Skip Nav Destination
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Format
Collections
Topics
Journal
Article Type
Issue Section
Date
Availability
Journal Articles
J. Vac. Sci. Technol. A 42, 023111 (2024)
Published: February 2024
Journal Articles
Juan P. Cuenca-Vargas, Juan D. Lopez-Vargas, Andre A. Drummond, Marcelo M. Werneck, Dante F. Franceschini, Sergio S. Camargo
J. Vac. Sci. Technol. A 41, 053111 (2023)
Published: August 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 013402 (2022)
Published: November 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 043403 (2021)
Published: May 2021
Journal Articles
J. Vac. Sci. Technol. A 38, 033202 (2020)
Published: March 2020
Journal Articles
J. Vac. Sci. Technol. A 37, 061506 (2019)
Published: October 2019
Journal Articles
J. Vac. Sci. Technol. A 35, 031305 (2017)
Published: April 2017
Journal Articles
J. Vac. Sci. Technol. A 34, 061103 (2016)
Published: October 2016
Includes: Supplementary data
Journal Articles
Félix Gérenton, Fabien Mandorlo, Erwann Fourmond, Marine Le Coz, Danièle Blanc-Pélissier, Mustapha Lemiti
J. Vac. Sci. Technol. A 34, 051201 (2016)
Published: July 2016
Journal Articles
J. Vac. Sci. Technol. A 31, 011302 (2013)
Published: November 2012
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 29, 031502 (2011)
Published: March 2011
Journal Articles
H. Luna, D. F. Franceschini, R. Prioli, R. B. Guimarães, C. M. Sanchez, G. P. Canal, M. D. L. Barbosa, R. M. O. Galvão
J. Vac. Sci. Technol. A 28, 1092–1098 (2010)
Published: September 2010
Journal Articles
Radek Zeipl, Jarmila Walachová, Jan Lorinčík, Sergey Leshkov, Monika Josieková, Miroslav Jelínek, Tomáš Kocourek, Karel Jurek, Jiří Navrátil, Ludvík Beneš, Tomáš Plecháček
J. Vac. Sci. Technol. A 28, 523–527 (2010)
Published: June 2010
Journal Articles
I. Konomi, T. Motohiro, H. Azuma, T. Asaoka, T. Nakazato, E. Sato, T. Shimizu, S. Fujioka, N. Sarukura, H. Nishimura
J. Vac. Sci. Technol. A 28, 400–406 (2010)
Published: March 2010
Journal Articles
J. Vac. Sci. Technol. A 26, 1455–1461 (2008)
Published: October 2008
Journal Articles
J. Vac. Sci. Technol. A 26, 898–902 (2008)
Published: July 2008
Journal Articles
J. Vac. Sci. Technol. A 25, 1208–1213 (2007)
Published: July 2007
Journal Articles
J. Vac. Sci. Technol. A 25, 1128–1132 (2007)
Published: July 2007
Journal Articles
J. Vac. Sci. Technol. A 25, 304–307 (2007)
Published: February 2007
Journal Articles
J. Vac. Sci. Technol. A 25, 117–125 (2007)
Published: January 2007
1