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Journal Articles

AI-guided frame prediction techniques to model single crystal diamond growth

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Rohan Reddy Mekala, Arjun Srinivasan, Matthias Muehle, Elias Garratt, Adam Porter, Mikael Lindvall
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032708 (2025)
https://doi.org/10.1116/6.0004290
Published: May 2025
View articletitled, AI-guided frame prediction techniques to model single crystal diamond growth
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Journal Articles

Plasma-free hydrogenation of oxygen-terminated polycrystalline diamond as determined by circular transmission line measurements (CTLM)

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Dylan M. Evans, Clint D. Frye
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033201 (2025)
https://doi.org/10.1116/6.0004337
Published: March 2025
View articletitled, Plasma-free hydrogenation of oxygen-terminated polycrystalline diamond as determined by circular transmission line measurements (CTLM)
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Journal Articles

Micromechanical properties of micro- and nanocrystalline CVD diamond thin films with gradient microstructures and stresses

Editor’s PickAvailable to Purchase
M. Meindlhumer, T. Ziegelwanger, J. Grau, H. Sternschulte, M. Sztucki, D. Steinmüller-Nethl, J. Keckes
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023401 (2024)
https://doi.org/10.1116/6.0003235
Published: January 2024
View articletitled, Micromechanical properties of micro- and nanocrystalline CVD diamond thin films with gradient microstructures and stresses
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Includes: Supplementary data
Journal Articles

Nitrogen centers in single crystal diamond grown by chemical vapor deposition

Open Access
D. S. Misra
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 042703 (2023)
https://doi.org/10.1116/6.0002622
Published: May 2023
View articletitled, Nitrogen centers in single crystal diamond grown by chemical vapor deposition
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Journal Articles

X-ray spectroscopic identification of strain and structure-based resonances in a series of saturated carbon-cage molecules: Adamantane, twistane, octahedrane, and cubane

Open Access
Trevor M. Willey, Jonathan R. I. Lee, Daniel Brehmer, Oscar A. Paredes Mellone, Lasse Landt, Peter R. Schreiner, Andrey A. Fokin, Boryslav A. Tkachenko, Armin de Meijere, Sergei Kozhushkov, Anthony W. van Buuren
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 053208 (2021)
https://doi.org/10.1116/6.0001150
Published: August 2021
View articletitled, X-ray spectroscopic identification of strain and structure-based resonances in a series of saturated carbon-cage molecules: Adamantane, twistane, octahedrane, and cubane
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Journal Articles

Epitaxial growth of 3C-SiC film by microwave plasma chemical vapor deposition in H2-CH4-SiH4 mixtures: Optical emission spectroscopy study

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V. Yu. Yurov, V. G. Ralchenko, A. K. Martyanov, I. A. Antonova, V. S. Sedov, A. A. Khomich, V. V. Voronov, S. S. Savin, M. Y. Shevchenko, A. P. Bolshakov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 023002 (2021)
https://doi.org/10.1116/6.0000745
Published: February 2021
View articletitled, Epitaxial growth of 3C-SiC film by microwave plasma chemical vapor deposition in H2-CH4-SiH4 mixtures: Optical emission spectroscopy study
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Journal Articles

Unoccupied surface state induced by ozone and ammonia on H-terminated diamond electrodes for photocatalytic ammonia synthesis

Editor’s PickFree
Idris Boukahil, Phillip S. Johnson, F. J. Himpsel, Ruimin Qiao, Jason A. Bandy, Robert J. Hamers
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 04D102 (2017)
https://doi.org/10.1116/1.4980041
Published: April 2017
View articletitled, Unoccupied surface state induced by ozone and ammonia on H-terminated diamond electrodes for photocatalytic ammonia synthesis
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Journal Articles

Hydrogenation effects on carrier transport in boron-doped ultrananocrystalline diamond/amorphous carbon films prepared by coaxial arc plasma deposition

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Yūki Katamune, Satoshi Takeichi, Shinya Ohmagari, Tsuyoshi Yoshitake
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 061514 (2015)
https://doi.org/10.1116/1.4931062
Published: September 2015
View articletitled, Hydrogenation effects on carrier transport in boron-doped ultrananocrystalline diamond/amorphous carbon films prepared by coaxial arc plasma deposition
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Journal Articles

Toroidal plasma enhanced CVD of diamond films

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John Zvanya, William Holber, Christopher Cullen, Thomas Morris, Andrew Basnett, Robert Basnett, Jeffrey Hettinger, Robert R. Krchnavek
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 050605 (2014)
https://doi.org/10.1116/1.4893416
Published: August 2014
View articletitled, Toroidal plasma enhanced CVD of diamond films
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Journal Articles

Controlling the work function of a diamond-like carbon surface by fluorination with XeF 2

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Ana Tarditi, Petro Kondratyuk, Pak Kin Wong, Andrew J. Gellman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 1250–1254 (2010)
https://doi.org/10.1116/1.3480335
Published: September 2010
View articletitled, Controlling the work function of a diamond-like carbon surface by fluorination with XeF 2
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Journal Articles

Nanopatterning of ultrananocrystalline diamond thin films via block copolymer lithography

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Muruganathan Ramanathan, Seth B. Darling, Anirudha V. Sumant, Orlando Auciello
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 979–983 (2010)
https://doi.org/10.1116/1.3299260
Published: June 2010
View articletitled, Nanopatterning of ultrananocrystalline diamond thin films via block copolymer lithography
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Journal Articles

Effect of methane addition on ultrananocrystalline diamond formation: Morphology changes and induced stress

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S. C. Ramos, A. F. Azevedo, M. R. Baldan, N. G. Ferreira
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 27–32 (2010)
https://doi.org/10.1116/1.3259885
Published: November 2009
View articletitled, Effect of methane addition on ultrananocrystalline diamond formation: Morphology changes and induced stress
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Journal Articles

Effect of oxygen on growth and properties of diamond thin film deposited at low surface temperature

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D. Das, Raj N. Singh, I. T. Barney, A. G. Jackson, S. M. Mukhopadhyay
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 1487–1496 (2008)
https://doi.org/10.1116/1.2998807
Published: October 2008
View articletitled, Effect of oxygen on growth and properties of diamond thin film deposited at low surface temperature
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Journal Articles

In vacuo substrate pretreatments for enhancing nanodiamond formation in electron cyclotron resonance plasma

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Kungen Teii, Yutaka Kouzuma, Kiichiro Uchino
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1802–1806 (2006)
https://doi.org/10.1116/1.2221322
Published: August 2006
View articletitled, In vacuo substrate pretreatments for enhancing nanodiamond formation in electron cyclotron resonance plasma
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Journal Articles

Thermal conductivity of AlN-diamond particulate composite films on silicon

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K. Jagannadham
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 895–899 (2006)
https://doi.org/10.1116/1.2198862
Published: May 2006
View articletitled, Thermal conductivity of AlN-diamond particulate composite films on silicon
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Journal Articles

Raman spectroscopy study of the influence of processing conditions on the structure of polycrystalline diamond films

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R. Ramamurti, V. Shanov, R. N. Singh, S. Mamedov, P. Boolchand
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 179–189 (2006)
https://doi.org/10.1116/1.2150228
Published: February 2006
View articletitled, Raman spectroscopy study of the influence of processing conditions on the structure of polycrystalline diamond films
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Journal Articles

Diamond microstructures fabricated using silicon molds

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M. C. Salvadori, D. R. Martins, R. D. Mansano, P. Verdonck, I. G. Brown
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 1575–1578 (2005)
https://doi.org/10.1116/1.2091095
Published: October 2005
View articletitled, Diamond microstructures fabricated using silicon molds
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Journal Articles

X-ray photoelectron spectroscopic observation on B–C–N hybrids synthesized by ion beam deposition of borazine

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Md. Nizam Uddin, Iwao Shimoyama, Yuji Baba, Tetsuhiro Sekiguchi, Masamitsu Nagano
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 497–502 (2005)
https://doi.org/10.1116/1.1894667
Published: April 2005
View articletitled, X-ray photoelectron spectroscopic observation on B–C–N hybrids synthesized by ion beam deposition of borazine
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Journal Articles

Organosilane self-assembled monolayers directly linked to the diamond surfaces

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Riichiro Ohta, Nagahiro Saito, Yasushi Inoue, Hiroyuki Sugimura, Osamu Takai
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 2005–2009 (2004)
https://doi.org/10.1116/1.1776184
Published: September 2004
View articletitled, Organosilane self-assembled monolayers directly linked to the diamond surfaces
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Journal Articles

Growth of diamond film on single crystal lithium niobate for surface acoustic wave devices

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K. Jagannadham, M. J. Lance, T. R. Watkins
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 1105–1109 (2004)
https://doi.org/10.1116/1.1740770
Published: May 2004
View articletitled, Growth of diamond film on single crystal lithium niobate for surface acoustic wave devices
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