1-20 of 336
Electron energy loss spectroscopy
Close
Save search
Follow your search
Access your saved searches in your account
Close Modal
Sort by
Journal Articles

Trimethylboron as a precursor for boron phosphide plasma deposition at low temperature

Alina Maksimova, Alexander Uvarov, Demid Kirilenko, Artem Baranov, Ekaterina Vyacheslavova, Alexander Gudovskikh, Jean-Paul Kleider
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 013402 (2025)
https://doi.org/10.1116/6.0004065
Published: December 2024
View article titled, Trimethylboron as a precursor for boron phosphide plasma deposition at low temperature
Open the PDF for Trimethylboron as a precursor for boron phosphide plasma deposition at low temperature in another window
Journal Articles

Application of FEFF to the x-ray spectroscopy of cerium dioxide

J. G. Tobin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063203 (2024)
https://doi.org/10.1116/6.0003938
Published: September 2024
View article titled, Application of FEFF to the x-ray spectroscopy of cerium dioxide
Open the PDF for Application of FEFF to the x-ray spectroscopy of cerium dioxide in another window
Journal Articles

Growth of high-quality ruthenium films on sapphire

Editor’s Pick
Lena N. Majer, Sander Smink, Wolfgang Braun, Hongguang Wang, Peter A. van Aken, Jochen Mannhart, Felix V. E. Hensling
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 052702 (2024)
https://doi.org/10.1116/6.0003756
Published: July 2024
View article titled, Growth of high-quality ruthenium films on sapphire
Open the PDF for Growth of high-quality ruthenium films on sapphire in another window
Journal Articles

FEFF analysis of americium oxides

J. G. Tobin, S.-W. Yu, D. K. Shuh, S. M. Butorin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023209 (2024)
https://doi.org/10.1116/6.0003428
Published: February 2024
View article titled, FEFF analysis of americium oxides
Open the PDF for FEFF analysis of americium oxides in another window
Journal Articles

Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by in situ scanning transmission electron microscopy

Featured
Per O. Å. Persson, Johanna Rosen, Ivan Petrov, Justinas Palisaitis
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 020401 (2024)
https://doi.org/10.1116/6.0003389
Published: January 2024
View article titled, Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by <em>in situ</em> scanning transmission electron microscopy
Open the PDF for Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by <em>in situ</em> scanning transmission electron microscopy in another window
Includes: Supplementary data
Journal Articles

Adapting FEFF to 5f angular momentum coupling

J. G. Tobin, S.-W. Yu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033201 (2023)
https://doi.org/10.1116/6.0002420
Published: March 2023
View article titled, Adapting FEFF to 5f angular momentum coupling
Open the PDF for Adapting FEFF to 5f angular momentum coupling in another window
Journal Articles

Area selective deposition of ruthenium on 3D structures

Featured
Kartik Sondhi, Rahul Sharangpani, Ramy Nashed Bassely Said, Joyeeta Nag, Michael Gribelyuk, Senaka Kanakamedala, Raghuveer S. Makala
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 062412 (2022)
https://doi.org/10.1116/6.0002148
Published: November 2022
View article titled, Area selective deposition of ruthenium on 3D structures
Open the PDF for Area selective deposition of ruthenium on 3D structures in another window
Includes: Supplementary data
Journal Articles

Elucidating interactions of the epoxide ring on Pt(111) by comparing reaction pathways of propylene oxide and 1-epoxy-3-butene

William N. Porter, Zhexi Lin, Jingguang G. Chen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063214 (2021)
https://doi.org/10.1116/6.0001370
Published: October 2021
View article titled, Elucidating interactions of the epoxide ring on Pt(111) by comparing reaction pathways of propylene oxide and 1-epoxy-3-butene
Open the PDF for Elucidating interactions of the epoxide ring on Pt(111) by comparing reaction pathways of propylene oxide and 1-epoxy-3-butene in another window
Journal Articles

X-ray and electron spectroscopy of (photo)electrocatalysts: Understanding activity through electronic structure and adsorbate coverage

Oliver Quinn Carvalho, Ethan J. Crumlin, Kelsey A. Stoerzinger
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 040802 (2021)
https://doi.org/10.1116/6.0001091
Published: June 2021
View article titled, X-ray and electron spectroscopy of (photo)electrocatalysts: Understanding activity through electronic structure and adsorbate coverage
Open the PDF for X-ray and electron spectroscopy of (photo)electrocatalysts: Understanding activity through electronic structure and adsorbate coverage in another window
Journal Articles

Impact of chemical bonding difference of ALD Mo on SiO2 and Al2O3 on the effective work function of the two gate stacks

Ekaterina Zoubenko, Sara Iacopetti, Kamira Weinfeld, Yaron Kauffmann, Patrick Van Cleemput, Moshe Eizenberg
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 043201 (2021)
https://doi.org/10.1116/6.0000964
Published: May 2021
View article titled, Impact of chemical bonding difference of ALD Mo on SiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> on the effective work function of the two gate stacks
Open the PDF for Impact of chemical bonding difference of ALD Mo on SiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> on the effective work function of the two gate stacks in another window
Includes: Supplementary data
Journal Articles

First-principles theoretical analysis and electron energy loss spectroscopy of vacancy defects in bulk and nonpolar ( 10 1 ¯ ) surface of GaN

Sanjay Nayak, Mit H. Naik, Manish Jain, Umesh V. Waghmare, Sonnada M. Shivaprasad
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 063205 (2020)
https://doi.org/10.1116/6.0000402
Published: September 2020
View article titled, First-principles theoretical analysis and electron energy loss spectroscopy of vacancy defects in bulk and nonpolar ( 10 1 ¯ ) surface of GaN
Open the PDF for First-principles theoretical analysis and electron energy loss spectroscopy of vacancy defects in bulk and nonpolar ( 10 1 ¯ ) surface of GaN in another window
Journal Articles

Raw-to-repository characterization data conversion for repeatable, replicable, and reproducible measurements

Mineharu Suzuki, Hiroko Nagao, Yoshitomo Harada, Hiroshi Shinotsuka, Katsumi Watanabe, Akito Sasaki, Asahiko Matsuda, Koji Kimoto, Hideki Yoshikawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 023204 (2020)
https://doi.org/10.1116/1.5128408
Published: January 2020
View article titled, Raw-to-repository characterization data conversion for repeatable, replicable, and reproducible measurements
Open the PDF for Raw-to-repository characterization data conversion for repeatable, replicable, and reproducible measurements in another window
Journal Articles

Strategy for simultaneously increasing both hardness and toughness in ZrB2-rich Zr1−xTaxBy thin films

Editor’s Pick
Babak Bakhit, David L. J. Engberg, Jun Lu, Johanna Rosen, Hans Högberg, Lars Hultman, Ivan Petrov, J. E. Greene, Grzegorz Greczynski
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 031506 (2019)
https://doi.org/10.1116/1.5093170
Published: April 2019
View article titled, Strategy for simultaneously increasing both hardness and toughness in ZrB<sub>2</sub>-rich Zr<sub>1−x</sub>Ta<sub>x</sub>B<sub>y</sub> thin films
Open the PDF for Strategy for simultaneously increasing both hardness and toughness in ZrB<sub>2</sub>-rich Zr<sub>1−x</sub>Ta<sub>x</sub>B<sub>y</sub> thin films in another window
Journal Articles

Amorphous gallium oxide grown by low-temperature PECVD

Eiji Kobayashi, Mathieu Boccard, Quentin Jeangros, Nathan Rodkey, Daniel Vresilovic, Aïcha Hessler-Wyser, Max Döbeli, Daniel Franta, Stefaan De Wolf, Monica Morales-Masis, Christophe Ballif
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 021518 (2018)
https://doi.org/10.1116/1.5018800
Published: March 2018
View article titled, Amorphous gallium oxide grown by low-temperature PECVD
Open the PDF for Amorphous gallium oxide grown by low-temperature PECVD in another window
Includes: Supplementary data
Journal Articles

Localized defect states and charge trapping in atomic layer deposited-Al2O3 films

Karsten Henkel, Malgorzata Kot, Dieter Schmeißer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 01B125 (2017)
https://doi.org/10.1116/1.4971991
Published: December 2016
View article titled, Localized defect states and charge trapping in atomic layer deposited-Al<sub>2</sub>O<sub>3</sub> films
Open the PDF for Localized defect states and charge trapping in atomic layer deposited-Al<sub>2</sub>O<sub>3</sub> films in another window
Journal Articles

Sputtered carbon as a corrosion barrier for x-ray detector windows

Joseph Rowley, Lei Pei, Robert C. Davis, Richard R. Vanfleet, Steven Liddiard, Mallorie Harker, Jonathan Abbott
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 051511 (2016)
https://doi.org/10.1116/1.4961451
Published: August 2016
View article titled, Sputtered carbon as a corrosion barrier for x-ray detector windows
Open the PDF for Sputtered carbon as a corrosion barrier for x-ray detector windows in another window
Journal Articles

Hybrid molecular beam epitaxy for the growth of stoichiometric BaSnO3

Abhinav Prakash, John Dewey, Hwanhui Yun, Jong Seok Jeong, K. Andre Mkhoyan, Bharat Jalan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 060608 (2015)
https://doi.org/10.1116/1.4933401
Published: October 2015
View article titled, Hybrid molecular beam epitaxy for the growth of stoichiometric BaSnO<sub>3</sub>
Open the PDF for Hybrid molecular beam epitaxy for the growth of stoichiometric BaSnO<sub>3</sub> in another window
Includes: Supplementary data
Journal Articles

Atomic and electronic structure of exfoliated black phosphorus

Ryan J. Wu, Mehmet Topsakal, Tony Low, Matthew C. Robbins, Nazila Haratipour, Jong Seok Jeong, Renata M. Wentzcovitch, Steven J. Koester, K. Andre Mkhoyan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 060604 (2015)
https://doi.org/10.1116/1.4926753
Published: July 2015
View article titled, Atomic and electronic structure of exfoliated black phosphorus
Open the PDF for Atomic and electronic structure of exfoliated black phosphorus in another window
Includes: Supplementary data
Journal Articles

Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates

Joel W. Clancey, Andrew S. Cavanagh, Ratandeep S. Kukreja, Anusorn Kongkanand, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 01A130 (2015)
https://doi.org/10.1116/1.4901459
Published: December 2014
View article titled, Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates
Open the PDF for Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates in another window
Journal Articles

Surface structure and surface kinetics of InN grown by plasma-assisted atomic layer epitaxy: A HREELS study

Ananta R. Acharya, Brian D. Thoms, Neeraj Nepal, Charles R. Eddy, Jr.
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 021401 (2015)
https://doi.org/10.1116/1.4901873
Published: November 2014
View article titled, Surface structure and surface kinetics of InN grown by plasma-assisted atomic layer epitaxy: A HREELS study
Open the PDF for Surface structure and surface kinetics of InN grown by plasma-assisted atomic layer epitaxy: A HREELS study in another window