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Journal Articles

Si-doped HZO and ZrO₂ for hysteresis free high-k dielectric

Harshil Kashyap, Ping-Che Lee, Kisung Chae, Matthias Passlack, Ajay K. Yadav, Keith Wong, Srini Nemani, Ellie Yieh, Jeffrey Spiegelman, Kyeongjae Cho, Asif Islam Khan, Andrew C. Kummel

J. Vac. Sci. Technol. A 43, 022401 (2025)

https://doi.org/10.1116/6.0003895

Published: January 2025

View article titled, Si-doped HZO and ZrO2 for hysteresis free high-k dielectric

Journal Articles

Study on the fabrication of high-quality hafnium oxide thin films using spatial rotated atomic layer deposition and supercritical fluids treatment

Wen-Hsi Lee, Chien-Ching Feng, Guan-Fu Chen, Tai-Chen Kuo

J. Vac. Sci. Technol. A 42, 062409 (2024)

https://doi.org/10.1116/6.0004041

Published: November 2024

View article titled, Study on the fabrication of high-quality hafnium oxide thin films using spatial rotated atomic layer deposition and supercritical fluids treatment

Journal Articles

Molecular beam epitaxy of Pd-Fe graded alloy films for standing spin waves control

Igor Yanilkin, Amir Gumarov, Igor Golovchanskiy, Airat Kiiamov, Bulat Gabbasov, Roman Yusupov, Lenar Tagirov

J. Vac. Sci. Technol. A 42, 052703 (2024)

https://doi.org/10.1116/6.0003721

Published: July 2024

View article titled, Molecular beam epitaxy of Pd-Fe graded alloy films for standing spin waves control

Journal Articles

Studies of electrical resistivity and magnetic properties of CuFe and CuNiFe films prepared by magnetron sputtering

Muhammad Saqib Shahzad, Xiao Wang, Yinglin Hu, Xiaona Li, Qiao Jiang, Min Li, ZhuMin Li, Renwei Liu, Rui Zheng, Chuang Dong

J. Vac. Sci. Technol. A 42, 043408 (2024)

https://doi.org/10.1116/6.0003684

Published: June 2024

View article titled, Studies of electrical resistivity and magnetic properties of CuFe and CuNiFe films prepared by magnetron sputtering

Includes: Supplementary data

Journal Articles

Strong signature of uncompensated magnetization in frustrated cobalt manganites using x-ray magnetic circular dichroism study

A. Kumari, F. Zainab, A. Mishra, W. W. Tjiu, Z. Aabdin, V. R. Singh

J. Vac. Sci. Technol. A 42, 033204 (2024)

https://doi.org/10.1116/6.0003417

Published: March 2024

View article titled, Strong signature of uncompensated magnetization in frustrated cobalt manganites using x-ray magnetic circular dichroism study

Journal Articles

Control of microstructure and composition of reactively sputtered vanadium nitride thin films based on hysteresis curves and application to microsupercapacitors

Allan Lebreton, Marie-Paule Besland, Pierre-Yves Jouan, Tatiana Signe, Cédric Mannequin, Mireille Richard-Plouet, Maryline Le Granvalet, Christophe Lethien, Thierry Brousse, Jérémy Barbé

J. Vac. Sci. Technol. A 42, 023405 (2024)

https://doi.org/10.1116/5.0177028

Published: January 2024

View article titled, Control of microstructure and composition of reactively sputtered vanadium nitride thin films based on hysteresis curves and application to microsupercapacitors

Journal Articles

Fabrication and characterization of a hybrid magnetic structure based on highly ordered metallic nanotube arrays

Alfreda Krisna Altama, Fanhua Kong, Natanael Ardi Sugiarto, Peikai Hsu, Shih-Yun Chen, Pakman Yiu, Jinn P. Chu

J. Vac. Sci. Technol. A 41, 063114 (2023)

https://doi.org/10.1116/6.0003103

Published: November 2023

View article titled, Fabrication and characterization of a hybrid magnetic structure based on highly ordered metallic nanotube arrays

Journal Articles

Optical studies of pure and (Cu, Co) doped nickel zinc ferrite films deposited on quartz substrate

Sneha Kothapally, Sushma Kotru, Roni Paul, Jaber A. Abu Qahouq

J. Vac. Sci. Technol. A 41, 023404 (2023)

https://doi.org/10.1116/6.0002262

Published: February 2023

View article titled, Optical studies of pure and (Cu, Co) doped nickel zinc ferrite films deposited on quartz substrate

Journal Articles

Magnetic phase diagram mapping in Fe_1−xRh_x composition-spread thin films

Heshan Yu, Tieren Gao, A. T. N’Diaye, E. Arenholz, Suchismita Sarker, Apurva Mehta, Xiaohang Zhang, Ichiro Takeuchi

J. Vac. Sci. Technol. A 41, 023403 (2023)

https://doi.org/10.1116/6.0002220

Published: February 2023

View article titled, Magnetic phase diagram mapping in Fe1−xRhx composition-spread thin films

Journal Articles

Structural, magnetic, and transport properties of Co₂CrAl epitaxial thin film

Guru Dutt Gupt, Rajendra S. Dhaka

J. Vac. Sci. Technol. A 41, 023402 (2023)

https://doi.org/10.1116/6.0002251

Published: January 2023

View article titled, Structural, magnetic, and transport properties of Co2CrAl epitaxial thin film

Journal Articles

Effects of sputtering process on the thermochromic function of vanadium dioxide thin films

Chuan Li, Jang Hsing Hsieh, Chuan Ming Su, Nai-Yun Chang

J. Vac. Sci. Technol. A 40, 013403 (2022)

https://doi.org/10.1116/6.0001404

Published: November 2021

View article titled, Effects of sputtering process on the thermochromic function of vanadium dioxide thin films

Journal Articles

Magnetic properties and resistive switching in mixture films and nanolaminates consisting of iron and silicon oxides grown by atomic layer deposition

Kaupo Kukli, Marianna Kemell, Helena Castán, Salvador Dueñas, Joosep Link, Raivo Stern, Mikko J. Heikkilä, Taivo Jõgiaas, Jekaterina Kozlova, Mihkel Rähn, Kenichiro Mizohata, Mikko Ritala, Markku Leskelä

J. Vac. Sci. Technol. A 38, 042405 (2020)

https://doi.org/10.1116/6.0000212

Published: June 2020

View article titled, Magnetic properties and resistive switching in mixture films and nanolaminates consisting of iron and silicon oxides grown by atomic layer deposition

Journal Articles

Thickness dependent magneto-static and magneto-dynamic properties of CoFeB thin films

Anabil Gayen, Rajkumar Modak, Ananthakrishnan Srinivasan, Vallabhapurapu Vijaya Srinivasu, Perumal Alagarsamy

J. Vac. Sci. Technol. A 37, 031513 (2019)

https://doi.org/10.1116/1.5091675

Published: April 2019

View article titled, Thickness dependent magneto-static and magneto-dynamic properties of CoFeB thin films

Journal Articles

Dislocation structures, interfacing, and magnetism in the L 1 − M n G a on η _⊥− M n 3 N 2 bilayer

J. P. Corbett, J. Guerrero-Sanchez, J. C. Gallagher, A.-O. Mandru, A. L. Richard, D. C. Ingram, F. Yang, N. Takeuchi, A. R. Smith

J. Vac. Sci. Technol. A 37, 031102 (2019)

https://doi.org/10.1116/1.5081960

Published: April 2019

View article titled, Dislocation structures, interfacing, and magnetism in the L 1 − M n G a on η ⊥− M n 3 N 2 bilayer

Journal Articles

Functional fatigue of submicrometer NiTi shape memory alloy thin films

Huilong Hou, Yuan Tang, Reginald F. Hamilton, Mark W. Horn

J. Vac. Sci. Technol. A 35, 040601 (2017)

https://doi.org/10.1116/1.4983011

Published: May 2017

View article titled, Functional fatigue of submicrometer NiTi shape memory alloy thin films

Includes: Supplementary data

Journal Articles

Comparative study on growth characteristics and electrical properties of ZrO₂ films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors

Hanearl Jung, Il-Kwon Oh, Seungmin Yeo, Hyungjun Kim, Su Jeong Lee, Yun Cheol Kim, Jae-Min Myoung, Soo-Hyun Kim, Jun Hyung Lim, Sunhee Lee

J. Vac. Sci. Technol. A 35, 031510 (2017)

https://doi.org/10.1116/1.4982224

Published: April 2017

View article titled, Comparative study on growth characteristics and electrical properties of ZrO2 films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors

Includes: Supplementary data

Journal Articles

In-gap states in titanium dioxide and oxynitride atomic layer deposited films

Karsten Henkel, Chittaranjan Das, Małgorzata Kot, Dieter Schmeißer, Franziska Naumann, Irina Kärkkänen, Hassan Gargouri

J. Vac. Sci. Technol. A 35, 01B135 (2017)

https://doi.org/10.1116/1.4972247

Published: December 2016

View article titled, In-gap states in titanium dioxide and oxynitride atomic layer deposited films

Journal Articles

Resistive memory multilayer structure with self-rectifying and forming free properties along with their modification by adding a hafnium nanoparticle midlayer

Irini Michelakaki, Panagiotis Bousoulas, Nikos Maragos, Nikos Boukos, Dimitris Tsoukalas

J. Vac. Sci. Technol. A 35, 021501 (2017)

https://doi.org/10.1116/1.4968204

Published: November 2016

View article titled, Resistive memory multilayer structure with self-rectifying and forming free properties along with their modification by adding a hafnium nanoparticle midlayer

Journal Articles

Narrow thermal hysteresis of NiTi shape memory alloy thin films with submicrometer thickness

Huilong Hou, Reginald F. Hamilton, Mark W. Horn

J. Vac. Sci. Technol. A 34, 050602 (2016)

https://doi.org/10.1116/1.4959567

Published: July 2016

View article titled, Narrow thermal hysteresis of NiTi shape memory alloy thin films with submicrometer thickness

Includes: Supplementary data

Journal Articles

Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

Christian Saringer, Robert Franz, Katrin Zorn, Christian Mitterer

J. Vac. Sci. Technol. A 34, 041517 (2016)

https://doi.org/10.1116/1.4954949

Published: July 2016

View article titled, Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

NARROW

Topics

Si-doped HZO and ZrO₂ for hysteresis free high-k dielectric

Study on the fabrication of high-quality hafnium oxide thin films using spatial rotated atomic layer deposition and supercritical fluids treatment

Molecular beam epitaxy of Pd-Fe graded alloy films for standing spin waves control

Studies of electrical resistivity and magnetic properties of CuFe and CuNiFe films prepared by magnetron sputtering

Strong signature of uncompensated magnetization in frustrated cobalt manganites using x-ray magnetic circular dichroism study

Control of microstructure and composition of reactively sputtered vanadium nitride thin films based on hysteresis curves and application to microsupercapacitors

Fabrication and characterization of a hybrid magnetic structure based on highly ordered metallic nanotube arrays

Optical studies of pure and (Cu, Co) doped nickel zinc ferrite films deposited on quartz substrate

Magnetic phase diagram mapping in Fe_1−xRh_x composition-spread thin films

Structural, magnetic, and transport properties of Co₂CrAl epitaxial thin film

Effects of sputtering process on the thermochromic function of vanadium dioxide thin films

Magnetic properties and resistive switching in mixture films and nanolaminates consisting of iron and silicon oxides grown by atomic layer deposition

Thickness dependent magneto-static and magneto-dynamic properties of CoFeB thin films

Dislocation structures, interfacing, and magnetism in the L 1 − M n G a on η _⊥− M n 3 N 2 bilayer

Functional fatigue of submicrometer NiTi shape memory alloy thin films

Comparative study on growth characteristics and electrical properties of ZrO₂ films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors

In-gap states in titanium dioxide and oxynitride atomic layer deposited films

Resistive memory multilayer structure with self-rectifying and forming free properties along with their modification by adding a hafnium nanoparticle midlayer

Narrow thermal hysteresis of NiTi shape memory alloy thin films with submicrometer thickness

Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

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