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Journal Articles

Understanding the unique optical and vibrational signatures of sequential infiltration synthesis derived indium oxyhydroxide clusters for CO2 absorption

Thabiso Kunene, Alex B. F. Martinson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 042402 (2023)
https://doi.org/10.1116/6.0002664
Published: June 2023
View article titled, Understanding the unique optical and vibrational signatures of sequential infiltration synthesis derived indium oxyhydroxide clusters for CO<sub>2</sub> absorption
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Includes: Supplementary data
Journal Articles

Nitrogen centers in single crystal diamond grown by chemical vapor deposition

D. S. Misra
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 042703 (2023)
https://doi.org/10.1116/6.0002622
Published: May 2023
View article titled, Nitrogen centers in single crystal diamond grown by chemical vapor deposition
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Journal Articles

Limiting reagent conditions to control inorganic loading in AlOx–PET hybrid fabrics created through vapor-phase infiltration

Emily K. McGuinness, Haley V. Manno, Kira Pyronneau, Benjamin C. Jean, Nicole R. McClelland, Mark D. Losego
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 030402 (2023)
https://doi.org/10.1116/6.0002534
Published: April 2023
View article titled, Limiting reagent conditions to control inorganic loading in AlO<sub>x</sub>–PET hybrid fabrics created through vapor-phase infiltration
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Includes: Supplementary data
Journal Articles

Nanosecond pulsed plasma discharge for remediation of simulated wastewater containing thiazine and azo dyes as model pollutants

Muhammad Farooq, Siddiqa Ismail, N. U. Rehman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 013001 (2023)
https://doi.org/10.1116/6.0002064
Published: December 2022
View article titled, Nanosecond pulsed plasma discharge for remediation of simulated wastewater containing thiazine and azo dyes as model pollutants
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Journal Articles

Temperature-resolved surface infrared spectroscopy of CO on Rh(111) and (2 × 1)-O/Rh(111)

Elizabeth A. Jamka, Maxwell Z. Gillum, Christina N. Grytsyshyn-Giger, Faith J. Lewis, Daniel R. Killelea
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043209 (2022)
https://doi.org/10.1116/6.0001932
Published: June 2022
View article titled, Temperature-resolved surface infrared spectroscopy of CO on Rh(111) and (2 × 1)-O/Rh(111)
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Journal Articles

Quantitative analysis of composition and temperature of semiconductor processing plasmas via terahertz spectroscopy

Yaser H. Helal, Christopher F. Neese, Frank C. De Lucia, Phillip J. Stout, Barry Craver, Michael Armacost
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043004 (2022)
https://doi.org/10.1116/6.0001843
Published: June 2022
View article titled, Quantitative analysis of composition and temperature of semiconductor processing plasmas via terahertz spectroscopy
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Journal Articles

Amorphous semi-insulating Al-doped In2O3 growth by atomic layer deposition for thin-film transistors

Zecheng Wu, Yu Zhang, Shiqiang Lu, Rongxu Bai, Na Gao, Kai Huang, Hao Zhu, Shen Hu, Qingqing Sun, David Wei Zhang, Xingwei Ding, Jack C. Lee, Li Ji
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 042402 (2022)
https://doi.org/10.1116/6.0001787
Published: May 2022
View article titled, Amorphous semi-insulating Al-doped In<sub>2</sub>O<sub>3</sub> growth by atomic layer deposition for thin-film transistors
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Includes: Supplementary data
Journal Articles

Effect of substrate and substrate temperature on the deposition of MoS2 by radio frequency magnetron sputtering

Valiyaparambil J. Cicily Rigi, Madambi K. Jayaraj, Kachirayil J. Saji
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 032201 (2022)
https://doi.org/10.1116/6.0001685
Published: March 2022
View article titled, Effect of substrate and substrate temperature on the deposition of MoS<sub>2</sub> by radio frequency magnetron sputtering
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Includes: Supplementary data
Journal Articles

Room-temperature atomic layer deposition of iron oxide using plasma excited humidified argon

Kazuki Yoshida, Issei Nagata, Kentaro Saito, Masanori Miura, Kensaku Kanomata, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 022408 (2022)
https://doi.org/10.1116/6.0001622
Published: February 2022
View article titled, Room-temperature atomic layer deposition of iron oxide using plasma excited humidified argon
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Journal Articles

Use of in situ electrical conductance measurements to understand the chemical mechanisms and chamber wall effects during vapor phase infiltration doping of poly(aniline) with TiCl4 + H2O

Kristina L. Malinowski, Shawn A. Gregory, Jamie P. Wooding, Oliver B. Hvidsten, Alexandra Jungreis, Mark D. Losego
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 013418 (2022)
https://doi.org/10.1116/6.0001544
Published: January 2022
View article titled, Use of <em>in situ</em> electrical conductance measurements to understand the chemical mechanisms and chamber wall effects during vapor phase infiltration doping of poly(aniline) with TiCl<sub>4</sub> + H<sub>2</sub>O
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Journal Articles

Infrared reflection absorption spectroscopy and temperature-programmed desorption studies of CO adsorption on Ni/CeO2(111) thin films: The role of the ceria support

Erik W. Peterson, Huanru Wang, Zongyuan Liu, Tasnim Ara, Sanjaya D. Senanayake, Jose A. Rodriguez, Jing Zhou
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 013209 (2022)
https://doi.org/10.1116/6.0001409
Published: December 2021
View article titled, Infrared reflection absorption spectroscopy and temperature-programmed desorption studies of CO adsorption on Ni/CeO<sub>2</sub>(111) thin films: The role of the ceria support
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Journal Articles

Growth and characterization of II-VI semiconductor multilayer quantum-well structures for two-color quantum well infrared photodetector applications

Luis Hernandez-Mainet, Guopeng Chen, Amir Zangiabadi, Aidong Shen, Maria C. Tamargo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 033205 (2021)
https://doi.org/10.1116/6.0000947
Published: April 2021
View article titled, Growth and characterization of II-VI semiconductor multilayer quantum-well structures for two-color quantum well infrared photodetector applications
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Journal Articles

Microstructure and optical properties of sputter-deposited Ga2O3 films

Eduardo Vega, Sundar B. Isukapati, Tom N. Oder
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 033412 (2021)
https://doi.org/10.1116/6.0000938
Published: April 2021
View article titled, Microstructure and optical properties of sputter-deposited Ga<sub>2</sub>O<sub>3</sub> films
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Journal Articles

Correlation between electrical conductivity and luminescence properties in β-Ga2O3:Cr3+ and β-Ga2O3:Cr,Mg single crystals

Vyacheslav Vasyltsiv, Andriy Luchechko, Yaroslav Zhydachevskyy, Lyudmyla Kostyk, Roman Lys, Dmytro Slobodzyan, Rafał Jakieła, Bohdan Pavlyk, Andrzej Suchocki
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 033201 (2021)
https://doi.org/10.1116/6.0000859
Published: March 2021
View article titled, Correlation between electrical conductivity and luminescence properties in β-Ga<sub>2</sub>O<sub>3</sub>:Cr<sup>3+</sup> and β-Ga<sub>2</sub>O<sub>3</sub>:Cr,Mg single crystals
Open the PDF for Correlation between electrical conductivity and luminescence properties in β-Ga<sub>2</sub>O<sub>3</sub>:Cr<sup>3+</sup> and β-Ga<sub>2</sub>O<sub>3</sub>:Cr,Mg single crystals in another window
Journal Articles

Fabrication and characterization of inkjet-printed 2D perovskite optoelectronic devices

Misook Min, Ridwan F. Hossain, Liang-Chieh Ma, Anupama B. Kaul
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 052202 (2020)
https://doi.org/10.1116/6.0000083
Published: August 2020
View article titled, Fabrication and characterization of inkjet-printed 2D perovskite optoelectronic devices
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Journal Articles

Vacuum ultraviolet-absorption spectroscopy and delocalized plasma-induced emission used for the species detection in a down-stream soft-etch plasma reactor

Robert Soriano, Gilles Cunge, Nader Sadeghi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 043002 (2020)
https://doi.org/10.1116/6.0000134
Published: June 2020
View article titled, Vacuum ultraviolet-absorption spectroscopy and delocalized plasma-induced emission used for the species detection in a down-stream soft-etch plasma reactor
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Journal Articles

Investigating recent developments and applications of optical plasma spectroscopy: A review

Angela R. Hanna, Ellen R. Fisher
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 020806 (2020)
https://doi.org/10.1116/1.5141844
Published: February 2020
View article titled, Investigating recent developments and applications of optical plasma spectroscopy: A review
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Includes: Supplementary data
Journal Articles

X-ray photoelectron spectroscopy study for band alignments of BaTiO3/Ga2O3 and In2O3/Ga2O3 heterostructures

Yusong Zhi, Zeng Liu, Xia Wang, Sisi Li, Xiaolong Wang, Xulong Chu, Peigang Li, Daoyou Guo, Zhenping Wu, Weihua Tang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 023202 (2020)
https://doi.org/10.1116/1.5138715
Published: January 2020
View article titled, X-ray photoelectron spectroscopy study for band alignments of BaTiO<sub>3</sub>/Ga<sub>2</sub>O<sub>3</sub> and In<sub>2</sub>O<sub>3</sub>/Ga<sub>2</sub>O<sub>3</sub> heterostructures
Open the PDF for X-ray photoelectron spectroscopy study for band alignments of BaTiO<sub>3</sub>/Ga<sub>2</sub>O<sub>3</sub> and In<sub>2</sub>O<sub>3</sub>/Ga<sub>2</sub>O<sub>3</sub> heterostructures in another window
Includes: Supplementary data
Journal Articles

All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process

Jeong-Mu Lee, Hwan-Jae Lee, Jae-Eun Pi, Jong-Heon Yang, Jeong Hun Lee, Seong-Deok Ahn, Seung-Youl Kang, Jaehyun Moon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 060910 (2019)
https://doi.org/10.1116/1.5119937
Published: November 2019
View article titled, All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process
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Includes: Supplementary data
Journal Articles

Room temperature atomic layer deposition of niobium oxide using plasma excited humidified argon and its application to anticorrosion to hydrochloric acid

Kazuki Yoshida, Kentaro Tokoro, Kensaku Kanomata, Masanori Miura, Kentaro Saito, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 060901 (2019)
https://doi.org/10.1116/1.5116844
Published: September 2019
View article titled, Room temperature atomic layer deposition of niobium oxide using plasma excited humidified argon and its application to anticorrosion to hydrochloric acid
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