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Journal Articles

Fabrication and characterization of a hybrid magnetic structure based on highly ordered metallic nanotube arrays

Alfreda Krisna Altama, Fanhua Kong, Natanael Ardi Sugiarto, Peikai Hsu, Shih-Yun Chen, Pakman Yiu, Jinn P. Chu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063114 (2023)
https://doi.org/10.1116/6.0003103
Published: November 2023
View article titled, Fabrication and characterization of a hybrid magnetic structure based on highly ordered metallic nanotube arrays
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Journal Articles

Optical studies of pure and (Cu, Co) doped nickel zinc ferrite films deposited on quartz substrate

Sneha Kothapally, Sushma Kotru, Roni Paul, Jaber A. Abu Qahouq
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023404 (2023)
https://doi.org/10.1116/6.0002262
Published: February 2023
View article titled, Optical studies of pure and (Cu, Co) doped nickel zinc ferrite films deposited on quartz substrate
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Journal Articles

Magnetic phase diagram mapping in Fe1−xRhx composition-spread thin films

Heshan Yu, Tieren Gao, A. T. N’Diaye, E. Arenholz, Suchismita Sarker, Apurva Mehta, Xiaohang Zhang, Ichiro Takeuchi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023403 (2023)
https://doi.org/10.1116/6.0002220
Published: February 2023
View article titled, Magnetic phase diagram mapping in Fe<sub>1−<em>x</em></sub>Rh<em><sub>x</sub></em> composition-spread thin films
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Journal Articles

Structural, magnetic, and transport properties of Co2CrAl epitaxial thin film

Guru Dutt Gupt, Rajendra S. Dhaka
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023402 (2023)
https://doi.org/10.1116/6.0002251
Published: January 2023
View article titled, Structural, magnetic, and transport properties of Co<sub>2</sub>CrAl epitaxial thin film
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Journal Articles

Effects of sputtering process on the thermochromic function of vanadium dioxide thin films

Chuan Li, Jang Hsing Hsieh, Chuan Ming Su, Nai-Yun Chang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 013403 (2022)
https://doi.org/10.1116/6.0001404
Published: November 2021
View article titled, Effects of sputtering process on the thermochromic function of vanadium dioxide thin films
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Journal Articles

Magnetic properties and resistive switching in mixture films and nanolaminates consisting of iron and silicon oxides grown by atomic layer deposition

Kaupo Kukli, Marianna Kemell, Helena Castán, Salvador Dueñas, Joosep Link, Raivo Stern, Mikko J. Heikkilä, Taivo Jõgiaas, Jekaterina Kozlova, Mihkel Rähn, Kenichiro Mizohata, Mikko Ritala, Markku Leskelä
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 042405 (2020)
https://doi.org/10.1116/6.0000212
Published: June 2020
View article titled, Magnetic properties and resistive switching in mixture films and nanolaminates consisting of iron and silicon oxides grown by atomic layer deposition
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Journal Articles

Thickness dependent magneto-static and magneto-dynamic properties of CoFeB thin films

Anabil Gayen, Rajkumar Modak, Ananthakrishnan Srinivasan, Vallabhapurapu Vijaya Srinivasu, Perumal Alagarsamy
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 031513 (2019)
https://doi.org/10.1116/1.5091675
Published: April 2019
View article titled, Thickness dependent magneto-static and magneto-dynamic properties of CoFeB thin films
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Journal Articles

Dislocation structures, interfacing, and magnetism in the L 1 − M n G a on η ⊥− M n 3 N 2 bilayer

J. P. Corbett, J. Guerrero-Sanchez, J. C. Gallagher, A.-O. Mandru, A. L. Richard, D. C. Ingram, F. Yang, N. Takeuchi, A. R. Smith
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 031102 (2019)
https://doi.org/10.1116/1.5081960
Published: April 2019
View article titled, Dislocation structures, interfacing, and magnetism in the L 1 − M n G a on η <sub>⊥</sub>− M n 3 N 2 bilayer
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Journal Articles

Functional fatigue of submicrometer NiTi shape memory alloy thin films

Huilong Hou, Yuan Tang, Reginald F. Hamilton, Mark W. Horn
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 040601 (2017)
https://doi.org/10.1116/1.4983011
Published: May 2017
View article titled, Functional fatigue of submicrometer NiTi shape memory alloy thin films
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Includes: Supplementary data
Journal Articles

Comparative study on growth characteristics and electrical properties of ZrO2 films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors

Hanearl Jung, Il-Kwon Oh, Seungmin Yeo, Hyungjun Kim, Su Jeong Lee, Yun Cheol Kim, Jae-Min Myoung, Soo-Hyun Kim, Jun Hyung Lim, Sunhee Lee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 031510 (2017)
https://doi.org/10.1116/1.4982224
Published: April 2017
View article titled, Comparative study on growth characteristics and electrical properties of ZrO<sub>2</sub> films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors
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Includes: Supplementary data
Journal Articles

In-gap states in titanium dioxide and oxynitride atomic layer deposited films

Karsten Henkel, Chittaranjan Das, Małgorzata Kot, Dieter Schmeißer, Franziska Naumann, Irina Kärkkänen, Hassan Gargouri
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 01B135 (2017)
https://doi.org/10.1116/1.4972247
Published: December 2016
View article titled, In-gap states in titanium dioxide and oxynitride atomic layer deposited films
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Journal Articles

Resistive memory multilayer structure with self-rectifying and forming free properties along with their modification by adding a hafnium nanoparticle midlayer

Irini Michelakaki, Panagiotis Bousoulas, Nikos Maragos, Nikos Boukos, Dimitris Tsoukalas
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 021501 (2017)
https://doi.org/10.1116/1.4968204
Published: November 2016
View article titled, Resistive memory multilayer structure with self-rectifying and forming free properties along with their modification by adding a hafnium nanoparticle midlayer
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Journal Articles

Narrow thermal hysteresis of NiTi shape memory alloy thin films with submicrometer thickness

Huilong Hou, Reginald F. Hamilton, Mark W. Horn
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 050602 (2016)
https://doi.org/10.1116/1.4959567
Published: July 2016
View article titled, Narrow thermal hysteresis of NiTi shape memory alloy thin films with submicrometer thickness
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Includes: Supplementary data
Journal Articles

Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

Christian Saringer, Robert Franz, Katrin Zorn, Christian Mitterer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 041517 (2016)
https://doi.org/10.1116/1.4954949
Published: July 2016
View article titled, Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN
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Journal Articles

Time-resolved ion flux and impedance measurements for process characterization in reactive high-power impulse magnetron sputtering

Daniel Lundin, Martin Čada, Zdenĕk Hubička
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 041305 (2016)
https://doi.org/10.1116/1.4953033
Published: June 2016
View article titled, Time-resolved ion flux and impedance measurements for process characterization in reactive high-power impulse magnetron sputtering
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Journal Articles

Target poisoning during CrN deposition by mixed high power impulse magnetron sputtering and unbalanced magnetron sputtering technique

Yashodhan P. Purandare, Arutiun P. Ehiasarian, Papken Eh Hovsepian
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 041502 (2016)
https://doi.org/10.1116/1.4950886
Published: May 2016
View article titled, Target poisoning during CrN deposition by mixed high power impulse magnetron sputtering and unbalanced magnetron sputtering technique
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Journal Articles

Atomic layer deposition of environmentally benign SnTiOx as a potential ferroelectric material

Siliang Chang, Sathees Kannan Selvaraj, Yoon-Young Choi, Seungbum Hong, Serge M. Nakhmanson, Christos G. Takoudis
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 01A119 (2016)
https://doi.org/10.1116/1.4935650
Published: November 2015
View article titled, Atomic layer deposition of environmentally benign SnTiO<sub>x</sub> as a potential ferroelectric material
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Journal Articles

Iron–cobalt alloy thin films with high saturation magnetizations grown by conformal metalorganic CVD

Pengyi Zhang, Shaista Babar, John R. Abelson, Sarbeswar Sahoo, Meng Zhu, Michael Kautzky, Luke M. Davis, Gregory S. Girolami
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 061521 (2015)
https://doi.org/10.1116/1.4935449
Published: November 2015
View article titled, Iron–cobalt alloy thin films with high saturation magnetizations grown by conformal metalorganic CVD
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Includes: Supplementary data
Journal Articles

Resistive memory properties of an electrochemical SiO2-based device without an active electrode

Chih-Yi Liu, Kun-Chi Chiang, Chun-Hung Lai
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 02D102 (2016)
https://doi.org/10.1116/1.4933077
Published: October 2015
View article titled, Resistive memory properties of an electrochemical SiO<sub>2</sub>-based device without an active electrode
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Journal Articles

In-situ nitrogen plasma passivation of Al2O3/GaN interface states

Junwoo Son, Varistha Chobpattana, Brian M. McSkimming, Susanne Stemmer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 020602 (2015)
https://doi.org/10.1116/1.4905846
Published: January 2015
View article titled, <em>In-situ</em> nitrogen plasma passivation of Al<sub>2</sub>O<sub>3</sub>/GaN interface states
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