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Journal Articles

Oxidation behavior of TiB2–SiC nanocomposite coatings deposited by magnetron sputtering

Featured
Yuanxing Wu, Qizhong Li, Rong Tu, Takashi Goto
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063109 (2024)
https://doi.org/10.1116/6.0004075
Published: November 2024
View article titled, Oxidation behavior of TiB<sub>2</sub>–SiC nanocomposite coatings deposited by magnetron sputtering
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Journal Articles

Ti-Zr-Nb-(V) refractory alloy coatings deposited by high-power impulse magnetron sputtering: Structure, mechanical properties, oxidation resistance, and thermal stability

A. Fraile, D. Cavaleiro, A. Bondarev, S. C. Middleburgh, W. E. Lee, F. Fernandes
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063101 (2024)
https://doi.org/10.1116/6.0003864
Published: September 2024
View article titled, Ti-Zr-Nb-(V) refractory alloy coatings deposited by high-power impulse magnetron sputtering: Structure, mechanical properties, oxidation resistance, and thermal stability
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Journal Articles

Nitrogen-incorporated tetrahedral amorphous carbon optically transparent thin film electrode

Nina Baule, Lars Haubold, Thomas Schuelke
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053103 (2024)
https://doi.org/10.1116/6.0003786
Published: July 2024
View article titled, Nitrogen-incorporated tetrahedral amorphous carbon optically transparent thin film electrode
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Journal Articles

Enhancing laser-driven flyer velocity by optimizing of modulation period of Al/Ti reactive multilayer films

Weilong Gao, Ruizhi Zhang, Jin Wang, Zihao Huang, Zhiguo Li, Yajun Fu, Guoqiang Luo, Rong Tu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063414 (2023)
https://doi.org/10.1116/6.0003066
Published: November 2023
View article titled, Enhancing laser-driven flyer velocity by optimizing of modulation period of Al/Ti reactive multilayer films
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Journal Articles

Fabrication of antireflective coatings with self-cleaning function using Si–Ti modified hollow silicon mixed sol

Yufan Li, Yong Zheng, Yuze Du, Xi Zhang, Wangwang Wang, Jin Lv
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063411 (2023)
https://doi.org/10.1116/6.0003082
Published: November 2023
View article titled, Fabrication of antireflective coatings with self-cleaning function using Si–Ti modified hollow silicon mixed sol
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Journal Articles

Electrochromic properties of NiO films prepared by atomic layer deposition

Xi Su, Zexin Tu, Liwei Ji, Hao Wu, Hongxing Xu, Chang Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062407 (2023)
https://doi.org/10.1116/6.0003040
Published: October 2023
View article titled, Electrochromic properties of NiO films prepared by atomic layer deposition
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Journal Articles

Oxygen plasma treatment of TeO2—B2O3 (boro-tellurite) thin films

Uğur Demirkol, Çağrı Durmuş, Tamer Akan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063006 (2023)
https://doi.org/10.1116/6.0002879
Published: October 2023
View article titled, Oxygen plasma treatment of TeO<sub>2</sub>—B<sub>2</sub>O<sub>3</sub> (boro-tellurite) thin films
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Journal Articles

Reversible alteration of 3D printed polymer properties via infiltration of alumina by atomic layer deposition

Atilla C. Varga, Seán T. Barry
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 022403 (2023)
https://doi.org/10.1116/6.0002397
Published: February 2023
View article titled, Reversible alteration of 3D printed polymer properties via infiltration of alumina by atomic layer deposition
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Includes: Supplementary data
Journal Articles

Synthesis and characteristics of Sn-doped SiO2 via plasma-enhanced atomic layer deposition for self-aligned patterning

Suhyeon Park, Junyung An, Hyeongtag Jeon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 062401 (2022)
https://doi.org/10.1116/6.0001895
Published: September 2022
View article titled, Synthesis and characteristics of Sn-doped SiO<sub>2</sub> via plasma-enhanced atomic layer deposition for self-aligned patterning
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Journal Articles

Dependence of film structure on the film structure-independent equivalent film thickness in magnetron sputtering deposition of Ag thin films

Eiji Kusano
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 053405 (2022)
https://doi.org/10.1116/6.0001989
Published: September 2022
View article titled, Dependence of film structure on the film structure-independent equivalent film thickness in magnetron sputtering deposition of Ag thin films
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Journal Articles

Relationship between local coordinates and thermal conductivity in amorphous carbon

Emi Minamitani, Takuma Shiga, Makoto Kashiwagi, Ippei Obayashi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033408 (2022)
https://doi.org/10.1116/6.0001744
Published: April 2022
View article titled, Relationship between local coordinates and thermal conductivity in amorphous carbon
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Journal Articles

Origin of enhanced thermal atomic layer etching of amorphous HfO2

Editor’s Pick
Rita Mullins, José Julio Gutiérrez Moreno, Michael Nolan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 022604 (2022)
https://doi.org/10.1116/6.0001614
Published: February 2022
View article titled, Origin of enhanced thermal atomic layer etching of amorphous HfO<sub>2</sub>
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Includes: Supplementary data
Journal Articles

Modified 3D-printed architectures: Effects of coating by alumina on acrylonitrile butadiene styrene

Atilla C. Varga, Seán T. Barry
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 022407 (2022)
https://doi.org/10.1116/6.0001595
Published: February 2022
View article titled, Modified 3D-printed architectures: Effects of coating by alumina on acrylonitrile butadiene styrene
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Includes: Supplementary data
Journal Articles

Research on the preparation and performance of anti-dust self-cleaning film on Mars dusty environment

Minglei Yang, Guangyu He, Jiao Chen, Zhaolu Zhang, Guanjun Yang, Zezhou Sun
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 013408 (2022)
https://doi.org/10.1116/6.0001346
Published: December 2021
View article titled, Research on the preparation and performance of anti-dust self-cleaning film on Mars dusty environment
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Journal Articles

Transparent conductive properties of TiON thin films

Housei Akazawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 013407 (2022)
https://doi.org/10.1116/6.0001434
Published: December 2021
View article titled, Transparent conductive properties of TiON thin films
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Journal Articles

Influence of chemical vapor precursor flow rate on the structure and thermal stability of phase-modulated VSiCN/Ag coatings

Forest C. Thompson, Frank M. Kustas, Kent E. Coulter, Grant A. Crawford
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063409 (2021)
https://doi.org/10.1116/6.0001302
Published: October 2021
View article titled, Influence of chemical vapor precursor flow rate on the structure and thermal stability of phase-modulated VSiCN/Ag coatings
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Journal Articles

Stoichiometry tuning of TaN films through ion treatment: Molecular dynamics study

Jaipal Methary, Rajesh Sathiyanarayanan, Rui Li, Phillip J. Stout
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 062601 (2021)
https://doi.org/10.1116/6.0001251
Published: September 2021
View article titled, Stoichiometry tuning of TaN films through ion treatment: Molecular dynamics study
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Journal Articles

Impact of ion species on ion beam sputtered Ta2O5 layer quality parameters and on corresponding process productivity: A preinvestigation for large-area coatings

Wjatscheslaw Sakiew, Philippe Schwerdtner, Marco Jupé, Andreas Pflug, Detlev Ristau
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063402 (2021)
https://doi.org/10.1116/6.0001224
Published: September 2021
View article titled, Impact of ion species on ion beam sputtered Ta<sub>2</sub>O<sub>5</sub> layer quality parameters and on corresponding process productivity: A preinvestigation for large-area coatings
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Journal Articles

Impact of carrier wafer on etch rate, selectivity, morphology, and passivation during GaN plasma etching

Clint D. Frye, Scott B. Donald, Catherine Reinhardt, Lars F. Voss, Sara E. Harrison
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 053002 (2021)
https://doi.org/10.1116/6.0001123
Published: August 2021
View article titled, Impact of carrier wafer on etch rate, selectivity, morphology, and passivation during GaN plasma etching
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Journal Articles

Titanium monoxide and titanium dioxide thin film formation by magnetron sputtering and its thermodynamic model

Sergey V. Bulyarskiy, Daria A. Koiva, Vladislav S. Belov, Elena V. Zenova, Grigory А. Rudakov, Georgy G. Gusarov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 053403 (2021)
https://doi.org/10.1116/6.0001065
Published: July 2021
View article titled, Titanium monoxide and titanium dioxide thin film formation by magnetron sputtering and its thermodynamic model
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