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Journal Articles

Extending atomic layer deposition for use in next-generation piezoMEMS: Review and perspective

Nicholas A. Strnad, Daniel M. Potrepka, Brendan M. Hanrahan, Glen R. Fox, Ronald G. Polcawich, Jeffrey S. Pulskamp, Ryan R. Knight, Ryan Q. Rudy
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 050801 (2023)
https://doi.org/10.1116/6.0002431
Published: July 2023
View article titled, Extending atomic layer deposition for use in next-generation piezoMEMS: Review and perspective
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Journal Articles

Sn-modified BaTiO3 thin film with enhanced polarization

William Nunn, Abinash Kumar, Rui Zu, Bailey Nebgen, Shukai Yu, Anusha Kamath Manjeshwar, Venkatraman Gopalan, James M. LeBeau, Richard D. James, Bharat Jalan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 022701 (2023)
https://doi.org/10.1116/6.0002208
Published: January 2023
View article titled, Sn-modified BaTiO<sub>3</sub> thin film with enhanced polarization
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Includes: Supplementary data
Journal Articles

Energy storage performance in lead-free antiferroelectric 0.92(Bi0.54Na0.46)TiO3-0.08BaTiO3 ultrathin films by pulsed laser deposition

José de Jesús Serralta-Macías, Rodolfo Antonio Rodriguez-Davila, Manuel Quevedo-Lopez, Daniel Olguín, Santos Jesús Castillo, Chadwin D. Young, José Martin Yáñez-Limón
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033417 (2022)
https://doi.org/10.1116/6.0001755
Published: May 2022
View article titled, Energy storage performance in lead-free antiferroelectric 0.92(Bi<sub>0.54</sub>Na<sub>0.46</sub>)TiO<sub>3</sub>-0.08BaTiO<sub>3</sub> ultrathin films by pulsed laser deposition
Open the PDF for Energy storage performance in lead-free antiferroelectric 0.92(Bi<sub>0.54</sub>Na<sub>0.46</sub>)TiO<sub>3</sub>-0.08BaTiO<sub>3</sub> ultrathin films by pulsed laser deposition in another window
Journal Articles

Optical dielectric properties of HfO2-based films

Hongyi Dou, Nives Strkalj, Yizhi Zhang, Judith L. MacManus-Driscoll, Quanxi Jia, Haiyan Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033412 (2022)
https://doi.org/10.1116/6.0001651
Published: April 2022
View article titled, Optical dielectric properties of HfO<sub>2</sub>-based films
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Journal Articles

Electronic structure and anion engineering for perovskite oxysulfide BaTi(O,S)3

Jingjing Liu, Sa Zhang, Ming Jiang, Haiyan Xiao, Shan Feng, Liang Qiao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 012801 (2022)
https://doi.org/10.1116/6.0001471
Published: December 2021
View article titled, Electronic structure and anion engineering for perovskite oxysulfide BaTi(O,S)<sub>3</sub>
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Journal Articles

Hard x-ray photoelectron spectroscopy of tunable oxide interfaces

Martina Müller, Patrick Lömker, Paul Rosenberger, Mai Hussein Hamed, David N. Mueller, Ronja A. Heinen, Thomas Szyjka, Lutz Baumgarten
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 013215 (2022)
https://doi.org/10.1116/6.0001491
Published: December 2021
View article titled, Hard x-ray photoelectron spectroscopy of tunable oxide interfaces
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Journal Articles

Polarization fluctuation of BaTiO3 at unit cell level mapped by four-dimensional scanning transmission electron microscopy

Tim B. Eldred, Jacob G. Smith, Wenpei Gao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 013205 (2022)
https://doi.org/10.1116/6.0001451
Published: December 2021
View article titled, Polarization fluctuation of BaTiO<sub>3</sub> at unit cell level mapped by four-dimensional scanning transmission electron microscopy
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Includes: Supplementary data
Journal Articles

Many routes to ferroelectric HfO2: A review of current deposition methods

Hanan Alexandra Hsain, Younghwan Lee, Monica Materano, Terence Mittmann, Alexis Payne, Thomas Mikolajick, Uwe Schroeder, Gregory N. Parsons, Jacob L. Jones
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 010803 (2022)
https://doi.org/10.1116/6.0001317
Published: December 2021
View article titled, Many routes to ferroelectric HfO<sub>2</sub>: A review of current deposition methods
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Journal Articles

High resolution depth profiling using near-total-reflection hard x-ray photoelectron spectroscopy

Julien E. Rault, Cheng-Tai Kuo, Henrique P. Martins, Giuseppina Conti, Slavomír Nemšák
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 060802 (2021)
https://doi.org/10.1116/6.0001289
Published: October 2021
View article titled, High resolution depth profiling using near-total-reflection hard x-ray photoelectron spectroscopy
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Journal Articles

Hybrid molecular beam epitaxy growth of BaTiO3 films

William Nunn, Sara Sandlass, Maike Wegner, Ryan Haislmaier, Abinash Kumar, Malleswararao Tangi, James LeBeau, Eckhard Quandt, Richard D. James, Bharat Jalan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 040404 (2021)
https://doi.org/10.1116/6.0001140
Published: June 2021
View article titled, Hybrid molecular beam epitaxy growth of BaTiO<sub>3</sub> films
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Includes: Supplementary data
Journal Articles

{100}-textured piezoelectric Pb(Zr,Ti)O3 films: Influence of Pb content in the PbxTiO3 seed layer on the electrical properties of chemical solution deposited Pb(Zr,Ti)O3

Sushma Kotru, Vaishali Batra, Jian Zhong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 043405 (2021)
https://doi.org/10.1116/6.0000955
Published: May 2021
View article titled, {100}-textured piezoelectric Pb(Zr,Ti)O<sub>3</sub> films: Influence of Pb content in the Pb<sub>x</sub>TiO<sub>3</sub> seed layer on the electrical properties of chemical solution deposited Pb(Zr,Ti)O<sub>3</sub>
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Journal Articles

Epitaxial integration of BaTiO3 on Si for electro-optic applications

Wei Guo, Agham B. Posadas, Alexander A. Demkov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 030804 (2021)
https://doi.org/10.1116/6.0000923
Published: April 2021
View article titled, Epitaxial integration of BaTiO<sub>3</sub> on Si for electro-optic applications
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Journal Articles

Hf1−xZrxO2 and HfO2/ZrO2 gate dielectrics with extremely low density of interfacial defects using low temperature atomic layer deposition on GaN and InP

Kaveh Ahadi, Ken Cadien
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 032407 (2021)
https://doi.org/10.1116/6.0000914
Published: March 2021
View article titled, Hf<sub>1−x</sub>Zr<sub>x</sub>O<sub>2</sub> and HfO<sub>2</sub>/ZrO<sub>2</sub> gate dielectrics with extremely low density of interfacial defects using low temperature atomic layer deposition on GaN and InP
Open the PDF for Hf<sub>1−x</sub>Zr<sub>x</sub>O<sub>2</sub> and HfO<sub>2</sub>/ZrO<sub>2</sub> gate dielectrics with extremely low density of interfacial defects using low temperature atomic layer deposition on GaN and InP in another window
Journal Articles

tert-butoxides as precursors for atomic layer deposition of alkali metal containing thin films

Henrik H. Sønsteby, Jon E. Bratvold, Veronica A.-L. K. Killi, Devika Choudhury, Jeffrey W. Elam, Helmer Fjellvåg, Ola Nilsen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 060804 (2020)
https://doi.org/10.1116/6.0000589
Published: October 2020
View article titled, <em>tert</em>-butoxides as precursors for atomic layer deposition of alkali metal containing thin films
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Includes: Supplementary data
Journal Articles

Epitaxial integration of ferroelectric and conductive perovskites on silicon

Edward L. Lin, Agham B. Posadas, Lu Zheng, Hsin Wei Wu, Pei-Yu Chen, Brennan M. Coffey, Keji Lai, Alexander A. Demkov, Davis J. Smith, John G. Ekerdt
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 022403 (2020)
https://doi.org/10.1116/1.5134077
Published: January 2020
View article titled, Epitaxial integration of ferroelectric and conductive perovskites on silicon
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Journal Articles

HfxZr1 − xO2 thin films for semiconductor applications: An Hf- and Zr-ALD precursor comparison

Monica Materano, Claudia Richter, Thomas Mikolajick, Uwe Schroeder
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 022402 (2020)
https://doi.org/10.1116/1.5134135
Published: January 2020
View article titled, Hf<sub>x</sub>Zr<sub>1 − x</sub>O<sub>2</sub> thin films for semiconductor applications: An Hf- and Zr-ALD precursor comparison
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Journal Articles

Investigation of phases and chemical states of tin titanate films grown by atomic layer deposition

Hong Keun Chung, Jung Joon Pyeon, In-Hwan Baek, Ga-Yeon Lee, Hansol Lee, Sung Ok Won, Jeong Hwan Han, Taek-Mo Chung, Tae Joo Park, Seong Keun Kim
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 012404 (2020)
https://doi.org/10.1116/1.5134136
Published: December 2019
View article titled, Investigation of phases and chemical states of tin titanate films grown by atomic layer deposition
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Journal Articles

Characterization of VO2/ferroelectric thin film heterostructures deposited on various complex oxide single crystal substrates

Adrian Petraru, Ravi Droopad, Hermann Kohlstedt
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021514 (2019)
https://doi.org/10.1116/1.5082288
Published: February 2019
View article titled, Characterization of VO<sub>2</sub>/ferroelectric thin film heterostructures deposited on various complex oxide single crystal substrates
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Journal Articles

Texture and phase variation of ALD PbTiO3 films crystallized by rapid thermal anneal

Nicholas A. Strnad, Daniel M. Potrepka, Jeffrey S. Pulskamp, Yang Liu, Jacob L. Jones, Raymond J. Phaneuf, Ronald G. Polcawich
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 020917 (2019)
https://doi.org/10.1116/1.5080226
Published: February 2019
View article titled, Texture and phase variation of ALD PbTiO<sub>3</sub> films crystallized by rapid thermal anneal
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Journal Articles

Epitaxial growth and strain relaxation studies of BaTiO3 and BaTiO3/SrTiO3 superlattices grown by MBE on SrTiO3-buffered Si(001) substrate

Clement Merckling, Maxim Korytov, Umberto Celano, Min-Hsiang Mark Hsu, Sabine M. Neumayer, Stephen Jesse, Stefan de Gendt
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021510 (2019)
https://doi.org/10.1116/1.5082237
Published: January 2019
View article titled, Epitaxial growth and strain relaxation studies of BaTiO<sub>3</sub> and BaTiO<sub>3</sub>/SrTiO<sub>3</sub> superlattices grown by MBE on SrTiO<sub>3</sub>-buffered Si(001) substrate
Open the PDF for Epitaxial growth and strain relaxation studies of BaTiO<sub>3</sub> and BaTiO<sub>3</sub>/SrTiO<sub>3</sub> superlattices grown by MBE on SrTiO<sub>3</sub>-buffered Si(001) substrate in another window