Journal Articles

Hybrid molecular beam epitaxy growth of BaTiO3 films

William Nunn, Sara Sandlass, Maike Wegner, Ryan Haislmaier, Abinash Kumar, Malleswararao Tangi, James LeBeau, Eckhard Quandt, Richard D. James, Bharat Jalan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 040404 (2021)
https://doi.org/10.1116/6.0001140
Published: June 2021
View article titled, Hybrid molecular beam epitaxy growth of BaTiO<sub>3</sub> films
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Includes: Supplementary data
Journal Articles

Approaching ultrathin VO2 films on sapphire (001) substrates by biased reactive sputtering: Characteristic morphology and its effect on the infrared-light switching

Kunio Okimura, Joe Sakai, Masashi Kuwahara, Mustapha Zaghrioui, Yoichi Uehara
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 043401 (2021)
https://doi.org/10.1116/6.0001023
Published: May 2021
View article titled, Approaching ultrathin VO<sub>2</sub> films on sapphire (001) substrates by biased reactive sputtering: Characteristic morphology and its effect on the infrared-light switching
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Includes: Supplementary data
Journal Articles

Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition

Brian C. Welch, Olivia M. McIntee, Anand B. Ode, Bonnie B. McKenzie, Alan R. Greenberg, Victor M. Bright, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 052409 (2020)
https://doi.org/10.1116/6.0000271
Published: August 2020
View article titled, Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition
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Journal Articles

Silver film etching using halogen gas plasma

Toshiyuki Sasaki, Kenichi Yoshikawa, Kazuhito Furumoto, Itsuko Sakai, Hisataka Hayashi, Makoto Sekine, Masaru Hori
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 053006 (2020)
https://doi.org/10.1116/6.0000286
Published: August 2020
View article titled, Silver film etching using halogen gas plasma
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Journal Articles

3D-printed and injection molded polymer matrix composites with 2D layered materials

Gerardo Gamboa, Sangram Mazumder, Nathalie Hnatchuk, Jorge A. Catalan, Damaris Cortes, IKang Chen, Perla Perez, Witold Brostow, Anupama B. Kaul
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 042201 (2020)
https://doi.org/10.1116/6.0000121
Published: June 2020
View article titled, 3D-printed and injection molded polymer matrix composites with 2D layered materials
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Includes: Supplementary data
Journal Articles

High power impulse magnetron sputtering of diamond-like carbon coatings

Tomas Kubart, Asim Aijaz, Joakim Andersson, Fabio Ferreira, João Carlos Oliveira, Arcadie Sobetkii, Anca Constantina Parau, Catalin Vitelaru
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 043408 (2020)
https://doi.org/10.1116/6.0000070
Published: June 2020
View article titled, High power impulse magnetron sputtering of diamond-like carbon coatings
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Journal Articles

Paradigm shift in thin-film growth by magnetron sputtering: From gas-ion to metal-ion irradiation of the growing film

Grzegorz Greczynski, Ivan Petrov, J. E. Greene, Lars Hultman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 060801 (2019)
https://doi.org/10.1116/1.5121226
Published: October 2019
View article titled, Paradigm shift in thin-film growth by magnetron sputtering: From gas-ion to metal-ion irradiation of the growing film
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Journal Articles

Visible/infrared refractive index and phonon properties of GaN films grown on sapphire by hollow-cathode plasma-assisted atomic layer deposition

Nese Gungor, Mustafa Alevli
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 050901 (2019)
https://doi.org/10.1116/1.5097467
Published: July 2019
View article titled, Visible/infrared refractive index and phonon properties of GaN films grown on sapphire by hollow-cathode plasma-assisted atomic layer deposition
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Journal Articles

Effect of synchronized bias in the deposition of TiB2 thin films using high power impulse magnetron sputtering

Nils Nedfors, Oleksiy Vozniy, Johanna Rosen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031510 (2018)
https://doi.org/10.1116/1.5003194
Published: April 2018
View article titled, Effect of synchronized bias in the deposition of TiB<sub>2</sub> thin films using high power impulse magnetron sputtering
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