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Journal Articles

Electrochromic properties of NiO films prepared by atomic layer deposition

Xi Su, Zexin Tu, Liwei Ji, Hao Wu, Hongxing Xu, Chang Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062407 (2023)
https://doi.org/10.1116/6.0003040
Published: October 2023
View article titled, Electrochromic properties of NiO films prepared by atomic layer deposition
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Journal Articles

Phase composition of polycrystalline HfNx (0.45 ≤ x ≤ 1.60) and effects of low-energy ion irradiation on microstructure, texture, and physical properties

Hwan-Seok Seo, Taeyoon Lee, Hyungjun Kim, Ivan Petrov, J. E. Greene
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063406 (2023)
https://doi.org/10.1116/6.0003072
Published: October 2023
View article titled, Phase composition of polycrystalline HfN<sub>x</sub> (0.45 ≤ x ≤ 1.60) and effects of low-energy ion irradiation on microstructure, texture, and physical properties
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Journal Articles

Stabilization of the tetragonal phase in ZrO2 thin films according to ozone concentration using atomic layer deposition

Seokhwi Song, Eungju Kim, Kyunghoo Kim, Jangho Bae, Jinho Lee, Chang Hwa Jung, Hanjin Lim, Hyeongtag Jeon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062404 (2023)
https://doi.org/10.1116/6.0002901
Published: October 2023
View article titled, Stabilization of the tetragonal phase in ZrO<sub>2</sub> thin films according to ozone concentration using atomic layer deposition
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Journal Articles

Plasma-enhanced atomic layer deposition of crystalline GaN thin films on quartz substrates with sharp interfaces

Sanjie Liu, Yangfeng Li, Qing Liu, Jiayou Tao, Xinhe Zheng
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052405 (2023)
https://doi.org/10.1116/6.0002639
Published: August 2023
View article titled, Plasma-enhanced atomic layer deposition of crystalline GaN thin films on quartz substrates with sharp interfaces
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Journal Articles

Low temperature epitaxial growth of Cantor-nitride thin films by magnetic field assisted magnetron sputtering

Smita G. Rao, Pascal Manuel Illgner, Robert Boyd, Gyula Nagy, Philippe Djemia, Daniel Primetzhofer, Ivan Petrov, Arnaud le Febvrier, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053415 (2023)
https://doi.org/10.1116/6.0002947
Published: August 2023
View article titled, Low temperature epitaxial growth of Cantor-nitride thin films by magnetic field assisted magnetron sputtering
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Includes: Supplementary data
Journal Articles

Work function measurement by ultraviolet photoelectron spectroscopy: Versailles project on advanced materials and standards interlaboratory study

Jeong Won Kim, Ansoon Kim, Hui Ung Hwang, Jun Hyung Kim, Seungwook Choi, Norbert Koch, Dongguen Shin, Zhijuan Zhao, Fen Liu, Minki Choi, Kyu Myung Lee, Yongsup Park
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053211 (2023)
https://doi.org/10.1116/6.0002852
Published: August 2023
View article titled, Work function measurement by ultraviolet photoelectron spectroscopy: Versailles project on advanced materials and standards interlaboratory study
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Journal Articles

Impacts of specific element-treated three-dimensional GaN layer on characteristics of nonpolar a-plane GaN film

Yifeng Xu, Xiong Zhang, Ruiting Fang, Xuguang Luo, Lin Chen, Shenyu Xu, Zhiyi Lou, Jia Cui, Guohua Hu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052706 (2023)
https://doi.org/10.1116/6.0002834
Published: August 2023
View article titled, Impacts of specific element-treated three-dimensional GaN layer on characteristics of nonpolar <em>a</em>-plane GaN film
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Journal Articles

Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon

Heli Seppänen, Igor Prozheev, Christoffer Kauppinen, Sami Suihkonen, Kenichiro Mizohata, Harri Lipsanen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052401 (2023)
https://doi.org/10.1116/6.0002705
Published: July 2023
View article titled, Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon
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Journal Articles

High quality β-Ga2O3 bulk crystals, grown by edge-defined film-fed growth method: Growth features, structural, and thermal properties

Dmitrii A. Bauman, Dmitrii Iu. Panov, Vladislav A. Spiridonov, Arina V. Kremleva, Aleksei V. Asach, Ekaterina V. Tambulatova, A. V. Sakharov, Alexey E. Romanov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053203 (2023)
https://doi.org/10.1116/6.0002644
Published: July 2023
View article titled, High quality β-Ga<sub>2</sub>O<sub>3</sub> bulk crystals, grown by edge-defined film-fed growth method: Growth features, structural, and thermal properties
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Journal Articles

Reactive plasma sputtering deposition of polycrystalline GaN thin films on silicon substrates at room temperature

Lakshman Srinivasan, Cyril Jadaud, François Silva, Jean-Charles Vanel, Jean-Luc Maurice, Erik Johnson, Pere Roca i Cabarrocas, Karim Ouaras
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053407 (2023)
https://doi.org/10.1116/6.0002718
Published: July 2023
View article titled, Reactive plasma sputtering deposition of polycrystalline GaN thin films on silicon substrates at room temperature
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Journal Articles

Design of a custom vapor transport co-deposition system for scalable production of perovskite solar cells

Ella Wassweiler, Anurag Panda, Tamar Kadosh, Thienan Nguyen, Wan-Ju Hsu, Emma Pettit, Russell J. Holmes, Harry Tuller, Vladimir Bulovic
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052801 (2023)
https://doi.org/10.1116/6.0002668
Published: July 2023
View article titled, Design of a custom vapor transport co-deposition system for scalable production of perovskite solar cells
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Includes: Supplementary data
Journal Articles

Room temperature magnetron sputtering and laser annealing of ultrathin amorphous sulfur-rich MoSx films

Spencer Gellerup, Corey L. Arnold, Christopher Muratore, Nicholas R. Glavin, Nigel D. Shepherd, Andrey A. Voevodin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053405 (2023)
https://doi.org/10.1116/6.0002544
Published: July 2023
View article titled, Room temperature magnetron sputtering and laser annealing of ultrathin amorphous sulfur-rich MoS<sub>x</sub> films
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Includes: Supplementary data
Journal Articles

Ultrathin stable Ohmic contacts for high-temperature operation of β-Ga2O3 devices

William A. Callahan, Edwin Supple, David Ginley, Michael Sanders, Brian P. Gorman, Ryan O’Hayre, Andriy Zakutayev
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043211 (2023)
https://doi.org/10.1116/6.0002645
Published: June 2023
View article titled, Ultrathin stable Ohmic contacts for high-temperature operation of <em>β</em>-Ga<sub>2</sub>O<sub>3</sub> devices
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Includes: Supplementary data
Journal Articles

Dependence of persistent photoconductivity on the thickness of β-Ga2O3 thin film photodetectors on c-plane sapphire via magnetron sputtering

Damanpreet Kaur, Rohit Dahiya, Mukesh Kumar
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043410 (2023)
https://doi.org/10.1116/6.0002646
Published: June 2023
View article titled, Dependence of persistent photoconductivity on the thickness of β-Ga<sub>2</sub>O<sub>3</sub> thin film photodetectors on <em>c</em>-plane sapphire via magnetron sputtering
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Journal Articles

Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution

Antoine Pacco, Teppei Nakano, Shota Iwahata, Akihisa Iwasaki, Efrain Altamirano Sanchez
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 032601 (2023)
https://doi.org/10.1116/6.0002404
Published: March 2023
View article titled, Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution
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Includes: Supplementary data
Journal Articles

Effects of processing parameters on the morphologies of complex sesquioxide thin films

Sofia K. Pinzon, James A. Valdez, Vancho Kocevski, J. K. Baldwin, Blas P. Uberuaga, Cortney R. Kreller, Benjamin K. Derby
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033404 (2023)
https://doi.org/10.1116/6.0002398
Published: March 2023
View article titled, Effects of processing parameters on the morphologies of complex sesquioxide thin films
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Includes: Supplementary data
Journal Articles

Atomic layer deposition of Cu2O using copper acetylacetonate

Gabriel Bartholazzi, M. M. Shehata, Daniel H. Macdonald, Lachlan E. Black
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 022402 (2023)
https://doi.org/10.1116/6.0002238
Published: February 2023
View article titled, Atomic layer deposition of Cu<sub>2</sub>O using copper acetylacetonate
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Journal Articles

Thermal versus radiation-assisted defect annealing in β-Ga2O3

Alexander Azarov, Vishnukanthan Venkatachalapathy, In-Hwan Lee, Andrej Kuznetsov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023101 (2023)
https://doi.org/10.1116/6.0002388
Published: January 2023
View article titled, Thermal versus radiation-assisted defect annealing in β-Ga<sub>2</sub>O<sub>3</sub>
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Journal Articles

On the possible nature of deep centers in Ga2O3

A. Y. Polyakov, A. I. Kochkova, Amanda Langørgen, Lasse Vines, A. Vasilev, I. V. Shchemerov, A. A. Romanov, S. J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023401 (2023)
https://doi.org/10.1116/6.0002307
Published: January 2023
View article titled, On the possible nature of deep centers in Ga<sub>2</sub>O<sub>3</sub>
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Includes: Supplementary data
Journal Articles

Aluminum nitride crystal-based photodetector with bias polarity-dependent spectral selectivity

Zelong Fan, Zuoyan Qin, Lei Jin, Yuan Cao, Zhongyu Yue, Baikui Li, Honglei Wu, Zhenhua Sun
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 013204 (2023)
https://doi.org/10.1116/5.0133162
Published: December 2022
View article titled, Aluminum nitride crystal-based photodetector with bias polarity-dependent spectral selectivity
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Includes: Supplementary data