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Journal Articles

Low temperature growth of single-phase and preferentially oriented ɛ-Ga2O3 films on sapphire substrates via atomic layer deposition

Xiangtai Liu, Jiayang Wang, Lu Jin, Jiao Fu, Qin Lu, Shaoqing Wang, Yifan Jia, Zhan Wang, Yunhe Guan, Haifeng Chen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 012402 (2025)
https://doi.org/10.1116/6.0004048
Published: December 2024
View article titled, Low temperature growth of single-phase and preferentially oriented ɛ-Ga<sub>2</sub>O<sub>3</sub> films on sapphire substrates via atomic layer deposition
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Journal Articles

Modeling the effects of electron irradiation on graphene drums using the local activation model

Ibikunle Ojo, Thineth Bandara Jayamaha Hitihamilage, Jacob Hardin, Anil Pudasaini, Roberto Gonzalez, Jiang Yan, Jingbiao Cui, Jose Perez
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 012201 (2025)
https://doi.org/10.1116/6.0004098
Published: December 2024
View article titled, Modeling the effects of electron irradiation on graphene drums using the local activation model
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Journal Articles

Oxidation behavior of TiB2–SiC nanocomposite coatings deposited by magnetron sputtering

Featured
Yuanxing Wu, Qizhong Li, Rong Tu, Takashi Goto
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063109 (2024)
https://doi.org/10.1116/6.0004075
Published: November 2024
View article titled, Oxidation behavior of TiB<sub>2</sub>–SiC nanocomposite coatings deposited by magnetron sputtering
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Journal Articles

Impact of monolayer WS2 surface properties on the gate dielectrics formation by atomic layer deposition

Editor’s Pick
Zaoyang Lin, Sven Dekelver, Daire Cott, Benjamin Groven, Stefanie Sergeant, Thierry Conard, Xiangyu Wu, Pierre Morin, Dennis Lin, Cesar Javier Lockhart de la Rosa, Gouri Sankar Kar, Annelies Delabie
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 062202 (2024)
https://doi.org/10.1116/6.0003894
Published: October 2024
View article titled, Impact of monolayer WS<sub>2</sub> surface properties on the gate dielectrics formation by atomic layer deposition
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Journal Articles

Cr2O3–NiO mixed oxides thin films for p-type transparent conductive electrodes

Aleksei Almaev, Bogdan Kushnarev, Petr Korusenko, Pavel Butenko, Viktor Kopyev, Aleksandra Koroleva, Andrei Chikiryaka, Evgeniy Zhizhin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063406 (2024)
https://doi.org/10.1116/6.0003956
Published: October 2024
View article titled, Cr<sub>2</sub>O<sub>3</sub>–NiO mixed oxides thin films for p-type transparent conductive electrodes
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Journal Articles

Effect of post-deposition annealing on crystal structure of RF magnetron sputtered germanium dioxide thin films

Ahmad Matar Abed, Rebecca L. Peterson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063403 (2024)
https://doi.org/10.1116/6.0003960
Published: October 2024
View article titled, Effect of post-deposition annealing on crystal structure of RF magnetron sputtered germanium dioxide thin films
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Journal Articles

Effect of plasma nitriding on microstructure and wear behavior of electrodeposited FeCoNiCr coating

Meiling Dong, Mingxin He, Chaohui Wang, Xiufang Cui, Guo Jin, Pengwei Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063104 (2024)
https://doi.org/10.1116/6.0003925
Published: October 2024
View article titled, Effect of plasma nitriding on microstructure and wear behavior of electrodeposited FeCoNiCr coating
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Journal Articles

Removing defects from sputter damage on InGaP surfaces using thermal atomic layer etching

Editor’s Pick
Ross Edel, Ezra Alexander, Taewook Nam, Andrew S. Cavanagh, Troy Van Voorhis, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 062602 (2024)
https://doi.org/10.1116/6.0003899
Published: October 2024
View article titled, Removing defects from sputter damage on InGaP surfaces using thermal atomic layer etching
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Journal Articles

Regulation of precipitation and its influence on the performances of multicomponent β-Ti-based shape memory alloy through annealing treatment

Yaping Wang, Guohao Zhang, Yanqing Wu, Wei Liu, Yunfei Wang, Xinjian Cao, Xiao Liu, Lun Jiang, Haizhen Wang, Xiaoyang Yi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 062703 (2024)
https://doi.org/10.1116/6.0003904
Published: October 2024
View article titled, Regulation of precipitation and its influence on the performances of multicomponent β-Ti-based shape memory alloy through annealing treatment
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Journal Articles

Nanostructured bi-metallic Pd–Ag alloy films for surface-enhanced Raman spectroscopy-based sensing application

Niladri Mohan Das, Avantika Chauhan, M. S. S. Bharati, Kousik Bera, Satani Sampath Kumar, Venugopal Rao Soma, Amit Kumar Chawla, Shyama Rath, Devesh Kumar Avasthi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053403 (2024)
https://doi.org/10.1116/6.0003748
Published: August 2024
View article titled, Nanostructured bi-metallic Pd–Ag alloy films for surface-enhanced Raman spectroscopy-based sensing application
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Journal Articles

Microstructure, mechanical, and tribological properties of transition metal (Nb, V, W) nitride coating on AISI-1045 steel by cathodic cage plasma deposition

E. A. M. Filho, M. Naeem, J. C. Díaz-Guillén, E. M. Sousa, T. H. C. Costa, Javed Iqbal, R. R. M. Sousa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053105 (2024)
https://doi.org/10.1116/6.0003773
Published: July 2024
View article titled, Microstructure, mechanical, and tribological properties of transition metal (Nb, V, W) nitride coating on AISI-1045 steel by cathodic cage plasma deposition
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Journal Articles

Influence of high-temperature thermal annealing on paramagnetic point defects in silicon-rich silicon nitride films formed in a single-wafer-type low-pressure chemical vapor deposition reactor

Kiyoteru Kobayashi, Ryo Miyauchi, Kenshi Kimoto
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 050402 (2024)
https://doi.org/10.1116/6.0003778
Published: July 2024
View article titled, Influence of high-temperature thermal annealing on paramagnetic point defects in silicon-rich silicon nitride films formed in a single-wafer-type low-pressure chemical vapor deposition reactor
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Journal Articles

Influence of pre-rolling deformation on distribution characteristics of T1 precipitate in artificially aged Al–Cu–Li alloy

Shuwei Duan, Fuqiang Guo, Wenting Ma, Zhongli Liu, Xiaoyang Yi, Kenji Matsuda, Yue Li, Yong Zou
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 052701 (2024)
https://doi.org/10.1116/6.0003679
Published: July 2024
View article titled, Influence of pre-rolling deformation on distribution characteristics of T<sub>1</sub> precipitate in artificially aged Al–Cu–Li alloy
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Journal Articles

Microstructural features, martensitic transformation, and functional properties of multicomponent Ti–Ni based shape memory alloys

Haizhen Wang, Xinnuo Liu, Bowen Jiang, Xinjian Cao, Zhiyong Gao, Xiaoyang Yi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 042704 (2024)
https://doi.org/10.1116/6.0003622
Published: May 2024
View article titled, Microstructural features, martensitic transformation, and functional properties of multicomponent Ti–Ni based shape memory alloys
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Journal Articles

Microstructure and mechanical properties of Cr films with different orientations before and after plasma nitriding

Jianting Zhang, Dejun Li, Yuanyuan Guo, Deli Shang, Shuqi Liu, Lei Kang, Lin Zhang, Yongjie Yang, Xinggang Wang, Ning Xin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033104 (2024)
https://doi.org/10.1116/6.0003492
Published: April 2024
View article titled, Microstructure and mechanical properties of Cr films with different orientations before and after plasma nitriding
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Journal Articles

Comparison of three titanium-precursors for atomic-layer-deposited TiO2 for passivating contacts on silicon

Editor’s Pick
Daniel Hiller, Frans Munnik, Julian López-Vidrier, Dmytro Solonenko, Johanna Reif, Martin Knaut, Oliver Thimm, Nicholas E. Grant
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 032406 (2024)
https://doi.org/10.1116/6.0003309
Published: March 2024
View article titled, Comparison of three titanium-precursors for atomic-layer-deposited TiO<sub>2</sub> for passivating contacts on silicon
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Includes: Supplementary data
Journal Articles

High-performance of ZnO/TiO2 heterostructured thin-film photocatalyst fabricated via atomic layer deposition

Editor’s Pick
Ji Young Park, Jeong Hwan Han, Byung Joon Choi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 032404 (2024)
https://doi.org/10.1116/6.0003348
Published: March 2024
View article titled, High-performance of ZnO/TiO<sub>2</sub> heterostructured thin-film photocatalyst fabricated via atomic layer deposition
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Journal Articles

Novel high-efficiency plasma nitriding process utilizing a high power impulse magnetron sputtering discharge

A. P. Ehiasarian, P. Eh. Hovsepian
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023109 (2024)
https://doi.org/10.1116/6.0003277
Published: February 2024
View article titled, Novel high-efficiency plasma nitriding process utilizing a high power impulse magnetron sputtering discharge
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Journal Articles

Hollow-cathode plasma deposited vanadium oxide films: Metal precursor influence on growth and material properties

Adnan Mohammad, Krishna D. Joshi, Dhan Rana, Saidjafarzoda Ilhom, Barrett Wells, Boris Sinkovic, Ali K. Okyay, Necmi Biyikli
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 012406 (2024)
https://doi.org/10.1116/6.0002988
Published: January 2024
View article titled, Hollow-cathode plasma deposited vanadium oxide films: Metal precursor influence on growth and material properties
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Includes: Supplementary data
Journal Articles

Exploring Al2O3 blister evolution through cathodoluminescence and attenuated total reflectance infrared analyses

Carolina Bohórquez, Jorge L. Vazquez, Luis E. López, Jorge A. Jurado, David Domínguez, Oscar E. Contreras, Hugo J. Tiznado
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 012403 (2024)
https://doi.org/10.1116/6.0003177
Published: December 2023
View article titled, Exploring Al<sub>2</sub>O<sub>3</sub> blister evolution through cathodoluminescence and attenuated total reflectance infrared analyses
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