Skip Nav Destination
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Format
Collections
Topics
Subjects
Journal
Article Type
Issue Section
Date
Availability
Journal Articles
J. Vac. Sci. Technol. A 41, 033201 (2023)
Published: March 2023
Journal Articles
Kartik Sondhi, Rahul Sharangpani, Ramy Nashed Bassely Said, Joyeeta Nag, Michael Gribelyuk, Senaka Kanakamedala, Raghuveer S. Makala
J. Vac. Sci. Technol. A 40, 062412 (2022)
Published: November 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 063214 (2021)
Published: October 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 040802 (2021)
Published: June 2021
Journal Articles
Ekaterina Zoubenko, Sara Iacopetti, Kamira Weinfeld, Yaron Kauffmann, Patrick Van Cleemput, Moshe Eizenberg
J. Vac. Sci. Technol. A 39, 043201 (2021)
Published: May 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 38, 063205 (2020)
Published: September 2020
Journal Articles
Mineharu Suzuki, Hiroko Nagao, Yoshitomo Harada, Hiroshi Shinotsuka, Katsumi Watanabe, Akito Sasaki, Asahiko Matsuda, Koji Kimoto, Hideki Yoshikawa
J. Vac. Sci. Technol. A 38, 023204 (2020)
Published: January 2020
Journal Articles
Babak Bakhit, David L. J. Engberg, Jun Lu, Johanna Rosen, Hans Högberg, Lars Hultman, Ivan Petrov, J. E. Greene, Grzegorz Greczynski
J. Vac. Sci. Technol. A 37, 031506 (2019)
Published: April 2019
Journal Articles
Hwanhui Yun, Mehmet Topsakal, Abhinav Prakash, Koustav Ganguly, Chris Leighton, Bharat Jalan, Renata M. Wentzcovitch, K. Andre Mkhoyan, Jong Seok Jeong
J. Vac. Sci. Technol. A 36, 031503 (2018)
Published: March 2018
Journal Articles
Eiji Kobayashi, Mathieu Boccard, Quentin Jeangros, Nathan Rodkey, Daniel Vresilovic, Aïcha Hessler-Wyser, Max Döbeli, Daniel Franta, Stefaan De Wolf, Monica Morales-Masis, Christophe Ballif
J. Vac. Sci. Technol. A 36, 021518 (2018)
Published: March 2018
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 35, 01B125 (2017)
Published: December 2016
Journal Articles
Joseph Rowley, Lei Pei, Robert C. Davis, Richard R. Vanfleet, Steven Liddiard, Mallorie Harker, Jonathan Abbott
J. Vac. Sci. Technol. A 34, 051511 (2016)
Published: August 2016
Journal Articles
J. Vac. Sci. Technol. A 33, 060608 (2015)
Published: October 2015
Includes: Supplementary data
Journal Articles
Ryan J. Wu, Mehmet Topsakal, Tony Low, Matthew C. Robbins, Nazila Haratipour, Jong Seok Jeong, Renata M. Wentzcovitch, Steven J. Koester, K. Andre Mkhoyan
J. Vac. Sci. Technol. A 33, 060604 (2015)
Published: July 2015
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 33, 01A130 (2015)
Published: December 2014
Journal Articles
J. Vac. Sci. Technol. A 33, 021401 (2015)
Published: November 2014
Journal Articles
Peizhi Liu, Guoliang Li, Gerd Duscher, Yogesh K. Sharma, Ayayi C. Ahyi, Tamara Isaacs-Smith, John R. Williams, Sarit Dhar
J. Vac. Sci. Technol. A 32, 060603 (2014)
Published: October 2014
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 32, 051602 (2014)
Published: July 2014
Journal Articles
J. Vac. Sci. Technol. A 31, 06F110 (2013)
Published: November 2013
Journal Articles
Yus Rama Denny, Sunyoung Lee, Kangil Lee, Soonjoo Seo, Suhk Kun Oh, Hee Jae Kang, Sung Heo, Jae Gwan Chung, Jae Cheol Lee, Sven Tougaard
J. Vac. Sci. Technol. A 31, 031508 (2013)
Published: April 2013
1