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Journal Articles
Xin Li, Zixiang Zhou, Chenglei Wang, Haiqing Qin, Jijie Yang, Weijie Liu, Mulin Liang, Chong Liu, Hong Tan, Zhenjun Zhang
J. Vac. Sci. Technol. A 41, 063105 (2023)
Published: September 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 063103 (2023)
Published: September 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 063102 (2023)
Published: September 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 053109 (2023)
Published: August 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 053108 (2023)
Published: August 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 053107 (2023)
Published: July 2023
Journal Articles
Yinghe Ma, Jinhui Mei, Junxin Ouyang, Peng Wu, Sai Wang, Jianguo Yang, Yanming He, Wenjian Zheng, Huaxin Li, Chuanyang Lu, Sendong Ren, Jianping Xu, Paul K. Chu
J. Vac. Sci. Technol. A 41, 053101 (2023)
Published: July 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 043202 (2023)
Published: May 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 033107 (2023)
Published: April 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 033101 (2023)
Published: March 2023
Journal Articles
Viktor Šroba, Tomáš Fiantok, Martin Truchlý, Tomáš Roch, Branislav Grančič, Katarína Viskupová, Leonid Satrapinskyy, Peter Švec, Jr., Štefan Nagy, Vitalii Izai, Peter Kúš, Marián Mikula
J. Vac. Sci. Technol. A 41, 023410 (2023)
Published: March 2023
Journal Articles
Yifei Li, Kate Reidy, Aubrey Penn, Seng Huat Lee, Baoming Wang, Kevin Ye, Zhiqiang Mao, Frances M. Ross, R. Jaramillo
J. Vac. Sci. Technol. A 41, 023405 (2023)
Published: February 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 022203 (2023)
Published: February 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 023402 (2023)
Published: January 2023
Journal Articles
J. Vac. Sci. Technol. A 40, 033405 (2022)
Published: April 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 033201 (2022)
Published: March 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 022201 (2022)
Published: February 2022
Journal Articles
Jeyanthinath Mayandi, Matthias Schrade, Ponniah Vajeeston, Marit Stange, Anna M. Lind, Martin F. Sunding, Jonas Deuermeier, Elvira Fortunato, Ole M. Løvvik, Alexander G. Ulyashin, Spyros Diplas, Patricia A. Carvalho, Terje G. Finstad
J. Vac. Sci. Technol. A 40, 023402 (2022)
Published: January 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 063212 (2021)
Published: October 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 060402 (2021)
Published: September 2021
Includes: Supplementary data
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