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Journal Articles

Elusive supported surface M₂O_x dimer active site (M = Re, W, Mo, Cr, V, Nb, and Ta)

Israel E. Wachs

J. Vac. Sci. Technol. A 42, 063202 (2024)

https://doi.org/10.1116/6.0003928

Published: September 2024

View article titled, Elusive supported surface M2Ox dimer active site (M = Re, W, Mo, Cr, V, Nb, and Ta)

Journal Articles

Inherent area selective deposition of silicon dioxide in multilayer 3D SiO_x–SiN_x stacks

Kartik Sondhi, Stephen Ross, Joyeeta Nag, X. C. Guo, Dexin Zhao, Adarsh Rajashekhar, Senaka Kanakamedala

J. Vac. Sci. Technol. A 42, 050403 (2024)

https://doi.org/10.1116/6.0003790

Published: August 2024

View article titled, Inherent area selective deposition of silicon dioxide in multilayer 3D SiOx–SiNx stacks

Journal Articles

Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra

Fatima Jenina Arellano, Minoru Kusaba, Stephen Wu, Ryo Yoshida, Zoltán Donkó, Peter Hartmann, Tsanko V. Tsankov, Satoshi Hamaguchi

J. Vac. Sci. Technol. A 42, 053001 (2024)

https://doi.org/10.1116/6.0003731

Published: July 2024

View article titled, Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra

Journal Articles

Melt-grown semi-insulating Mn:β-Ga₂O₃ single crystals exhibiting unique visible absorptions and luminescence

Benjamin L. Dutton, Joel B. Varley, Cassandra Remple, Jani Jesenovec, Brooke K. Downing, Jimmy-Xuan Shen, Soroush Ghandiparsi, Adam T. Neal, Yunjo Kim, Andrew J. Green, Lars F. Voss, Matthew D. McCluskey, John S. McCloy

J. Vac. Sci. Technol. A 42, 012801 (2024)

https://doi.org/10.1116/6.0003212

Published: December 2023

View article titled, Melt-grown semi-insulating Mn:β-Ga2O3 single crystals exhibiting unique visible absorptions and luminescence

Includes: Supplementary data

Journal Articles

Understanding the unique optical and vibrational signatures of sequential infiltration synthesis derived indium oxyhydroxide clusters for CO₂ absorption

Thabiso Kunene, Alex B. F. Martinson

J. Vac. Sci. Technol. A 41, 042402 (2023)

https://doi.org/10.1116/6.0002664

Published: June 2023

View article titled, Understanding the unique optical and vibrational signatures of sequential infiltration synthesis derived indium oxyhydroxide clusters for CO2 absorption

Includes: Supplementary data

Journal Articles

Nitrogen centers in single crystal diamond grown by chemical vapor deposition

D. S. Misra

J. Vac. Sci. Technol. A 41, 042703 (2023)

https://doi.org/10.1116/6.0002622

Published: May 2023

View article titled, Nitrogen centers in single crystal diamond grown by chemical vapor deposition

Journal Articles

Limiting reagent conditions to control inorganic loading in AlO_x–PET hybrid fabrics created through vapor-phase infiltration

Emily K. McGuinness, Haley V. Manno, Kira Pyronneau, Benjamin C. Jean, Nicole R. McClelland, Mark D. Losego

J. Vac. Sci. Technol. A 41, 030402 (2023)

https://doi.org/10.1116/6.0002534

Published: April 2023

View article titled, Limiting reagent conditions to control inorganic loading in AlOx–PET hybrid fabrics created through vapor-phase infiltration

Includes: Supplementary data

Journal Articles

Nanosecond pulsed plasma discharge for remediation of simulated wastewater containing thiazine and azo dyes as model pollutants

Muhammad Farooq, Siddiqa Ismail, N. U. Rehman

J. Vac. Sci. Technol. A 41, 013001 (2023)

https://doi.org/10.1116/6.0002064

Published: December 2022

View article titled, Nanosecond pulsed plasma discharge for remediation of simulated wastewater containing thiazine and azo dyes as model pollutants

Journal Articles

Quantitative analysis of composition and temperature of semiconductor processing plasmas via terahertz spectroscopy

Yaser H. Helal, Christopher F. Neese, Frank C. De Lucia, Phillip J. Stout, Barry Craver, Michael Armacost

J. Vac. Sci. Technol. A 40, 043004 (2022)

https://doi.org/10.1116/6.0001843

Published: June 2022

View article titled, Quantitative analysis of composition and temperature of semiconductor processing plasmas via terahertz spectroscopy

Journal Articles

Amorphous semi-insulating Al-doped In₂O₃ growth by atomic layer deposition for thin-film transistors

Zecheng Wu, Yu Zhang, Shiqiang Lu, Rongxu Bai, Na Gao, Kai Huang, Hao Zhu, Shen Hu, Qingqing Sun, David Wei Zhang, Xingwei Ding, Jack C. Lee, Li Ji

J. Vac. Sci. Technol. A 40, 042402 (2022)

https://doi.org/10.1116/6.0001787

Published: May 2022

View article titled, Amorphous semi-insulating Al-doped In2O3 growth by atomic layer deposition for thin-film transistors

Includes: Supplementary data

Journal Articles

Effect of substrate and substrate temperature on the deposition of MoS₂ by radio frequency magnetron sputtering

Valiyaparambil J. Cicily Rigi, Madambi K. Jayaraj, Kachirayil J. Saji

J. Vac. Sci. Technol. A 40, 032201 (2022)

https://doi.org/10.1116/6.0001685

Published: March 2022

View article titled, Effect of substrate and substrate temperature on the deposition of MoS2 by radio frequency magnetron sputtering

Includes: Supplementary data

Journal Articles

Room-temperature atomic layer deposition of iron oxide using plasma excited humidified argon

Kazuki Yoshida, Issei Nagata, Kentaro Saito, Masanori Miura, Kensaku Kanomata, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose

J. Vac. Sci. Technol. A 40, 022408 (2022)

https://doi.org/10.1116/6.0001622

Published: February 2022

View article titled, Room-temperature atomic layer deposition of iron oxide using plasma excited humidified argon

Journal Articles

Use of in situ electrical conductance measurements to understand the chemical mechanisms and chamber wall effects during vapor phase infiltration doping of poly(aniline) with TiCl₄ + H₂O

Kristina L. Malinowski, Shawn A. Gregory, Jamie P. Wooding, Oliver B. Hvidsten, Alexandra Jungreis, Mark D. Losego

J. Vac. Sci. Technol. A 40, 013418 (2022)

https://doi.org/10.1116/6.0001544

Published: January 2022

View article titled, Use of in situ electrical conductance measurements to understand the chemical mechanisms and chamber wall effects during vapor phase infiltration doping of poly(aniline) with TiCl4 + H2O

Journal Articles

Infrared reflection absorption spectroscopy and temperature-programmed desorption studies of CO adsorption on Ni/CeO₂(111) thin films: The role of the ceria support

Erik W. Peterson, Huanru Wang, Zongyuan Liu, Tasnim Ara, Sanjaya D. Senanayake, Jose A. Rodriguez, Jing Zhou

J. Vac. Sci. Technol. A 40, 013209 (2022)

https://doi.org/10.1116/6.0001409

Published: December 2021

View article titled, Infrared reflection absorption spectroscopy and temperature-programmed desorption studies of CO adsorption on Ni/CeO2(111) thin films: The role of the ceria support

Journal Articles

Growth and characterization of II-VI semiconductor multilayer quantum-well structures for two-color quantum well infrared photodetector applications

Luis Hernandez-Mainet, Guopeng Chen, Amir Zangiabadi, Aidong Shen, Maria C. Tamargo

J. Vac. Sci. Technol. A 39, 033205 (2021)

https://doi.org/10.1116/6.0000947

Published: April 2021

View article titled, Growth and characterization of II-VI semiconductor multilayer quantum-well structures for two-color quantum well infrared photodetector applications

Journal Articles

Microstructure and optical properties of sputter-deposited Ga₂O₃ films

Eduardo Vega, Sundar B. Isukapati, Tom N. Oder

J. Vac. Sci. Technol. A 39, 033412 (2021)

https://doi.org/10.1116/6.0000938

Published: April 2021

View article titled, Microstructure and optical properties of sputter-deposited Ga2O3 films

Journal Articles

Correlation between electrical conductivity and luminescence properties in β-Ga₂O₃:Cr³⁺ and β-Ga₂O₃:Cr,Mg single crystals

Vyacheslav Vasyltsiv, Andriy Luchechko, Yaroslav Zhydachevskyy, Lyudmyla Kostyk, Roman Lys, Dmytro Slobodzyan, Rafał Jakieła, Bohdan Pavlyk, Andrzej Suchocki

J. Vac. Sci. Technol. A 39, 033201 (2021)

https://doi.org/10.1116/6.0000859

Published: March 2021

View article titled, Correlation between electrical conductivity and luminescence properties in β-Ga2O3:Cr3+ and β-Ga2O3:Cr,Mg single crystals

Journal Articles

Fabrication and characterization of inkjet-printed 2D perovskite optoelectronic devices

Misook Min, Ridwan F. Hossain, Liang-Chieh Ma, Anupama B. Kaul

J. Vac. Sci. Technol. A 38, 052202 (2020)

https://doi.org/10.1116/6.0000083

Published: August 2020

View article titled, Fabrication and characterization of inkjet-printed 2D perovskite optoelectronic devices

Journal Articles

Vacuum ultraviolet-absorption spectroscopy and delocalized plasma-induced emission used for the species detection in a down-stream soft-etch plasma reactor

Robert Soriano, Gilles Cunge, Nader Sadeghi

J. Vac. Sci. Technol. A 38, 043002 (2020)

https://doi.org/10.1116/6.0000134

Published: June 2020

View article titled, Vacuum ultraviolet-absorption spectroscopy and delocalized plasma-induced emission used for the species detection in a down-stream soft-etch plasma reactor

Journal Articles

Investigating recent developments and applications of optical plasma spectroscopy: A review

Angela R. Hanna, Ellen R. Fisher

J. Vac. Sci. Technol. A 38, 020806 (2020)

https://doi.org/10.1116/1.5141844

Published: February 2020

View article titled, Investigating recent developments and applications of optical plasma spectroscopy: A review

Includes: Supplementary data

NARROW

Topics

Elusive supported surface M₂O_x dimer active site (M = Re, W, Mo, Cr, V, Nb, and Ta)

Inherent area selective deposition of silicon dioxide in multilayer 3D SiO_x–SiN_x stacks

Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra

Melt-grown semi-insulating Mn:β-Ga₂O₃ single crystals exhibiting unique visible absorptions and luminescence

Understanding the unique optical and vibrational signatures of sequential infiltration synthesis derived indium oxyhydroxide clusters for CO₂ absorption

Nitrogen centers in single crystal diamond grown by chemical vapor deposition

Limiting reagent conditions to control inorganic loading in AlO_x–PET hybrid fabrics created through vapor-phase infiltration

Nanosecond pulsed plasma discharge for remediation of simulated wastewater containing thiazine and azo dyes as model pollutants

Quantitative analysis of composition and temperature of semiconductor processing plasmas via terahertz spectroscopy

Amorphous semi-insulating Al-doped In₂O₃ growth by atomic layer deposition for thin-film transistors

Effect of substrate and substrate temperature on the deposition of MoS₂ by radio frequency magnetron sputtering

Room-temperature atomic layer deposition of iron oxide using plasma excited humidified argon

Use of in situ electrical conductance measurements to understand the chemical mechanisms and chamber wall effects during vapor phase infiltration doping of poly(aniline) with TiCl₄ + H₂O

Infrared reflection absorption spectroscopy and temperature-programmed desorption studies of CO adsorption on Ni/CeO₂(111) thin films: The role of the ceria support

Growth and characterization of II-VI semiconductor multilayer quantum-well structures for two-color quantum well infrared photodetector applications

Microstructure and optical properties of sputter-deposited Ga₂O₃ films

Correlation between electrical conductivity and luminescence properties in β-Ga₂O₃:Cr³⁺ and β-Ga₂O₃:Cr,Mg single crystals

Fabrication and characterization of inkjet-printed 2D perovskite optoelectronic devices

Vacuum ultraviolet-absorption spectroscopy and delocalized plasma-induced emission used for the species detection in a down-stream soft-etch plasma reactor

Investigating recent developments and applications of optical plasma spectroscopy: A review

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