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Journal Articles
J. Vac. Sci. Technol. A 43, 023404 (2025)
Published: January 2025
Journal Articles
J. Vac. Sci. Technol. A 43, 020801 (2025)
Published: January 2025
Journal Articles
Harshil Kashyap, Ping-Che Lee, Kisung Chae, Matthias Passlack, Ajay K. Yadav, Keith Wong, Srini Nemani, Ellie Yieh, Jeffrey Spiegelman, Kyeongjae Cho, Asif Islam Khan, Andrew C. Kummel
J. Vac. Sci. Technol. A 43, 022401 (2025)
Published: January 2025
Journal Articles
J. Vac. Sci. Technol. A 43, 013403 (2025)
Published: December 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 062409 (2024)
Published: November 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 053207 (2024)
Published: August 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 032803 (2024)
Published: April 2024
Journal Articles
Lewen Qian, Xin Sun, Tao Liu, Ziqiang Huang, Xinlong Guo, Maolin Pan, Dawei Wang, Saisheng Xu, Min Xu, Chen Wang, Chunlei Wu, David Wei Zhang
J. Vac. Sci. Technol. A 42, 023423 (2024)
Published: February 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 023110 (2024)
Published: February 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 012401 (2024)
Published: December 2023
Journal Articles
Seokhwi Song, Eungju Kim, Kyunghoo Kim, Jangho Bae, Jinho Lee, Chang Hwa Jung, Hanjin Lim, Hyeongtag Jeon
J. Vac. Sci. Technol. A 41, 062404 (2023)
Published: October 2023
Journal Articles
Partha Sarathi Padhi, R. S. Ajimsha, S. K. Rai, Sushmita Bhartiya, Aniruddha Bose, Bidyadhar Das, Manoj Kumar Tiwari, Pankaj Misra
J. Vac. Sci. Technol. A 41, 063201 (2023)
Published: September 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 053002 (2023)
Published: July 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 053201 (2023)
Published: July 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 032702 (2023)
Published: March 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 013403 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 040401 (2022)
Published: May 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 033412 (2022)
Published: April 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 032402 (2022)
Published: April 2022
Includes: Supplementary data
Journal Articles
Beibei Ge, Daisuke Ohori, Yi-Ho Chen, Takuya Ozaki, Kazuhiko Endo, Yiming Li, Jenn-Hwan Tarng, Seiji Samukawa
J. Vac. Sci. Technol. A 40, 022405 (2022)
Published: February 2022
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