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Journal Articles

First principles reaction processes of Co(CO)₃NO as an atomic layer deposition precursor on SiO₂ and Co surfaces

Nickolas M. Ashburn, Xiuyao Lang, Youhwan Jo, Yeonghun Lee, Xiaolong Yao, Kyeongjae Cho

J. Vac. Sci. Technol. A 42, 052401 (2024)

https://doi.org/10.1116/6.0003769

Published: July 2024

View articletitled, First principles reaction processes of Co(CO)3NO as an atomic layer deposition precursor on SiO2 and Co surfaces

Journal Articles

Apparatus design of operando hydrogen microscope for visualization of time-dependent distribution of hydrogen

Naoya Miyauchi, Taro Yakabe, Yoshiharu Murase, Masahiro Kitajima, Shoji Takagi, Akiko N. Itakura

J. Vac. Sci. Technol. A 42, 013201 (2024)

https://doi.org/10.1116/6.0003153

Published: December 2023

View articletitled, Apparatus design of operando hydrogen microscope for visualization of time-dependent distribution of hydrogen

Journal Articles

Electron-enhanced atomic layer deposition of Ru thin films using Ru(DMBD)(CO)₃ and effect of forming gas anneal

Michael A. Collings, Marcel Junige, Andrew S. Cavanagh, Victor Wang, Andrew C. Kummel, Steven M. George

J. Vac. Sci. Technol. A 41, 062408 (2023)

https://doi.org/10.1116/6.0002938

Published: November 2023

View articletitled, Electron-enhanced atomic layer deposition of Ru thin films using Ru(DMBD)(CO)3 and effect of forming gas anneal

Journal Articles

Electron-enhanced SiO₂ atomic layer deposition at 35 °C using disilane and ozone or water as reactants

Jonas C. Gertsch, Zachary C. Sobell, Andrew S. Cavanagh, Harsono Simka, Steven M. George

J. Vac. Sci. Technol. A 41, 042404 (2023)

https://doi.org/10.1116/6.0002726

Published: June 2023

View articletitled, Electron-enhanced SiO2 atomic layer deposition at 35 °C using disilane and ozone or water as reactants

Journal Articles

Hollow cathode plasma electron source for low temperature deposition of cobalt films by electron-enhanced atomic layer deposition

Zachary C. Sobell, Andrew S. Cavanagh, David R. Boris, Scott G. Walton, Steven M. George

J. Vac. Sci. Technol. A 39, 042403 (2021)

https://doi.org/10.1116/6.0001033

Published: June 2021

View articletitled, Hollow cathode plasma electron source for low temperature deposition of cobalt films by electron-enhanced atomic layer deposition

Journal Articles

Electron-enhanced atomic layer deposition of silicon thin films at room temperature

Jaclyn K. Sprenger, Huaxing Sun, Andrew S. Cavanagh, Steven M. George

J. Vac. Sci. Technol. A 36, 01A118 (2018)

https://doi.org/10.1116/1.5006696

Published: December 2017

View articletitled, Electron-enhanced atomic layer deposition of silicon thin films at room temperature

Journal Articles

Pumping and electron-stimulated desorption properties of a dual-layer nonevaporable getter

Oleg B. Malyshev, Reza Valizadeh, Adrian N. Hannah

J. Vac. Sci. Technol. A 34, 061602 (2016)

https://doi.org/10.1116/1.4964612

Published: October 2016

View articletitled, Pumping and electron-stimulated desorption properties of a dual-layer nonevaporable getter

Journal Articles

Hydrogen desorption kinetics for aqueous hydrogen fluoride and remote hydrogen plasma processed silicon (001) surfaces

Sean W. King, Robert F. Davis, Richard J. Carter, Thomas P. Schneider, Robert J. Nemanich

J. Vac. Sci. Technol. A 33, 05E115 (2015)

https://doi.org/10.1116/1.4926733

Published: July 2015

View articletitled, Hydrogen desorption kinetics for aqueous hydrogen fluoride and remote hydrogen plasma processed silicon (001) surfaces

Journal Articles

Application of electron stimulated desorption techniques to measure the isotherm and the mean residence time of hydrogen physisorbed on a metal surface

Ichiro Arakawa, Hideyuki Shimizu, Taku Kawarabuki, Koichiro Yamakawa, Takashi Miura

J. Vac. Sci. Technol. A 33, 021602 (2015)

https://doi.org/10.1116/1.4904033

Published: December 2014

View articletitled, Application of electron stimulated desorption techniques to measure the isotherm and the mean residence time of hydrogen physisorbed on a metal surface

Journal Articles

Electron-stimulated desorption from polished and vacuum fired 316LN stainless steel coated with Ti-Zr-Hf-V

Oleg B. Malyshev, Reza Valizadeh, Benjamin T. Hogan, Adrian N. Hannah

J. Vac. Sci. Technol. A 32, 061601 (2014)

https://doi.org/10.1116/1.4897932

Published: October 2014

View articletitled, Electron-stimulated desorption from polished and vacuum fired 316LN stainless steel coated with Ti-Zr-Hf-V

Journal Articles

Effect of surface polishing and vacuum firing on electron stimulated desorption from 316LN stainless steel

Oleg B. Malyshev, Benjamin T. Hogan, Mark Pendleton

J. Vac. Sci. Technol. A 32, 051601 (2014)

https://doi.org/10.1116/1.4887035

Published: July 2014

View articletitled, Effect of surface polishing and vacuum firing on electron stimulated desorption from 316LN stainless steel

Journal Articles

Electron-stimulated surface chemical reactions on phosphors

Paul H. Holloway, Hendrik C. Swart, O. Martin Ntwaeaborwa

J. Vac. Sci. Technol. A 31, 050808 (2013)

https://doi.org/10.1116/1.4808467

Published: June 2013

View articletitled, Electron-stimulated surface chemical reactions on phosphors

Journal Articles

Electron stimulated desorption from the 316 L stainless steel as a function of impact electron energy

Oleg B. Malyshev, Rebecca M. A. Jones, Benjamin T. Hogan, Adrian Hannah

J. Vac. Sci. Technol. A 31, 031601 (2013)

https://doi.org/10.1116/1.4798256

Published: April 2013

View articletitled, Electron stimulated desorption from the 316 L stainless steel as a function of impact electron energy

Journal Articles

Electron stimulated desorption from bare and nonevaporable getter coated stainless steels

O. B. Malyshev, A. P. Smith, R. Valizadeh, A. Hannah

J. Vac. Sci. Technol. A 28, 1215–1225 (2010)

https://doi.org/10.1116/1.3478672

Published: September 2010

View articletitled, Electron stimulated desorption from bare and nonevaporable getter coated stainless steels

Journal Articles

Photon- and electron-stimulated desorption from laboratory models of interstellar ice grains

J. D. Thrower, A. G. M. Abdulgalil, M. P. Collings, M. R. S. McCoustra, D. J. Burke, W. A. Brown, A. Dawes, P. J. Holtom, P. Kendall, N. J. Mason, F. Jamme, H. J. Fraser, F. J. M. Rutten

J. Vac. Sci. Technol. A 28, 799–806 (2010)

https://doi.org/10.1116/1.3336466

Published: June 2010

View articletitled, Photon- and electron-stimulated desorption from laboratory models of interstellar ice grains

Journal Articles

Identification at high mass resolution of the positive ion at m / z 19 produced by electron-stimulated desorption: F + (rather than H 3 O + )

Peter Williams, Klaus Franzreb

J. Vac. Sci. Technol. A 28, 622–624 (2010)

https://doi.org/10.1116/1.3420442

Published: June 2010

View articletitled, Identification at high mass resolution of the positive ion at m / z 19 produced by electron-stimulated desorption: F + (rather than H 3 O + )

Journal Articles

Bent belt-beam gauge: Extending low-pressure measurement limits in a hot-cathode ionization vacuum gauge by combining multiple methods

Fumio Watanabe

J. Vac. Sci. Technol. A 28, 486–494 (2010)

https://doi.org/10.1116/1.3400233

Published: April 2010

View articletitled, Bent belt-beam gauge: Extending low-pressure measurement limits in a hot-cathode ionization vacuum gauge by combining multiple methods

Journal Articles

Tritium migration along the cryopumping section

Oleg B. Malyshev

J. Vac. Sci. Technol. A 26, 68–77 (2008)

https://doi.org/10.1116/1.2816945

Published: December 2007

View articletitled, Tritium migration along the cryopumping section

Journal Articles

Sensitivity factor of the axial-symmetric transmission gauge: Deviation and long-term variation

N. Takahashi, Y. Tuzi, I. Arakawa

J. Vac. Sci. Technol. A 25, 1240–1245 (2007)

https://doi.org/10.1116/1.2715956

Published: July 2007

View articletitled, Sensitivity factor of the axial-symmetric transmission gauge: Deviation and long-term variation

Journal Articles

Resonances in electron stimulated desorption yield of cesium atoms from germanium monolayer-covered tungsten

V. N. Ageev, Yu. A. Kuznetsov, T. E. Madey

J. Vac. Sci. Technol. A 25, 731–735 (2007)

https://doi.org/10.1116/1.2746043

Published: June 2007

View articletitled, Resonances in electron stimulated desorption yield of cesium atoms from germanium monolayer-covered tungsten

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First principles reaction processes of Co(CO)₃NO as an atomic layer deposition precursor on SiO₂ and Co surfaces

Apparatus design of operando hydrogen microscope for visualization of time-dependent distribution of hydrogen

Electron-enhanced atomic layer deposition of Ru thin films using Ru(DMBD)(CO)₃ and effect of forming gas anneal

Electron-enhanced SiO₂ atomic layer deposition at 35 °C using disilane and ozone or water as reactants

Hollow cathode plasma electron source for low temperature deposition of cobalt films by electron-enhanced atomic layer deposition

Electron-enhanced atomic layer deposition of silicon thin films at room temperature

Pumping and electron-stimulated desorption properties of a dual-layer nonevaporable getter

Hydrogen desorption kinetics for aqueous hydrogen fluoride and remote hydrogen plasma processed silicon (001) surfaces

Application of electron stimulated desorption techniques to measure the isotherm and the mean residence time of hydrogen physisorbed on a metal surface

Electron-stimulated desorption from polished and vacuum fired 316LN stainless steel coated with Ti-Zr-Hf-V

Effect of surface polishing and vacuum firing on electron stimulated desorption from 316LN stainless steel

Electron-stimulated surface chemical reactions on phosphors

Electron stimulated desorption from the 316 L stainless steel as a function of impact electron energy

Electron stimulated desorption from bare and nonevaporable getter coated stainless steels

Photon- and electron-stimulated desorption from laboratory models of interstellar ice grains

Identification at high mass resolution of the positive ion at m / z 19 produced by electron-stimulated desorption: F + (rather than H 3 O + )

Bent belt-beam gauge: Extending low-pressure measurement limits in a hot-cathode ionization vacuum gauge by combining multiple methods

Tritium migration along the cryopumping section

Sensitivity factor of the axial-symmetric transmission gauge: Deviation and long-term variation

Resonances in electron stimulated desorption yield of cesium atoms from germanium monolayer-covered tungsten

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