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Journal Articles
Alfreda Krisna Altama, Fanhua Kong, Natanael Ardi Sugiarto, Peikai Hsu, Shih-Yun Chen, Pakman Yiu, Jinn P. Chu
J. Vac. Sci. Technol. A 41, 063114 (2023)
Published: November 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 023404 (2023)
Published: February 2023
Journal Articles
Heshan Yu, Tieren Gao, A. T. N’Diaye, E. Arenholz, Suchismita Sarker, Apurva Mehta, Xiaohang Zhang, Ichiro Takeuchi
J. Vac. Sci. Technol. A 41, 023403 (2023)
Published: February 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 023402 (2023)
Published: January 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 013404 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. A 41, 013403 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 053006 (2022)
Published: August 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 043206 (2022)
Published: June 2022
Journal Articles
Martina Müller, Patrick Lömker, Paul Rosenberger, Mai Hussein Hamed, David N. Mueller, Ronja A. Heinen, Thomas Szyjka, Lutz Baumgarten
J. Vac. Sci. Technol. A 40, 013215 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 40, 013403 (2022)
Published: November 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 020801 (2021)
Published: January 2021
Journal Articles
Kaupo Kukli, Marianna Kemell, Helena Castán, Salvador Dueñas, Joosep Link, Raivo Stern, Mikko J. Heikkilä, Taivo Jõgiaas, Jekaterina Kozlova, Mihkel Rähn, Kenichiro Mizohata, Mikko Ritala, Markku Leskelä
J. Vac. Sci. Technol. A 38, 042405 (2020)
Published: June 2020
Journal Articles
Andrada-Oana Mandru, Oğuz Yıldırım, Miguel A. Marioni, Hartmut Rohrmann, Michael Heigl, Oana-Tereza Ciubotariu, Marcos Penedo, Xue Zhao, Manfred Albrecht, Hans J. Hug
J. Vac. Sci. Technol. A 38, 023409 (2020)
Published: March 2020
Journal Articles
Anabil Gayen, Rajkumar Modak, Ananthakrishnan Srinivasan, Vallabhapurapu Vijaya Srinivasu, Perumal Alagarsamy
J. Vac. Sci. Technol. A 37, 031513 (2019)
Published: April 2019
Journal Articles
J. P. Corbett, J. Guerrero-Sanchez, J. C. Gallagher, A.-O. Mandru, A. L. Richard, D. C. Ingram, F. Yang, N. Takeuchi, A. R. Smith
J. Vac. Sci. Technol. A 37, 031102 (2019)
Published: April 2019
Journal Articles
J. Vac. Sci. Technol. A 37, 021502 (2019)
Published: January 2019
Includes: Supplementary data
Journal Articles
Zizhuo Zhang, Himamshu C. Nallan, Brennan M. Coffey, Thong Q. Ngo, Tanmoy Pramanik, Sanjay K. Banerjee, John G. Ekerdt
J. Vac. Sci. Technol. A 37, 010903 (2019)
Published: December 2018
Journal Articles
J. Vac. Sci. Technol. A 35, 061312 (2017)
Published: November 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 060607 (2017)
Published: October 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 05C101 (2017)
Published: August 2017
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