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Journal Articles
J. Vac. Sci. Technol. A 42, 062409 (2024)
Published: November 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 063405 (2024)
Published: October 2024
Journal Articles
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J. Vac. Sci. Technol. A 42, 053413 (2024)
Published: September 2024
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J. Vac. Sci. Technol. A 42, 052703 (2024)
Published: July 2024
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Muhammad Saqib Shahzad, Xiao Wang, Yinglin Hu, Xiaona Li, Qiao Jiang, Min Li, ZhuMin Li, Renwei Liu, Rui Zheng, Chuang Dong
J. Vac. Sci. Technol. A 42, 043408 (2024)
Published: June 2024
Includes: Supplementary data
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J. Vac. Sci. Technol. A 42, 033011 (2024)
Published: April 2024
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J. Vac. Sci. Technol. A 42, 033204 (2024)
Published: March 2024
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J. Vac. Sci. Technol. A 42, 023114 (2024)
Published: February 2024
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J. Vac. Sci. Technol. A 42, 023208 (2024)
Published: February 2024
Journal Articles
Allan Lebreton, Marie-Paule Besland, Pierre-Yves Jouan, Tatiana Signe, Cédric Mannequin, Mireille Richard-Plouet, Maryline Le Granvalet, Christophe Lethien, Thierry Brousse, Jérémy Barbé
J. Vac. Sci. Technol. A 42, 023405 (2024)
Published: January 2024
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J. Vac. Sci. Technol. A 42, 012702 (2024)
Published: January 2024
Journal Articles
Alfreda Krisna Altama, Fanhua Kong, Natanael Ardi Sugiarto, Peikai Hsu, Shih-Yun Chen, Pakman Yiu, Jinn P. Chu
J. Vac. Sci. Technol. A 41, 063114 (2023)
Published: November 2023
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J. Vac. Sci. Technol. A 41, 023404 (2023)
Published: February 2023
Journal Articles
Heshan Yu, Tieren Gao, A. T. N’Diaye, E. Arenholz, Suchismita Sarker, Apurva Mehta, Xiaohang Zhang, Ichiro Takeuchi
J. Vac. Sci. Technol. A 41, 023403 (2023)
Published: February 2023
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J. Vac. Sci. Technol. A 41, 023402 (2023)
Published: January 2023
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J. Vac. Sci. Technol. A 41, 013404 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. A 41, 013403 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 053006 (2022)
Published: August 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 043206 (2022)
Published: June 2022
Journal Articles
Martina Müller, Patrick Lömker, Paul Rosenberger, Mai Hussein Hamed, David N. Mueller, Ronja A. Heinen, Thomas Szyjka, Lutz Baumgarten
J. Vac. Sci. Technol. A 40, 013215 (2022)
Published: December 2021
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