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Journal Articles

Nonlinear decomposition of gallium x-ray induced Auger transitions: A new path to quantify gallium-based III–V materials

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Kirène Gaffar, Solène Béchu, Romain Jouanneaud, Guillaume Monier, Christine Robert-Goumet, Arnaud Etcheberry, Muriel Bouttemy
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043205 (2025)
https://doi.org/10.1116/6.0004551
Published: June 2025
View articletitled, Nonlinear decomposition of gallium x-ray induced Auger transitions: A new path to quantify gallium-based III–V materials
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Journal Articles

Substrate preparation methods for improved synthesis of Bi2Se3 films grown on sapphire by molecular beam epitaxy

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R. Trice, M. Yu, A. Richardella, M. Hilse, S. Law
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033407 (2025)
https://doi.org/10.1116/6.0004429
Published: April 2025
View articletitled, Substrate preparation methods for improved synthesis of Bi2Se3 films grown on sapphire by molecular beam epitaxy
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Journal Articles

Layer-dependent optical properties of PtSe2 determined from a single film

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Owen Peterson, Hatim Saeed, Jackson Niedel, Ke Wang, Qihua Zhang, Stephanie Law, Maria Hilse, Frank Peiris
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032201 (2025)
https://doi.org/10.1116/6.0004406
Published: April 2025
View articletitled, Layer-dependent optical properties of PtSe2 determined from a single film
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Journal Articles

Proton irradiation effect on InAs/GaAs quantum dot solar cells

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Chunxue Ji, Guiqiang Yang, Yidi Bao, Xiaoling Chen, Bo Wei, Wen Liu, Xiaodong Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032801 (2025)
https://doi.org/10.1116/6.0004409
Published: April 2025
View articletitled, Proton irradiation effect on InAs/GaAs quantum dot solar cells
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Journal Articles

Growth of InBi on InSb(100) via molecular beam epitaxy

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Molly McDonough, Yuxi Zhang, Nasim Alem, Stephanie Law
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033406 (2025)
https://doi.org/10.1116/6.0004418
Published: April 2025
View articletitled, Growth of InBi on InSb(100) via molecular beam epitaxy
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Journal Articles

Growth regimes of (0001) AlN by ammonia molecular beam epitaxy

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Ashley E. Wissel-Garcia, Feng Wu, James S. Speck
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032706 (2025)
https://doi.org/10.1116/6.0004399
Published: April 2025
View articletitled, Growth regimes of (0001) AlN by ammonia molecular beam epitaxy
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Journal Articles

In situ control of GaN growth rate in nitrogen-limited regime

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M. Canciani, S. Vichi, O. Koplak, S. Bietti, S. Sanguinetti
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032704 (2025)
https://doi.org/10.1116/6.0004437
Published: April 2025
View articletitled, In situ control of GaN growth rate in nitrogen-limited regime
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Journal Articles

Molecular beam epitaxy of boron arsenide layers

Open Access
Tin S. Cheng, Jonathan Bradford, Leo Norman, Xiaoyang Ji, Arpit Nandi, Gerardo T. Martinez, Stuart Robertson, Paul R. Edwards, James W. Pomeroy, David Cherns, Christopher J. Mellor, Robert W. Martin, Peter H. Beton, Martin Kuball, Sergei V. Novikov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032705 (2025)
https://doi.org/10.1116/6.0004383
Published: April 2025
View articletitled, Molecular beam epitaxy of boron arsenide layers
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Journal Articles

Optimizing GaAs/AlGaAs growth on GaAs (111)B for enhanced nonlinear efficiency in quantum optical metasurfaces

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T. Blaikie, M. C. Tam, S. Stich, M. Belkin, Z. R. Wasilewski
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032703 (2025)
https://doi.org/10.1116/6.0004450
Published: April 2025
View articletitled, Optimizing GaAs/AlGaAs growth on GaAs (111)B for enhanced nonlinear efficiency in quantum optical metasurfaces
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Journal Articles

Machine-learning-enabled on-the-fly analysis of RHEED patterns during thin film deposition by molecular beam epitaxy

Editor’s PickOpen Access
Tiffany C. Kaspar, Sarah Akers, Henry W. Sprueill, Arman H. Ter-Petrosyan, Jenna A. Bilbrey, Derek Hopkins, Ajay Harilal, Jijo Christudasjustus, Patrick Gemperline, Ryan B. Comes
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032702 (2025)
https://doi.org/10.1116/6.0004493
Published: March 2025
View articletitled, Machine-learning-enabled on-the-fly analysis of RHEED patterns during thin film deposition by molecular beam epitaxy
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Journal Articles

Improvement of data analytics techniques in reflection high-energy electron diffraction to enable machine learning

Editor’s PickAvailable to Purchase
Patrick T. Gemperline, Rajendra Paudel, Rama K. Vasudevan, Ryan B. Comes
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032701 (2025)
https://doi.org/10.1116/6.0004400
Published: March 2025
View articletitled, Improvement of data analytics techniques in reflection high-energy electron diffraction to enable machine learning
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Journal Articles

Structural, electrical, and thermal characterization of homoepitaxial close-injection showerhead metalorganic chemical vapor deposition β-Ga2O3 enhancement-mode recessed-gate MOSFETs

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Hannah N. Masten, Gustavo Armando Alvarez, Corey Halverson, Joyce Christiansen-Salameh, Eugene Y. Kwon, Michael Liao, James Spencer Lundh, Audrey Rose Gutierrez, Fikadu Alema, Andrei Osinsky, Alan G. Jacobs, Mark S. Goorsky, Marc H. Weber, Zhiting Tian, Karl D. Hobart, Marko J. Tadjer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022703 (2025)
https://doi.org/10.1116/6.0004176
Published: February 2025
View articletitled, Structural, electrical, and thermal characterization of homoepitaxial close-injection showerhead metalorganic chemical vapor deposition β-Ga2O3 enhancement-mode recessed-gate MOSFETs
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Journal Articles

Enhancing the nucleation in atomic layer deposition: A study on vanadium sulfide and oxide layers

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Zsofia Baji, Zsolt Fogarassy, Orsolya Hakkel, Zoltán Szabó
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022408 (2025)
https://doi.org/10.1116/6.0004247
Published: February 2025
View articletitled, Enhancing the nucleation in atomic layer deposition: A study on vanadium sulfide and oxide layers
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Journal Articles

Revisiting the assignment of atomic charges in metal oxides based on core-level x-ray photoelectron spectra: The case of Ti in SrTiO3(001)

FeaturedOpen Access
Scott A. Chambers, Peter V. Sushko, Paul S. Bagus
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 023203 (2025)
https://doi.org/10.1116/6.0004210
Published: February 2025
View articletitled, Revisiting the assignment of atomic charges in metal oxides based on core-level x-ray photoelectron spectra: The case of Ti in SrTiO3(001)
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Journal Articles

Challenges and insights in growing epitaxial FeSn thin films on GaAs(111) substrate using molecular beam epitaxy

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P. Chatterjee, M. Nord, J. He, D. Meier, C. Brüne
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022701 (2025)
https://doi.org/10.1116/6.0004238
Published: January 2025
View articletitled, Challenges and insights in growing epitaxial FeSn thin films on GaAs(111) substrate using molecular beam epitaxy
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Journal Articles

Boron atoms migration during epitaxial growth of boron-doped single-crystal diamond

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Yulong Zhu, Xingyan Li, Li Gou
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 023402 (2025)
https://doi.org/10.1116/6.0004186
Published: January 2025
View articletitled, Boron atoms migration during epitaxial growth of boron-doped single-crystal diamond
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Journal Articles

Ultrahigh purity plasma-enhanced atomic layer deposition and electrical properties of epitaxial scandium nitride

Editor’s PickAvailable to Purchase
Gilbert B. Rayner, Jr., Noel O’Toole, Bangzhi Liu, Jeffrey Shallenberger, Jiadi Zhu, Tomás Palacios, Piush Behera, Suraj Cheema, Blaine Johs, Nicholas A. Strnad
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 020401 (2025)
https://doi.org/10.1116/6.0004180
Published: January 2025
View articletitled, Ultrahigh purity plasma-enhanced atomic layer deposition and electrical properties of epitaxial scandium nitride
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Journal Articles

Preparation and characterization of high-quality Bi1−xSbx thin films: A sputtering deposition approach

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G. G. de Almeida, A. M. H. de Andrade, M. A. Tumelero
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 013406 (2025)
https://doi.org/10.1116/6.0004109
Published: January 2025
View articletitled, Preparation and characterization of high-quality Bi1−xSbx thin films: A sputtering deposition approach
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Journal Articles

Molecular dynamics investigation of heteroepitaxial growth of quaternary AlInGaN on wurtzite-GaN surface along [0001] direction

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Anuj Debnath, Chandan K. Das
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 012702 (2025)
https://doi.org/10.1116/6.0004113
Published: December 2024
View articletitled, Molecular dynamics investigation of heteroepitaxial growth of quaternary AlInGaN on wurtzite-GaN surface along [0001] direction
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Journal Articles

kV-class Ga2O3 vertical rectifiers fabricated on 4-in. diameter substrates

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Jian-Sian Li, Chao-Ching Chiang, Hsiao-Hsuan Wan, Fan Ren, Yu-Te Liao, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 012701 (2025)
https://doi.org/10.1116/6.0004141
Published: December 2024
View articletitled, kV-class Ga2O3 vertical rectifiers fabricated on 4-in. diameter substrates
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