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Journal Articles

Trap states and hydrogenation of implanted Si in semi-insulating Ga2O3(Fe)

Editor’s Pick
A. Y. Polyakov, I. V. Schemerov, A. A. Vasilev, A. A. Romanov, P. B. Lagov, A. V. Miakonkikh, A. V. Chernykh, E. P. Romanteeva, S. V. Chernykh, O. I. Rabinovich, S. J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033403 (2025)
https://doi.org/10.1116/6.0004463
Published: March 2025
View articletitled, Trap states and hydrogenation of implanted Si in semi-insulating Ga2O3(Fe)
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Journal Articles

Etching and fluorination of yttrium oxide (Y2O3) irradiated with fluorine ions or radicals

Hojun Kang, Tomoko Ito, Junghwan Um, Hikaru Kokura, Sungil Cho, Hyunjung Park, Kazuhiro Karahashi, Satoshi Hamaguchi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 013003 (2025)
https://doi.org/10.1116/6.0004137
Published: January 2025
View articletitled, Etching and fluorination of yttrium oxide (Y2O3) irradiated with fluorine ions or radicals
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Journal Articles

Promoting subsurface Sn incorporation at Nb(100) oxide surface sites leading to homogeneous Nb3Sn film growth for superconducting radiofrequency applications

Sarah A. Willson, Rachael G. Farber, S. J. Sibener
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063204 (2024)
https://doi.org/10.1116/6.0003892
Published: September 2024
View articletitled, Promoting subsurface Sn incorporation at Nb(100) oxide surface sites leading to homogeneous Nb3Sn film growth for superconducting radiofrequency applications
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Journal Articles

Inherent area selective deposition of silicon dioxide in multilayer 3D SiOx–SiNx stacks

Editor’s Pick
Kartik Sondhi, Stephen Ross, Joyeeta Nag, X. C. Guo, Dexin Zhao, Adarsh Rajashekhar, Senaka Kanakamedala
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 050403 (2024)
https://doi.org/10.1116/6.0003790
Published: August 2024
View articletitled, Inherent area selective deposition of silicon dioxide in multilayer 3D SiOx–SiNx stacks
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Journal Articles

Inhibition of thermochemical erosion by different coatings attached to the barrel chamber at high temperature and supersonic environments

Shuli Li, Guolai Yang, Liqun Wang, Liguo Xue
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053102 (2024)
https://doi.org/10.1116/6.0003752
Published: July 2024
View articletitled, Inhibition of thermochemical erosion by different coatings attached to the barrel chamber at high temperature and supersonic environments
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Journal Articles

Quantifying the resonant photoemission of radiation damaged Pu

J. G. Tobin, S.-W. Yu, B. W. Chung
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053201 (2024)
https://doi.org/10.1116/6.0003764
Published: July 2024
View articletitled, Quantifying the resonant photoemission of radiation damaged Pu
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Journal Articles

Lattice defects distribution of H+ implanted 4H-SiC investigated by deep-ultraviolet Raman spectroscopy

Editor’s Pick
Gengyu Wang, Wenbo Luo, Dailei Zhu, Yuedong Wang, Yao Shuai, Chuangui Wu, Wanli Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043405 (2024)
https://doi.org/10.1116/6.0003643
Published: May 2024
View articletitled, Lattice defects distribution of H+ implanted 4H-SiC investigated by deep-ultraviolet Raman spectroscopy
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Journal Articles

ToF-SIMS analysis of ultrathin films and their fragmentation patterns

Shin Muramoto, Daniel J. Graham, David G. Castner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023416 (2024)
https://doi.org/10.1116/6.0003249
Published: February 2024
View articletitled, ToF-SIMS analysis of ultrathin films and their fragmentation patterns
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Includes: Supplementary data
Journal Articles

Enhancing minority carrier lifetime in Ge: Insights from HF and HCl cleaning procedures

Editor’s Pick
Alexandre Chapotot, Jérémie Chrétien, Oleh Fesiienko, Erwine Pargon, Jinyoun Cho, Kristof Dessein, Abderraouf Boucherif, Gwenaëlle Hamon, Maxime Darnon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 013203 (2024)
https://doi.org/10.1116/6.0003236
Published: January 2024
View articletitled, Enhancing minority carrier lifetime in Ge: Insights from HF and HCl cleaning procedures
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Journal Articles

Germanium surface cleaning and ALD of a protective boron nitride overlayer

Olatomide B. Omolere, Qasim Adesope, Samar Alhowity, Tochi L. Agbara, Jeffry A. Kelber
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062411 (2023)
https://doi.org/10.1116/6.0002928
Published: November 2023
View articletitled, Germanium surface cleaning and ALD of a protective boron nitride overlayer
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Includes: Supplementary data
Journal Articles

Attempt of TiZrVCrAl coating on aerospace bearings—Lower friction coefficient in oil–liquid mixed media

Jiahe Wang, Qunfeng Zeng, Wanjun He, Zhao Wang, Zekun Ning, Chenjie Zheng, Zeming Pang, Xunkai Wei
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053108 (2023)
https://doi.org/10.1116/6.0002843
Published: August 2023
View articletitled, Attempt of TiZrVCrAl coating on aerospace bearings—Lower friction coefficient in oil–liquid mixed media
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Journal Articles

Variation in thermal stability of Ge1−xSnx films for infrared device applications

Amanda N. Lemire, Kevin A. Grossklaus, Thomas E. Vandervelde
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052701 (2023)
https://doi.org/10.1116/6.0002680
Published: July 2023
View articletitled, Variation in thermal stability of Ge1−xSnx films for infrared device applications
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Includes: Supplementary data
Journal Articles

Role of SiCl4 addition in CH3F/O2 based chemistry for Si3N4 etching selectively to SiO2, SiCO, and Si

François Boulard, Valentin Bacquié, Aurélien Tavernier, Nicolas Possémé
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033002 (2023)
https://doi.org/10.1116/6.0002434
Published: March 2023
View articletitled, Role of SiCl4 addition in CH3F/O2 based chemistry for Si3N4 etching selectively to SiO2, SiCO, and Si
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Journal Articles

Challenges in atomic layer etching of gallium nitride using surface oxidation and ligand-exchange

Daniel C. Messina, Kevin A. Hatch, Saurabh Vishwakarma, David J. Smith, Yuji Zhao, Robert J. Nemanich
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 022603 (2023)
https://doi.org/10.1116/6.0002255
Published: March 2023
View articletitled, Challenges in atomic layer etching of gallium nitride using surface oxidation and ligand-exchange
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Includes: Supplementary data
Journal Articles

Reversible alteration of 3D printed polymer properties via infiltration of alumina by atomic layer deposition

Atilla C. Varga, Seán T. Barry
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 022403 (2023)
https://doi.org/10.1116/6.0002397
Published: February 2023
View articletitled, Reversible alteration of 3D printed polymer properties via infiltration of alumina by atomic layer deposition
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Includes: Supplementary data
Journal Articles

Thermal atomic layer etching of VO2 using sequential BCl3 and SF4 exposures: Observation of conversion, ligand-exchange, and oxidation state changes

Editor’s Pick
Jonas C. Gertsch, Jonathan L. Partridge, Austin M. Cano, Joel W. Clancey, Victor M. Bright, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 012603 (2023)
https://doi.org/10.1116/6.0002149
Published: January 2023
View articletitled, Thermal atomic layer etching of VO2 using sequential BCl3 and SF4 exposures: Observation of conversion, ligand-exchange, and oxidation state changes
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Includes: Supplementary data
Journal Articles

Growth and characterization of (Sc2O3)x(Ga2O3)1−x by molecular beam epitaxy

Editor’s Pick
Mark S. Hlad, Brent P. Gila, Cammy R. Abernathy, Fan Ren, S. J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043403 (2022)
https://doi.org/10.1116/6.0001805
Published: May 2022
View articletitled, Growth and characterization of (Sc2O3)x(Ga2O3)1−x by molecular beam epitaxy
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Journal Articles

Functionalized carbon nanotubes for thermionic emission and cooling applications

Feng Jin, Ansibert Miruko, Daniel Litt, Karolena Zhou
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 013415 (2022)
https://doi.org/10.1116/6.0001467
Published: December 2021
View articletitled, Functionalized carbon nanotubes for thermionic emission and cooling applications
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Journal Articles

Comparison of CO and CO2 rf plasma treatment of SnO2 nanoparticles for gas sensing materials

Kimberly A. M. Hiyoto, Erin P. Stuckert, Ellen R. Fisher
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063005 (2021)
https://doi.org/10.1116/6.0001326
Published: November 2021
View articletitled, Comparison of CO and CO2 rf plasma treatment of SnO2 nanoparticles for gas sensing materials
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Includes: Supplementary data
Journal Articles

Two-step model for reduction reaction of ultrathin nickel oxide by hydrogen

Shuichi Ogawa, Ryo Taga, Akitaka Yoshigoe, Yuji Takakuwa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 043207 (2021)
https://doi.org/10.1116/6.0001056
Published: June 2021
View articletitled, Two-step model for reduction reaction of ultrathin nickel oxide by hydrogen
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Includes: Supplementary data