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Journal Articles

OrbiSIMS depth profiling of semiconductor materials—Useful yield and depth resolution

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Yundong Zhou, Alexis Franquet, Valentina Spampinato, Alex Merkulov, Michael R. Keenan, Paul A. W. van der Heide, Gustavo F. Trindade, Wilfried Vandervorst, Ian S. Gilmore
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053208 (2024)
https://doi.org/10.1116/6.0003821
Published: September 2024
View article titled, OrbiSIMS depth profiling of semiconductor materials—Useful yield and depth resolution
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Journal Articles

Ultrathin ZrO2 thickness control on TiO2/ZrO2 core/shell nanoparticles using ZrO2 atomic layer deposition and etching

Janine D. Sempel, Marja-Leena Kaariainen, Troy A. Colleran, Alejo M. Lifschitz, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 052604 (2024)
https://doi.org/10.1116/6.0003781
Published: August 2024
View article titled, Ultrathin ZrO<sub>2</sub> thickness control on TiO<sub>2</sub>/ZrO<sub>2</sub> core/shell nanoparticles using ZrO<sub>2</sub> atomic layer deposition and etching
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Journal Articles

Best practices for performing quantitative TOF-SIMS analyses

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Alan M. Spool, Lorie Finney
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043204 (2024)
https://doi.org/10.1116/6.0003660
Published: July 2024
View article titled, Best practices for performing quantitative TOF-SIMS analyses
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Journal Articles

High power impulse magnetron sputtering of a zirconium target

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Swetha Suresh Babu, Joel Fischer, Kateryna Barynova, Martin Rudolph, Daniel Lundin, Jon Tomas Gudmundsson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043007 (2024)
https://doi.org/10.1116/6.0003647
Published: June 2024
View article titled, High power impulse magnetron sputtering of a zirconium target
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Journal Articles

Selecting the best surface analysis method for your materials/samples

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Kye J. Robinson, Helmut Thissen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 040801 (2024)
https://doi.org/10.1116/6.0003576
Published: May 2024
View article titled, Selecting the best surface analysis method for your materials/samples
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Journal Articles

Investigating different carbon-based target materials: Can we improve ionization in HiPIMS for the deposition of diamondlike carbon films?

Martin Fenker, Martin Balzer, Holger Kaßner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043402 (2024)
https://doi.org/10.1116/6.0003333
Published: May 2024
View article titled, Investigating different carbon-based target materials: Can we improve ionization in HiPIMS for the deposition of diamondlike carbon films?
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Journal Articles

Etching of elemental layers in oxide molecular beam epitaxy by O2-assisted formation and evaporation of their volatile (sub)oxide: The examples of Ga and Ge

Wenshan Chen, Kingsley Egbo, Huaide Zhang, Andrea Ardenghi, Oliver Bierwagen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 032708 (2024)
https://doi.org/10.1116/6.0003453
Published: April 2024
View article titled, Etching of elemental layers in oxide molecular beam epitaxy by O<sub>2</sub>-assisted formation and evaporation of their volatile (sub)oxide: The examples of Ga and Ge
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Journal Articles

Power measurement analysis of moderate pressure capacitively coupled discharges

Shadhin Hussain, Abhishek Verma, Kallol Bera, Shahid Rauf, Matthew Goeckner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033010 (2024)
https://doi.org/10.1116/6.0003366
Published: April 2024
View article titled, Power measurement analysis of moderate pressure capacitively coupled discharges
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Includes: Supplementary data
Journal Articles

Modeling of ion transport from ionization region to entrance of mass spectrometer in HiPIMS argon/Cr target

J. Zgheib, P.-Y. Jouan, A. Rhallabi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033004 (2024)
https://doi.org/10.1116/6.0003317
Published: March 2024
View article titled, Modeling of ion transport from ionization region to entrance of mass spectrometer in HiPIMS argon/Cr target
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Journal Articles

Inhibition of atomic layer deposition of TiO2 by functionalizing silicon surface with 4-fluorophenylboronic acid

Dhamelyz Silva-Quinones, John R. Mason, Robert Norden, Andrew V. Teplyakov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 032402 (2024)
https://doi.org/10.1116/6.0003316
Published: March 2024
View article titled, Inhibition of atomic layer deposition of TiO<sub>2</sub> by functionalizing silicon surface with 4-fluorophenylboronic acid
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Includes: Supplementary data
Journal Articles

ToF-SIMS analysis of ultrathin films and their fragmentation patterns

Shin Muramoto, Daniel J. Graham, David G. Castner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023416 (2024)
https://doi.org/10.1116/6.0003249
Published: February 2024
View article titled, ToF-SIMS analysis of ultrathin films and their fragmentation patterns
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Includes: Supplementary data
Journal Articles

Cross-ionization of the sputtered flux during hybrid high power impulse/direct-current magnetron co-sputtering

Viktor Šroba, Katarína Viskupová, Bartosz Wicher, Vladyslav Rogoz, Xiao Li, Marián Mikula, Grzegorz Greczynski
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023410 (2024)
https://doi.org/10.1116/6.0003258
Published: January 2024
View article titled, Cross-ionization of the sputtered flux during hybrid high power impulse/direct-current magnetron co-sputtering
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Journal Articles

In situ and ex situ quantification of nanoparticle fluxes in magnetron sputter inert gas condensation: A Cu nanoparticle case study

Florian Knabl, Christine Bandl, Thomas Griesser, Christian Mitterer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023201 (2024)
https://doi.org/10.1116/6.0003283
Published: January 2024
View article titled, <em>In situ</em> and <em>ex situ</em> quantification of nanoparticle fluxes in magnetron sputter inert gas condensation: A Cu nanoparticle case study
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Journal Articles

Melt-grown semi-insulating Mn:β-Ga2O3 single crystals exhibiting unique visible absorptions and luminescence

Benjamin L. Dutton, Joel B. Varley, Cassandra Remple, Jani Jesenovec, Brooke K. Downing, Jimmy-Xuan Shen, Soroush Ghandiparsi, Adam T. Neal, Yunjo Kim, Andrew J. Green, Lars F. Voss, Matthew D. McCluskey, John S. McCloy
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 012801 (2024)
https://doi.org/10.1116/6.0003212
Published: December 2023