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Journal Articles
J. Vac. Sci. Technol. A 42, 043406 (2024)
Published: May 2024
Includes: Supplementary data
Journal Articles
Partha Mukhopadhyay, Ivan Fletcher, Zuriel Caribe Couvertier, Brent Schwab, John Gumpher, Winston V. Schoenfeld, Jon Kretzschmar, Anton deVilliers, Jim Fulford
J. Vac. Sci. Technol. A 42, 032401 (2024)
Published: March 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 022403 (2024)
Published: February 2024
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 42, 022703 (2024)
Published: January 2024
Journal Articles
Hsiao-Hsuan Wan, Jian-Sian Li, Chao-Ching Chiang, Xinyi Xia, David C. Hays, Fan Ren, Stephen J. Pearton
J. Vac. Sci. Technol. A 41, 063205 (2023)
Published: September 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 052704 (2023)
Published: July 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 013402 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 062706 (2022)
Published: November 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 033404 (2022)
Published: April 2022
Journal Articles
Joseph P. Corbett, Margaret M. Brown, Tobin C. Muratore, Ryan P. Laing, Jeff L. Brown, Jay A. Gupta, Amber N. Reed
J. Vac. Sci. Technol. A 39, 063412 (2021)
Published: November 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 063410 (2021)
Published: October 2021
Journal Articles
Md. Istiaque Chowdhury, Mark Sowa, Kylie E. Van Meter, Tomas F. Babuska, Tomas Grejtak, Alexander C. Kozen, Brandon A. Krick, Nicholas C. Strandwitz
J. Vac. Sci. Technol. A 39, 053408 (2021)
Published: August 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 052801 (2021)
Published: July 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 022406 (2021)
Published: February 2021
Includes: Supplementary data
Journal Articles
Michael A. Mastro, Charles R. Eddy, Jr., Marko J. Tadjer, Jennifer K. Hite, Jihyun Kim, Stephen J. Pearton
J. Vac. Sci. Technol. A 39, 013408 (2021)
Published: December 2020
Journal Articles
J. Vac. Sci. Technol. A 39, 013001 (2021)
Published: December 2020
Journal Articles
Kedong Zhang, Rui Pan, Shunji Xia, Wangwei Zhang, Menglin Chang, Yuanfeng Ding, Chen Li, Yu Deng, Hong Lu, Yan-Feng Chen
J. Vac. Sci. Technol. A 38, 060402 (2020)
Published: November 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 033405 (2020)
Published: April 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 023406 (2020)
Published: February 2020
Journal Articles
J. Vac. Sci. Technol. A 37, 051501 (2019)
Published: July 2019
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