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Journal Articles
J. Vac. Sci. Technol. A 42, 052401 (2024)
Published: July 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 013201 (2024)
Published: December 2023
Journal Articles
Michael A. Collings, Marcel Junige, Andrew S. Cavanagh, Victor Wang, Andrew C. Kummel, Steven M. George
J. Vac. Sci. Technol. A 41, 062408 (2023)
Published: November 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 042404 (2023)
Published: June 2023
Journal Articles
J. Vac. Sci. Technol. A 39, 042403 (2021)
Published: June 2021
Journal Articles
J. Vac. Sci. Technol. A 36, 01A118 (2018)
Published: December 2017
Journal Articles
J. Vac. Sci. Technol. A 34, 061602 (2016)
Published: October 2016
Journal Articles
J. Vac. Sci. Technol. A 33, 05E115 (2015)
Published: July 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 021602 (2015)
Published: December 2014
Journal Articles
J. Vac. Sci. Technol. A 32, 061601 (2014)
Published: October 2014
Journal Articles
J. Vac. Sci. Technol. A 32, 051601 (2014)
Published: July 2014
Journal Articles
J. Vac. Sci. Technol. A 31, 050808 (2013)
Published: June 2013
Journal Articles
J. Vac. Sci. Technol. A 31, 031601 (2013)
Published: April 2013
Journal Articles
J. Vac. Sci. Technol. A 28, 1215–1225 (2010)
Published: September 2010
Journal Articles
J. D. Thrower, A. G. M. Abdulgalil, M. P. Collings, M. R. S. McCoustra, D. J. Burke, W. A. Brown, A. Dawes, P. J. Holtom, P. Kendall, N. J. Mason, F. Jamme, H. J. Fraser, F. J. M. Rutten
J. Vac. Sci. Technol. A 28, 799–806 (2010)
Published: June 2010
Journal Articles
J. Vac. Sci. Technol. A 28, 622–624 (2010)
Published: June 2010
Journal Articles
J. Vac. Sci. Technol. A 28, 486–494 (2010)
Published: April 2010
Journal Articles
J. Vac. Sci. Technol. A 26, 68–77 (2008)
Published: December 2007
Journal Articles
J. Vac. Sci. Technol. A 25, 1240–1245 (2007)
Published: July 2007
Journal Articles
J. Vac. Sci. Technol. A 25, 731–735 (2007)
Published: June 2007
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