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Journal Articles
Aleksandr V. Kobyakov, Gennadiy S. Patrin, Vasiliy I. Yushkov, Nikolay N. Kosyrev, Vasiliy A. Komarov, Yevgeny V. Tomashevich, Roman Yu. Rudenko
J. Vac. Sci. Technol. A 42, 053413 (2024)
Published: September 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 012702 (2024)
Published: January 2024
Journal Articles
J. Vac. Sci. Technol. A 40, 043206 (2022)
Published: June 2022
Journal Articles
J. Vac. Sci. Technol. A 35, 05C101 (2017)
Published: August 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 04D101 (2017)
Published: March 2017
Journal Articles
J. Vac. Sci. Technol. A 34, 021604 (2016)
Published: February 2016
Journal Articles
J. Vac. Sci. Technol. A 31, 041507 (2013)
Published: June 2013
Journal Articles
J. Vac. Sci. Technol. A 31, 013201 (2013)
Published: November 2012
Journal Articles
J. Vac. Sci. Technol. A 30, 020601 (2012)
Published: January 2012
Journal Articles
J. Vac. Sci. Technol. A 28, 1349–1355 (2010)
Published: October 2010
Journal Articles
J. Vac. Sci. Technol. A 28, L9–L13 (2010)
Published: August 2010
Journal Articles
J. Vac. Sci. Technol. A 27, 1217–1226 (2009)
Published: August 2009
Journal Articles
J. Vac. Sci. Technol. A 27, 485–491 (2009)
Published: April 2009
Journal Articles
J. Vac. Sci. Technol. A 26, 735–738 (2008)
Published: June 2008
Journal Articles
J. Vac. Sci. Technol. A 25, 1475–1479 (2007)
Published: August 2007
Journal Articles
J. Vac. Sci. Technol. A 24, 1795–1801 (2006)
Published: August 2006
Journal Articles
J. Vac. Sci. Technol. A 24, 1652–1654 (2006)
Published: June 2006
Journal Articles
J. Vac. Sci. Technol. A 24, 1648–1651 (2006)
Published: June 2006
Journal Articles
J. Vac. Sci. Technol. A 24, 1560–1567 (2006)
Published: June 2006
Journal Articles
J. Vac. Sci. Technol. A 23, 796–803 (2005)
Published: June 2005
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