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Journal Articles

Impact of the DC intensity and electrode distance on pulsed-DC powder-pack boride layer growth kinetics

I. Campos-Silva, L. E. Castillo-Vela, I. Mejía-Caballero, J. L. Rosales-Lopez, M. Olivares-Luna, K. D. Chaparro-Pérez, F. P. Espino-Cortes, J. M. González-Carmona
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063115 (2023)
https://doi.org/10.1116/6.0003167
Published: November 2023
View article titled, Impact of the DC intensity and electrode distance on pulsed-DC powder-pack boride layer growth kinetics
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Journal Articles

Influence of nitrogen vacancies on the decomposition route and age hardening of wurtzite Ti1−xAlxNy thin films

J. Salamania, A. F. Farhadizadeh, K. M. Calamba Kwick, I. C. Schramm, T. W. Hsu, L. J. S. Johnson, L. Rogström, M. Odén
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063413 (2023)
https://doi.org/10.1116/6.0003074
Published: November 2023
View article titled, Influence of nitrogen vacancies on the decomposition route and age hardening of wurtzite Ti<sub>1−x</sub>Al<sub>x</sub>N<sub>y</sub> thin films
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Includes: Supplementary data
Journal Articles

Electron-enhanced atomic layer deposition of Ru thin films using Ru(DMBD)(CO)3 and effect of forming gas anneal

Michael A. Collings, Marcel Junige, Andrew S. Cavanagh, Victor Wang, Andrew C. Kummel, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062408 (2023)
https://doi.org/10.1116/6.0002938
Published: November 2023
View article titled, Electron-enhanced atomic layer deposition of Ru thin films using Ru(DMBD)(CO)<sub>3</sub> and effect of forming gas anneal
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Journal Articles

Evolution of β-Ga2O3 to γ-Ga2O3 solid-solution epitaxial films after high-temperature annealing

Kunyao Jiang, Jingyu Tang, Chengchao Xu, Kelly Xiao, Robert F. Davis, Lisa M. Porter
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062702 (2023)
https://doi.org/10.1116/6.0002962
Published: October 2023
View article titled, Evolution of <em>β</em>-Ga<sub>2</sub>O<sub>3</sub> to <em><em>γ</em></em>-Ga<sub>2</sub>O<sub>3</sub> solid-solution epitaxial films after high-temperature annealing
Open the PDF for Evolution of <em>β</em>-Ga<sub>2</sub>O<sub>3</sub> to <em><em>γ</em></em>-Ga<sub>2</sub>O<sub>3</sub> solid-solution epitaxial films after high-temperature annealing in another window
Includes: Supplementary data
Journal Articles

Plasma-enhanced atomic layer deposition of molybdenum carbide and carbonitride films using bis(isopropylcyclopentadienyl)molybdenum(IV) dihydride and an H2/N2/Ar plasma

Wangu Kang, Ji Sang Ahn, Jeong Hwan Han
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062401 (2023)
https://doi.org/10.1116/6.0002970
Published: September 2023
View article titled, Plasma-enhanced atomic layer deposition of molybdenum carbide and carbonitride films using bis(isopropylcyclopentadienyl)molybdenum(IV) dihydride and an H<sub>2</sub>/N<sub>2</sub>/Ar plasma
Open the PDF for Plasma-enhanced atomic layer deposition of molybdenum carbide and carbonitride films using bis(isopropylcyclopentadienyl)molybdenum(IV) dihydride and an H<sub>2</sub>/N<sub>2</sub>/Ar plasma in another window
Includes: Supplementary data
Journal Articles

Extending area selective deposition of ruthenium onto 3D SiO2-Si multilayer stacks

Kartik Sondhi, Rahul Sharangpani, Roshan Tirukkonda, Joyeeta Nag, Xing-Cai Guo, Michael A. Gribelyuk, Raghuveer S. Makala, Senaka Kanakamedala
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 050402 (2023)
https://doi.org/10.1116/6.0002860
Published: August 2023
View article titled, Extending area selective deposition of ruthenium onto 3D SiO<sub>2</sub>-Si multilayer stacks
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Includes: Supplementary data
Journal Articles

Enhanced structural and optical properties of semipolar ( 11 2 ¯ 2 ) AlGaN film with insertion of AlN/AlGaN superlattice

Xuguang Luo, Xiong Zhang, Ruiting Fang, Lin Chen, Shenyu Xu, Jia Cui, Zhiyi Lou, Yifeng Xu, Shuchang Wang, Guohua Hu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052705 (2023)
https://doi.org/10.1116/6.0002870
Published: July 2023
View article titled, Enhanced structural and optical properties of semipolar ( 11 2 ¯ 2 ) AlGaN film with insertion of AlN/AlGaN superlattice
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Journal Articles

Observable color change of Cu2O–Mo–Zr composite films based on rapid oxidation at room temperature and thin film interference behavior

Haoge Zhang, Pengyan Shi, Yuanjiang Lv, Haoliang Sun, Guangxin Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053408 (2023)
https://doi.org/10.1116/6.0002774
Published: July 2023
View article titled, Observable color change of Cu<sub>2</sub>O–Mo–Zr composite films based on rapid oxidation at room temperature and thin film interference behavior
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Includes: Supplementary data
Journal Articles

Room temperature magnetron sputtering and laser annealing of ultrathin amorphous sulfur-rich MoSx films

Spencer Gellerup, Corey L. Arnold, Christopher Muratore, Nicholas R. Glavin, Nigel D. Shepherd, Andrey A. Voevodin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053405 (2023)
https://doi.org/10.1116/6.0002544
Published: July 2023
View article titled, Room temperature magnetron sputtering and laser annealing of ultrathin amorphous sulfur-rich MoS<sub>x</sub> films
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Includes: Supplementary data
Journal Articles

Variation in thermal stability of Ge1−xSnx films for infrared device applications

Amanda N. Lemire, Kevin A. Grossklaus, Thomas E. Vandervelde
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052701 (2023)
https://doi.org/10.1116/6.0002680
Published: July 2023
View article titled, Variation in thermal stability of Ge<sub>1−x</sub>Sn<sub>x</sub> films for infrared device applications
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Includes: Supplementary data
Journal Articles

Plasma-enhanced atomic layer deposition of silicon nitride for front-end-of-line applications

Marco Lisker, Mamathamba Kalishettyhalli Mahadevaiah, Keerthi Dorai Swamy Reddy
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 042406 (2023)
https://doi.org/10.1116/6.0002424
Published: July 2023
View article titled, Plasma-enhanced atomic layer deposition of silicon nitride for front-end-of-line applications
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Journal Articles

Ge-ion implantation and activation in (100) β-Ga2O3 for ohmic contact improvement using pulsed rapid thermal annealing

Kornelius Tetzner, Andreas Thies, Palvan Seyidov, Ta-Shun Chou, Jana Rehm, Ina Ostermay, Zbigniew Galazka, Andreas Fiedler, Andreas Popp, Joachim Würfl, Oliver Hilt
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043102 (2023)
https://doi.org/10.1116/6.0002642
Published: May 2023
View article titled, Ge-ion implantation and activation in (100) β-Ga<sub>2</sub>O<sub>3</sub> for ohmic contact improvement using pulsed rapid thermal annealing
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Journal Articles

Effect of plasma nitriding substrate current density on the adhesion strength of in situ PVD TiN coatings

Xin Zhang, Xiu-bo Tian, Chun-zhi Gong, Xiang-li Liu, Jin Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033405 (2023)
https://doi.org/10.1116/6.0002353
Published: April 2023
View article titled, Effect of plasma nitriding substrate current density on the adhesion strength of <em>in situ</em> PVD TiN coatings
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Journal Articles

Low-temperature synthesis of crystalline vanadium oxide films using oxygen plasmas

Adnan Mohammad, Krishna D. Joshi, Dhan Rana, Saidjafarzoda Ilhom, Barrett Wells, Brian Willis, Boris Sinkovic, A. K. Okyay, Necmi Biyikli
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 032405 (2023)
https://doi.org/10.1116/6.0002383
Published: March 2023
View article titled, Low-temperature synthesis of crystalline vanadium oxide films using oxygen plasmas
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Includes: Supplementary data
Journal Articles

Effects of adventitious impurity adsorption on oxygen interstitial injection rates from submerged TiO2(110) and ZnO(0001) surfaces

Heonjae Jeong, Edmund G. Seebauer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033203 (2023)
https://doi.org/10.1116/6.0002467
Published: March 2023
View article titled, Effects of adventitious impurity adsorption on oxygen interstitial injection rates from submerged TiO<sub>2</sub>(110) and ZnO(0001) surfaces
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Includes: Supplementary data
Journal Articles

Effect of vacuum heat treatment on tribological properties of metal-doped CuS/MoS2 coating

Ming Cao, Lan Zhao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033102 (2023)
https://doi.org/10.1116/6.0002360
Published: March 2023
View article titled, Effect of vacuum heat treatment on tribological properties of metal-doped CuS/MoS<sub>2</sub> coating
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Journal Articles

Influence of γ'N and ɛ'N phases on the properties of AISI 304L after low-temperature plasma nitrocarburizing

Jeet Vijay Sah, Pravin Kumari Dwivedi, Subroto Mukherjee, Ghanshyam Jhala, Alphonsa Joseph
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033101 (2023)
https://doi.org/10.1116/6.0002346
Published: March 2023
View article titled, Influence of γ'<sub>N</sub> and ɛ'<sub>N</sub> phases on the properties of AISI 304L after low-temperature plasma nitrocarburizing
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Journal Articles

Conductive TiN thin films grown by plasma-enhanced atomic layer deposition: Effects of N-sources and thermal treatments

Clémence Badie, Héloïse Tissot, Beniamino Sciacca, Maïssa K. Barr, Julien Bachmann, Christophe Vallée, Gaël Gautier, Thomas Defforge, Vincent Astie, Jean-Manuel Decams, Mikhael Bechelany, Lionel Santinacci
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 032401 (2023)
https://doi.org/10.1116/6.0002288
Published: March 2023
View article titled, Conductive TiN thin films grown by plasma-enhanced atomic layer deposition: Effects of N-sources and thermal treatments
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Includes: Supplementary data
Journal Articles

Pulsed laser induced atomic layer etching of silicon

Matthew Eliceiri, Yoonsoo Rho, Runxuan Li, Costas P. Grigoropoulos
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 022602 (2023)
https://doi.org/10.1116/6.0002399
Published: February 2023
View article titled, Pulsed laser induced atomic layer etching of silicon
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Includes: Supplementary data
Journal Articles

Effect of annealing on the magnetic anisotropy of GaMnAsP layers with graded P concentration

Seul-Ki Bac, Sanghoon Lee, Xinyu Liu, Margaret Dobrowolska, Jacek K. Furdyna
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 022704 (2023)
https://doi.org/10.1116/6.0002316
Published: February 2023
View article titled, Effect of annealing on the magnetic anisotropy of GaMnAsP layers with graded P concentration
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