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Journal Articles
J. Vac. Sci. Technol. A 43, 013104 (2025)
Published: December 2024
Journal Articles
Alina Maksimova, Alexander Uvarov, Demid Kirilenko, Artem Baranov, Ekaterina Vyacheslavova, Alexander Gudovskikh, Jean-Paul Kleider
J. Vac. Sci. Technol. A 43, 013402 (2025)
Published: December 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 063201 (2024)
Published: September 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 053404 (2024)
Published: August 2024
Journal Articles
Nicolas Le Brun, Gilles Cunge, Pascal Gouraud, Camille Petit-Etienne, Linda Parmigiani, Stéphane Allegret-Maret, Denis Guiheux, Jonathan S. Steckel
J. Vac. Sci. Technol. A 42, 033007 (2024)
Published: April 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 033404 (2024)
Published: March 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 033101 (2024)
Published: March 2024
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 42, 020401 (2024)
Published: January 2024
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 42, 013406 (2024)
Published: December 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 062412 (2023)
Published: November 2023
Journal Articles
Tenghao Jiang, Hong Zhao, Kostadinos Tsoutas, Lixian Sun, Hongwei Liu, Yanping Liu, Fanjun Xu, Zhong Zheng, Marcela M. Bilek, Zongwen Liu
J. Vac. Sci. Technol. A 41, 063410 (2023)
Published: October 2023
Includes: Supplementary data
Journal Articles
Sunil Kumar Tiwari, Akula Umamaheswara Rao, Archana Singh Kharb, Vipin Chawla, Neha Sardana, Devesh Kumar Avasthi, Amit Kumar Chawla
J. Vac. Sci. Technol. A 41, 063407 (2023)
Published: October 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 063110 (2023)
Published: October 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 063107 (2023)
Published: October 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 062702 (2023)
Published: October 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 063102 (2023)
Published: September 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 053103 (2023)
Published: July 2023
Journal Articles
Emily K. McGuinness, Haley V. Manno, Kira Pyronneau, Benjamin C. Jean, Nicole R. McClelland, Mark D. Losego
J. Vac. Sci. Technol. A 41, 030402 (2023)
Published: April 2023
Includes: Supplementary data
Journal Articles
Stephan Prünte, Gerben van Straaten, Dries van Eyck, Oscar Diaz-Morales, Jeroen Van Dijck, Hans de Neve, Mariadriana Creatore
J. Vac. Sci. Technol. A 41, 032403 (2023)
Published: March 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 022403 (2023)
Published: February 2023
Includes: Supplementary data
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