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Journal Articles

Electron-enhanced atomic layer deposition of Ru thin films using Ru(DMBD)(CO)3 and effect of forming gas anneal

Michael A. Collings, Marcel Junige, Andrew S. Cavanagh, Victor Wang, Andrew C. Kummel, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062408 (2023)
https://doi.org/10.1116/6.0002938
Published: November 2023
View article titled, Electron-enhanced atomic layer deposition of Ru thin films using Ru(DMBD)(CO)<sub>3</sub> and effect of forming gas anneal
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Journal Articles

Electron-enhanced SiO2 atomic layer deposition at 35 °C using disilane and ozone or water as reactants

Jonas C. Gertsch, Zachary C. Sobell, Andrew S. Cavanagh, Harsono Simka, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 042404 (2023)
https://doi.org/10.1116/6.0002726
Published: June 2023
View article titled, Electron-enhanced SiO<sub>2</sub> atomic layer deposition at 35 °C using disilane and ozone or water as reactants
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Journal Articles

Hollow cathode plasma electron source for low temperature deposition of cobalt films by electron-enhanced atomic layer deposition

Zachary C. Sobell, Andrew S. Cavanagh, David R. Boris, Scott G. Walton, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 042403 (2021)
https://doi.org/10.1116/6.0001033
Published: June 2021
View article titled, Hollow cathode plasma electron source for low temperature deposition of cobalt films by electron-enhanced atomic layer deposition
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Journal Articles

Electron-enhanced atomic layer deposition of silicon thin films at room temperature

Jaclyn K. Sprenger, Huaxing Sun, Andrew S. Cavanagh, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 01A118 (2018)
https://doi.org/10.1116/1.5006696
Published: December 2017
View article titled, Electron-enhanced atomic layer deposition of silicon thin films at room temperature
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Journal Articles

Pumping and electron-stimulated desorption properties of a dual-layer nonevaporable getter

Oleg B. Malyshev, Reza Valizadeh, Adrian N. Hannah
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 061602 (2016)
https://doi.org/10.1116/1.4964612
Published: October 2016
View article titled, Pumping and electron-stimulated desorption properties of a dual-layer nonevaporable getter
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Journal Articles

Hydrogen desorption kinetics for aqueous hydrogen fluoride and remote hydrogen plasma processed silicon (001) surfaces

Sean W. King, Robert F. Davis, Richard J. Carter, Thomas P. Schneider, Robert J. Nemanich
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 05E115 (2015)
https://doi.org/10.1116/1.4926733
Published: July 2015
View article titled, Hydrogen desorption kinetics for aqueous hydrogen fluoride and remote hydrogen plasma processed silicon (001) surfaces
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Journal Articles

Application of electron stimulated desorption techniques to measure the isotherm and the mean residence time of hydrogen physisorbed on a metal surface

Ichiro Arakawa, Hideyuki Shimizu, Taku Kawarabuki, Koichiro Yamakawa, Takashi Miura
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 021602 (2015)
https://doi.org/10.1116/1.4904033
Published: December 2014
View article titled, Application of electron stimulated desorption techniques to measure the isotherm and the mean residence time of hydrogen physisorbed on a metal surface
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Journal Articles

Electron-stimulated desorption from polished and vacuum fired 316LN stainless steel coated with Ti-Zr-Hf-V

Oleg B. Malyshev, Reza Valizadeh, Benjamin T. Hogan, Adrian N. Hannah
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 061601 (2014)
https://doi.org/10.1116/1.4897932
Published: October 2014
View article titled, Electron-stimulated desorption from polished and vacuum fired 316LN stainless steel coated with Ti-Zr-Hf-V
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Journal Articles

Effect of surface polishing and vacuum firing on electron stimulated desorption from 316LN stainless steel

Oleg B. Malyshev, Benjamin T. Hogan, Mark Pendleton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 051601 (2014)
https://doi.org/10.1116/1.4887035
Published: July 2014
View article titled, Effect of surface polishing and vacuum firing on electron stimulated desorption from 316LN stainless steel
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Journal Articles

Electron-stimulated surface chemical reactions on phosphors

Paul H. Holloway, Hendrik C. Swart, O. Martin Ntwaeaborwa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 050808 (2013)
https://doi.org/10.1116/1.4808467
Published: June 2013
View article titled, Electron-stimulated surface chemical reactions on phosphors
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Journal Articles

Electron stimulated desorption from the 316 L stainless steel as a function of impact electron energy

Oleg B. Malyshev, Rebecca M. A. Jones, Benjamin T. Hogan, Adrian Hannah
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 031601 (2013)
https://doi.org/10.1116/1.4798256
Published: April 2013
View article titled, Electron stimulated desorption from the 316 L stainless steel as a function of impact electron energy
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Journal Articles

Electron stimulated desorption from bare and nonevaporable getter coated stainless steels

O. B. Malyshev, A. P. Smith, R. Valizadeh, A. Hannah
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 1215–1225 (2010)
https://doi.org/10.1116/1.3478672
Published: September 2010
View article titled, Electron stimulated desorption from bare and nonevaporable getter coated stainless steels
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Journal Articles

Photon- and electron-stimulated desorption from laboratory models of interstellar ice grains

J. D. Thrower, A. G. M. Abdulgalil, M. P. Collings, M. R. S. McCoustra, D. J. Burke, W. A. Brown, A. Dawes, P. J. Holtom, P. Kendall, N. J. Mason, F. Jamme, H. J. Fraser, F. J. M. Rutten
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 799–806 (2010)
https://doi.org/10.1116/1.3336466
Published: June 2010
View article titled, Photon- and electron-stimulated desorption from laboratory models of interstellar ice grains
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Journal Articles

Identification at high mass resolution of the positive ion at m / z 19 produced by electron-stimulated desorption: F + (rather than H 3 O + )

Peter Williams, Klaus Franzreb
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 622–624 (2010)
https://doi.org/10.1116/1.3420442
Published: June 2010
View article titled, Identification at high mass resolution of the positive ion at m / z 19 produced by electron-stimulated desorption: F + (rather than H 3 O + )
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Journal Articles

Bent belt-beam gauge: Extending low-pressure measurement limits in a hot-cathode ionization vacuum gauge by combining multiple methods

Fumio Watanabe
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 486–494 (2010)
https://doi.org/10.1116/1.3400233
Published: April 2010
View article titled, Bent belt-beam gauge: Extending low-pressure measurement limits in a hot-cathode ionization vacuum gauge by combining multiple methods
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Journal Articles

Tritium migration along the cryopumping section

Oleg B. Malyshev
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 68–77 (2008)
https://doi.org/10.1116/1.2816945
Published: December 2007
View article titled, Tritium migration along the cryopumping section
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Journal Articles

Sensitivity factor of the axial-symmetric transmission gauge: Deviation and long-term variation

N. Takahashi, Y. Tuzi, I. Arakawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 1240–1245 (2007)
https://doi.org/10.1116/1.2715956
Published: July 2007
View article titled, Sensitivity factor of the axial-symmetric transmission gauge: Deviation and long-term variation
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Journal Articles

Resonances in electron stimulated desorption yield of cesium atoms from germanium monolayer-covered tungsten

V. N. Ageev, Yu. A. Kuznetsov, T. E. Madey
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 731–735 (2007)
https://doi.org/10.1116/1.2746043
Published: June 2007
View article titled, Resonances in electron stimulated desorption yield of cesium atoms from germanium monolayer-covered tungsten
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Journal Articles

Photon stimulated ion desorption from condensed thiophene photoexcited around the S 1 s -edge

M. L. M. Rocco, T. Sekiguchi, Y. Baba
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 2117–2121 (2006)
https://doi.org/10.1116/1.2357742
Published: October 2006
View article titled, Photon stimulated ion desorption from condensed thiophene photoexcited around the S 1 s -edge
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Journal Articles

Study of temperature influence on electron beam induced deposition

Wei Li, David C. Joy
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 431–436 (2006)
https://doi.org/10.1116/1.2187995
Published: April 2006
View article titled, Study of temperature influence on electron beam induced deposition
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