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Journal Articles
Menghui Chen, Mai Yang, Tao Huang, Yibing Su, Yuzhe Han, Qizhong Li, Meijun Yang, Song Zhang, Takashi Goto, Rong Tu
J. Vac. Sci. Technol. A 43, 023107 (2025)
Published: March 2025
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J. Vac. Sci. Technol. A 43, 023106 (2025)
Published: February 2025
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J. Vac. Sci. Technol. A 43, 023104 (2025)
Published: February 2025
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J. Vac. Sci. Technol. A 43, 023105 (2025)
Published: February 2025
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J. Vac. Sci. Technol. A 43, 023103 (2025)
Published: February 2025
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J. Vac. Sci. Technol. A 43, 020802 (2025)
Published: February 2025
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Haiyang Long, Xiaoshuo Li, Haijiang Shi, Zhen Dong, Fuhai Li, Xingchen Yan, Zhanshan Ma, Bochao Wang, Tao Wang, Yanfeng Wang, Xueyong Li
J. Vac. Sci. Technol. A 43, 013106 (2025)
Published: January 2025
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J. Vac. Sci. Technol. A 43, 013404 (2025)
Published: December 2024
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J. Vac. Sci. Technol. A 43, 013102 (2025)
Published: December 2024
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J. Vac. Sci. Technol. A 43, 013401 (2025)
Published: December 2024
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Zirui Wan, Wanyu Shi, Xuehao Geng, Yu Xia, Zhigang Xu, Jian Peng, Qiang Shen, Wenjun Li, Chuanbin Wang
J. Vac. Sci. Technol. A 42, 063409 (2024)
Published: November 2024
Journal Articles
Kuishan Sun, Lingyu Xu, Dejun Song, Yangyang Yan, Longteng Li, Yukun Wu, Yang Wang, Zhiqian Liao, Hao Zhang
J. Vac. Sci. Technol. A 42, 063211 (2024)
Published: October 2024
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J. Vac. Sci. Technol. A 42, 063104 (2024)
Published: October 2024
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J. Vac. Sci. Technol. A 42, 063103 (2024)
Published: September 2024
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J. Vac. Sci. Technol. A 42, 063101 (2024)
Published: September 2024
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J. Vac. Sci. Technol. A 42, 053109 (2024)
Published: September 2024
Journal Articles
Zhujiang Tan, Chenglei Wang, Jinxu Lu, Junfeng Chen, Chong Liu, Xin Li, Yatao Zhu, Hu Chen, Mei Huang, Jingya Zhang
J. Vac. Sci. Technol. A 42, 053104 (2024)
Published: July 2024
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J. Vac. Sci. Technol. A 42, 053202 (2024)
Published: July 2024
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J. Vac. Sci. Technol. A 42, 052701 (2024)
Published: July 2024
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J. Vac. Sci. Technol. A 42, 042704 (2024)
Published: May 2024
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