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Journal Articles

Best practices for performing quantitative TOF-SIMS analyses

Alan M. Spool, Lorie Finney

J. Vac. Sci. Technol. A 42, 043204 (2024)

https://doi.org/10.1116/6.0003660

Published: July 2024

View articletitled, Best practices for performing quantitative TOF-SIMS analyses

Journal Articles

Self-joule heating assisted field emission following the Child–Langmuir law

Yoichiro Neo, Rikuto Oda, Jonghyun Moon

J. Vac. Sci. Technol. A 41, 063104 (2023)

https://doi.org/10.1116/5.0159964

Published: September 2023

View articletitled, Self-joule heating assisted field emission following the Child–Langmuir law

Journal Articles

Interaction between water cluster ions and mica surface

Hiromichi Ryuto, Yuki Ohmura, Minoru Nakagawa, Mitsuaki Takeuchi, Gikan H. Takaoka

J. Vac. Sci. Technol. A 32, 02B109 (2014)

https://doi.org/10.1116/1.4849323

Published: December 2013

View articletitled, Interaction between water cluster ions and mica surface

Journal Articles

Optimization of closed ion source for a high-sensitivity residual gas analyzer

Cheolsu Han, Jong Rok Ahn, Sang Jung Ahn, Chang Joon Park

J. Vac. Sci. Technol. A 32, 021603 (2014)

https://doi.org/10.1116/1.4835635

Published: December 2013

View articletitled, Optimization of closed ion source for a high-sensitivity residual gas analyzer

Journal Articles

200-mm-diameter neutral beam source based on inductively coupled plasma etcher and silicon etching

Tomohiro Kubota, Osamu Nukaga, Shinji Ueki, Masakazu Sugiyama, Yoshimasa Inamoto, Hiroto Ohtake, Seiji Samukawa

J. Vac. Sci. Technol. A 28, 1169–1174 (2010)

https://doi.org/10.1116/1.3474977

Published: September 2010

View articletitled, 200-mm-diameter neutral beam source based on inductively coupled plasma etcher and silicon etching

Journal Articles

Methods for measurement of electron emission yield under low energy electron-irradiation by collector method and Kelvin probe method

Thomas Tondu, Mohamed Belhaj, Virginie Inguimbert

J. Vac. Sci. Technol. A 28, 1122–1125 (2010)

https://doi.org/10.1116/1.3462039

Published: September 2010

View articletitled, Methods for measurement of electron emission yield under low energy electron-irradiation by collector method and Kelvin probe method

Journal Articles

In situ ultrahigh vacuum residual gas analyzer “calibration”

O. B. Malyshev, K. J. Middleman

J. Vac. Sci. Technol. A 26, 1474–1479 (2008)

https://doi.org/10.1116/1.2990856

Published: October 2008

View articletitled, In situ ultrahigh vacuum residual gas analyzer “calibration”

Journal Articles

Study of a micro chamber quadrupole mass spectrometer

Jinchan Wang, Xiaobing Zhang, Fuming Mao, Mei Xiao, Yunkang Cui, Daniel den Engelsen, Wei Lei

J. Vac. Sci. Technol. A 26, 239–243 (2008)

https://doi.org/10.1116/1.2827512

Published: January 2008

View articletitled, Study of a micro chamber quadrupole mass spectrometer

Journal Articles

Sensitivity factor of the axial-symmetric transmission gauge: Deviation and long-term variation

N. Takahashi, Y. Tuzi, I. Arakawa

J. Vac. Sci. Technol. A 25, 1240–1245 (2007)

https://doi.org/10.1116/1.2715956

Published: July 2007

View articletitled, Sensitivity factor of the axial-symmetric transmission gauge: Deviation and long-term variation

Journal Articles

Recommended practice for process sampling for partial pressure analysis

James E. Blessing, Robert E. Ellefson, Bruce A. Raby, Gerardo A. Brucker, Robert K. Waits

J. Vac. Sci. Technol. A 25, 167–186 (2007)

https://doi.org/10.1116/1.2364001

Published: January 2007

View articletitled, Recommended practice for process sampling for partial pressure analysis

Journal Articles

Characterization of neutral beam source based on pulsed inductively coupled discharge: Time evolution of ion fluxes entering neutralizer

Sergey N. Abolmasov, Takuya Ozaki, Seiji Samukawa

J. Vac. Sci. Technol. A 25, 134–140 (2007)

https://doi.org/10.1116/1.2402154

Published: January 2007

View articletitled, Characterization of neutral beam source based on pulsed inductively coupled discharge: Time evolution of ion fluxes entering neutralizer

Journal Articles

Axial-symmetric transmission gauge: Extension of its pressure measuring range and reduction of the electron stimulated desorption ion effect in ultrahigh vacuum

N. Takahashi, J. Yuyama, Y. Tuzi, H. Akimichi, I. Arakawa

J. Vac. Sci. Technol. A 23, 554–558 (2005)

https://doi.org/10.1116/1.1901668

Published: April 2005

View articletitled, Axial-symmetric transmission gauge: Extension of its pressure measuring range and reduction of the electron stimulated desorption ion effect in ultrahigh vacuum

Journal Articles

Faraday cup detector array with electronic multiplexing for multichannel mass spectrometry

A. A. Scheidemann, R. B. Darling, F. J. Schumacher, A. Isakharov

J. Vac. Sci. Technol. A 20, 597–604 (2002)

https://doi.org/10.1116/1.1458947

Published: May 2002

View articletitled, Faraday cup detector array with electronic multiplexing for multichannel mass spectrometry

Journal Articles

Charging of dust particles on surfaces

Zoltán Sternovsky, Mihály Horányi, Scott Robertson

J. Vac. Sci. Technol. A 19, 2533–2541 (2001)

https://doi.org/10.1116/1.1392398

Published: September 2001

View articletitled, Charging of dust particles on surfaces

Journal Articles

Characteristics of a mesh-bias-controlled electron cyclotron resonance plasma for the growth of gallium nitride epitaxial films

K. Yasui, K. Iizuka, T. Akahane

J. Vac. Sci. Technol. A 16, 369–374 (1998)

https://doi.org/10.1116/1.581007

Published: January 1998

View articletitled, Characteristics of a mesh-bias-controlled electron cyclotron resonance plasma for the growth of gallium nitride epitaxial films

Journal Articles

Filtered saddle field fast atom beam deposition of diamondlike carbon films

D. Sarangi, O. S. Panwar, Sushil Kumar, P. N. Dixit, R. Bhattacharyya

J. Vac. Sci. Technol. A 16, 203–206 (1998)

https://doi.org/10.1116/1.580971

Published: January 1998

View articletitled, Filtered saddle field fast atom beam deposition of diamondlike carbon films

Journal Articles

Hydrogen atom detection by H⁻ conversion

E. C. Samano, W. E. Carr

J. Vac. Sci. Technol. A 11, 2700–2706 (1993)

https://doi.org/10.1116/1.578629

Published: September 1993

View articletitled, Hydrogen atom detection by H − conversion

Journal Articles

Surface damage threshold of Si and SiO₂ in electron‐cyclotron‐resonance plasmas

Young H. Lee

J. Vac. Sci. Technol. A 10, 1318–1324 (1992)

https://doi.org/10.1116/1.578246

Published: July 1992

View articletitled, Surface damage threshold of Si and SiO2 in electron‐cyclotron‐resonance plasmas

Journal Articles

The effect of ion energy flux on the properties of hydrogenated amorphous carbon films

G. J. Vandentop, M. Kawasaki, K. Kobayashi, G. A. Somorjai

J. Vac. Sci. Technol. A 9, 1157–1161 (1991)

https://doi.org/10.1116/1.577594

Published: May 1991

View articletitled, The effect of ion energy flux on the properties of hydrogenated amorphous carbon films

Journal Articles

Techniques for measuring mass spectrometer performance parameters

James A. Basford

J. Vac. Sci. Technol. A 9, 1991–1995 (1991)

https://doi.org/10.1116/1.577441

Published: May 1991

View articletitled, Techniques for measuring mass spectrometer performance parameters

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Best practices for performing quantitative TOF-SIMS analyses

Self-joule heating assisted field emission following the Child–Langmuir law

Interaction between water cluster ions and mica surface

Optimization of closed ion source for a high-sensitivity residual gas analyzer

200-mm-diameter neutral beam source based on inductively coupled plasma etcher and silicon etching

Methods for measurement of electron emission yield under low energy electron-irradiation by collector method and Kelvin probe method

In situ ultrahigh vacuum residual gas analyzer “calibration”

Study of a micro chamber quadrupole mass spectrometer

Sensitivity factor of the axial-symmetric transmission gauge: Deviation and long-term variation

Recommended practice for process sampling for partial pressure analysis

Characterization of neutral beam source based on pulsed inductively coupled discharge: Time evolution of ion fluxes entering neutralizer

Axial-symmetric transmission gauge: Extension of its pressure measuring range and reduction of the electron stimulated desorption ion effect in ultrahigh vacuum

Faraday cup detector array with electronic multiplexing for multichannel mass spectrometry

Charging of dust particles on surfaces

Characteristics of a mesh-bias-controlled electron cyclotron resonance plasma for the growth of gallium nitride epitaxial films

Filtered saddle field fast atom beam deposition of diamondlike carbon films

Hydrogen atom detection by H⁻ conversion

Surface damage threshold of Si and SiO₂ in electron‐cyclotron‐resonance plasmas

The effect of ion energy flux on the properties of hydrogenated amorphous carbon films

Techniques for measuring mass spectrometer performance parameters

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