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Journal Articles

Compatibility of molten plutonium with wrought and additively manufactured metal crucibles

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Michelle M. Greenough, Alexander E. Wilson-Heid, R. Joey Griffiths, Donya R. Servando-Williams, Ryan M. Kissinger, W. Preston Cole, Debra L. Rosas, Andrew J. Swift, Jason E. Schnackenberg, Tien T. Roehling, Aiden A. Martin, Kiel S. Holliday, Jason R. Jeffries
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043101 (2025)
https://doi.org/10.1116/6.0004524
Published: May 2025
View articletitled, Compatibility of molten plutonium with wrought and additively manufactured metal crucibles
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Journal Articles

Study of microstructure and mechanical properties of cBN coatings on nanocrystalline diamond transition layer prepared by magnetron sputtering

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Shunxin Liu, Shuai Tian, Kaishan Nie, Zhengyi Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033402 (2025)
https://doi.org/10.1116/6.0004340
Published: March 2025
View articletitled, Study of microstructure and mechanical properties of cBN coatings on nanocrystalline diamond transition layer prepared by magnetron sputtering
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Journal Articles

Statistically distributed nano-scratch testing of AlFeMnNb, AlFeMnNi, and TiN/Si3N4 thin films on silicon

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Ben D. Beake, Vladimir M. Vishnyakov, Stephen R. Goodes, Azadeh Taher Rahmati
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 013104 (2024)
https://doi.org/10.1116/6.0003189
Published: January 2024
View articletitled, Statistically distributed nano-scratch testing of AlFeMnNb, AlFeMnNi, and TiN/Si3N4 thin films on silicon
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Journal Articles

Tribological behavior and wear mechanism of nanomultilayer AlCrN/AlTiSiN coatings at elevated temperatures

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Baijun Xiao, Teng Fei Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063110 (2023)
https://doi.org/10.1116/6.0003019
Published: October 2023
View articletitled, Tribological behavior and wear mechanism of nanomultilayer AlCrN/AlTiSiN coatings at elevated temperatures
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Journal Articles

Statistical analysis of pulsed spark discharges in water: Effects of gap distance, electrode material, and voltage polarity on discharge characteristics

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Audren Dorval, Korentin Geraud, Flavien Valensi, Ahmad Hamdan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043006 (2022)
https://doi.org/10.1116/6.0001923
Published: June 2022
View articletitled, Statistical analysis of pulsed spark discharges in water: Effects of gap distance, electrode material, and voltage polarity on discharge characteristics
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Includes: Supplementary data
Journal Articles

All-dry free radical polymerization inside nanopores: Ion-milling-enabled coating thickness profiling revealed “necking” phenomena

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Yifan Cheng, Alexandra Khlyustova, Rong Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033406 (2022)
https://doi.org/10.1116/6.0001718
Published: April 2022
View articletitled, All-dry free radical polymerization inside nanopores: Ion-milling-enabled coating thickness profiling revealed “necking” phenomena
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Includes: Supplementary data
Journal Articles

Lamellae preparation for atomic-resolution STEM imaging from ion-beam-sensitive topological insulator crystals

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Abdulhakim Bake, Weiyao Zhao, David Mitchell, Xiaolin Wang, Mitchell Nancarrow, David Cortie
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033203 (2022)
https://doi.org/10.1116/6.0001771
Published: April 2022
View articletitled, Lamellae preparation for atomic-resolution STEM imaging from ion-beam-sensitive topological insulator crystals
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Journal Articles

Ablation of piezoelectric polyvinylidene fluoride with a 193 nm excimer laser

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Jeffrey Elloian, Jeffrey Sherman, Tiago Costa, Chen Shi, Kenneth Shepard
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 033202 (2020)
https://doi.org/10.1116/1.5142494
Published: March 2020
View articletitled, Ablation of piezoelectric polyvinylidene fluoride with a 193 nm excimer laser
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Journal Articles

Structural defects of GaN deposited on (111) Si with Gd2O3-related buffer layers

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Ko-Ying Lo, Pei-Hsin Lin, Hung-Jung Chen, Jyh-Rong Gong, Hsun-Feng Hsu, Yu-Wei Lee, Wei-Li Chen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 061513 (2017)
https://doi.org/10.1116/1.5000986
Published: October 2017
View articletitled, Structural defects of GaN deposited on (111) Si with Gd2O3-related buffer layers
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Journal Articles

Synthesis and characterization of MoB2−x thin films grown by nonreactive DC magnetron sputtering

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Paulius Malinovskis, Justinas Palisaitis, Per O. Å. Persson, Erik Lewin, Ulf Jansson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 031511 (2016)
https://doi.org/10.1116/1.4948234
Published: April 2016
View articletitled, Synthesis and characterization of MoB2−x thin films grown by nonreactive DC magnetron sputtering
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Journal Articles

National Synchrotron Light Source II storage ring vacuum systems

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Hsiao-Chaun Hseuh, Charles Hetzel, Shuwei Leng, King Wilson, Huijuan Xu, Douglas Zigrosser
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 031603 (2016)
https://doi.org/10.1116/1.4945406
Published: April 2016
View articletitled, National Synchrotron Light Source II storage ring vacuum systems
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Journal Articles

Vacuum compatibility of 3D-printed materials

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Alexander P. Povilus, Caroline J. Wurden, Zak Vendeiro, Marcelo Baquero-Ruiz, Joel Fajans
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 033001 (2014)
https://doi.org/10.1116/1.4873556
Published: April 2014
View articletitled, Vacuum compatibility of 3D-printed materials
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Journal Articles

Structural and composition investigations at delayered locations of low k integrated circuit device by gas-assisted focused ion beam

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Dandan Wang, Pik Kee Tan, Maggie Yamin Huang, Jeffrey Lam, Zhihong Mai
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 030605 (2014)
https://doi.org/10.1116/1.4869283
Published: March 2014
View articletitled, Structural and composition investigations at delayered locations of low k integrated circuit device by gas-assisted focused ion beam
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Journal Articles

Vacuum compatibility of silver and titanium parts made using three-dimensional printing

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Ashley R. Gans, Matthew M. Jobbins, David Y. Lee, S. Alex Kandel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 023201 (2014)
https://doi.org/10.1116/1.4846195
Published: December 2013
View articletitled, Vacuum compatibility of silver and titanium parts made using three-dimensional printing
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Journal Articles

Recent search for new superhard materials: Go nano!

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Stan Veprek
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 050822 (2013)
https://doi.org/10.1116/1.4818590
Published: August 2013
View articletitled, Recent search for new superhard materials: Go nano!
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Journal Articles

Atomic layer deposition of TiN for the fabrication of nanomechanical resonators

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Nathan Nelson-Fitzpatrick, Csaba Guthy, Somayyeh Poshtiban, Eric Finley, Kenneth D. Harris, Brian J. Worfolk, Stephane Evoy
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 021503 (2013)
https://doi.org/10.1116/1.4790132
Published: February 2013
View articletitled, Atomic layer deposition of TiN for the fabrication of nanomechanical resonators
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Journal Articles

Magnetically coupled ultrahigh vacuum manipulator with a sample grabber

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Seong Heon Kim, Alex de Lozanne
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 013201 (2013)
https://doi.org/10.1116/1.4769127
Published: November 2012
View articletitled, Magnetically coupled ultrahigh vacuum manipulator with a sample grabber
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Journal Articles

Improved characteristics of mesa-type intrinsic Josephson junctions by vacuum cleavage process for Bi2Sr2CaCu2O8+δ/Au contacts

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Hiroki Ishida, Takahiro Kato, Atsushi Saito, Kanji Yasui
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 031101 (2012)
https://doi.org/10.1116/1.4707151
Published: April 2012
View articletitled, Improved characteristics of mesa-type intrinsic Josephson junctions by vacuum cleavage process for Bi2Sr2CaCu2O8+δ/Au contacts
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Journal Articles

Mechanical masking of films deposited by atomic layer deposition

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Michael C. Langston, Takane Usui, Fritz B. Prinz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 01A153 (2012)
https://doi.org/10.1116/1.3669520
Published: December 2011
View articletitled, Mechanical masking of films deposited by atomic layer deposition
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Journal Articles

Evaluating operating conditions for continuous atmospheric atomic layer deposition using a multiple slit gas source head

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P. Ryan Fitzpatrick, Zachary M. Gibbs, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 01A136 (2012)
https://doi.org/10.1116/1.3664765
Published: December 2011
View articletitled, Evaluating operating conditions for continuous atmospheric atomic layer deposition using a multiple slit gas source head
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