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Journal Articles

Insight into the mechanism of lattice damage in ground and polished InAs substrates

Xinyu Lv, Hui Xie, Chenhui Li, Wenwen Yang, Yihan Bai, Guowei Wang, Youwen Zhao, Yingqiang Xu, Lijie Liu, Li He, Guiying Shen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033208 (2025)
https://doi.org/10.1116/6.0004487
Published: April 2025
View articletitled, Insight into the mechanism of lattice damage in ground and polished InAs substrates
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Journal Articles

Effects cascade debris and helium bubbles on the strength of aged plutonium

Wilhelm G. Wolfer, Jason R. Jeffries
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033206 (2025)
https://doi.org/10.1116/6.0004486
Published: April 2025
View articletitled, Effects cascade debris and helium bubbles on the strength of aged plutonium
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Journal Articles

Perspective on comparative radiation hardness of Ga2O3 polymorphs

Featured
S. J. Pearton, Fan Ren, Alexander Y. Polyakov, Eugene B. Yakimov, Leonid Chernyak, Aman Haque
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 038501 (2025)
https://doi.org/10.1116/6.0004444
Published: March 2025
View articletitled, Perspective on comparative radiation hardness of Ga2O3 polymorphs
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Journal Articles

Role of a cyclopentadienyl ligand in Hf precursors using H2O or O3 as oxidant in atomic layer deposition

Editor’s Pick
Youngmin Song, Hui-Jin Kim, Soo Hyun Lee, Sujin Kwon, Bonggeun Shong, Il-Kwon Oh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022414 (2025)
https://doi.org/10.1116/6.0004358
Published: March 2025
View articletitled, Role of a cyclopentadienyl ligand in Hf precursors using H2O or O3 as oxidant in atomic layer deposition
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Journal Articles

Effects of ozone on physical and electrical properties of In–Ga–Zn–O film by thermal atomic layer deposition

Yongqing Shen, Xinlv Duan, Jinjuan Xiang, Zhengying Jiao, Liguo Chai, Xueli Ma, Yuting Chen, Di Geng, Guilei Wang, Chao Zhao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022411 (2025)
https://doi.org/10.1116/6.0004355
Published: February 2025
View articletitled, Effects of ozone on physical and electrical properties of In–Ga–Zn–O film by thermal atomic layer deposition
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Journal Articles

Remote plasma assisted processing and semiconductor interface electronic structure

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Leonard J. Brillson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 020801 (2025)
https://doi.org/10.1116/6.0004200
Published: January 2025
View articletitled, Remote plasma assisted processing and semiconductor interface electronic structure
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Journal Articles

Molecular dynamics investigation of heteroepitaxial growth of quaternary AlInGaN on wurtzite-GaN surface along [0001] direction

Anuj Debnath, Chandan K. Das
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 012702 (2025)
https://doi.org/10.1116/6.0004113
Published: December 2024
View articletitled, Molecular dynamics investigation of heteroepitaxial growth of quaternary AlInGaN on wurtzite-GaN surface along [0001] direction
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Journal Articles

Oxidation behavior of TiB2–SiC nanocomposite coatings deposited by magnetron sputtering

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Yuanxing Wu, Qizhong Li, Rong Tu, Takashi Goto
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063109 (2024)
https://doi.org/10.1116/6.0004075
Published: November 2024
View articletitled, Oxidation behavior of TiB2–SiC nanocomposite coatings deposited by magnetron sputtering
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Journal Articles

Insights into the genesis of oxygen vacancies and atomically dispersed Niδ− species in anatase TiO2: A spectroscopic study

Xiaoqiang Zhang, Yuteng Feng, Wei Zhang, Changhui Liang, Huixiang Li, Yongxin Li, Z. Conrad Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063208 (2024)
https://doi.org/10.1116/6.0003969
Published: October 2024
View articletitled, Insights into the genesis of oxygen vacancies and atomically dispersed Niδ− species in anatase TiO2: A spectroscopic study
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Journal Articles

Removing defects from sputter damage on InGaP surfaces using thermal atomic layer etching

Editor’s Pick
Ross Edel, Ezra Alexander, Taewook Nam, Andrew S. Cavanagh, Troy Van Voorhis, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 062602 (2024)
https://doi.org/10.1116/6.0003899
Published: October 2024
View articletitled, Removing defects from sputter damage on InGaP surfaces using thermal atomic layer etching
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Journal Articles

Influence of pre-rolling deformation on distribution characteristics of T1 precipitate in artificially aged Al–Cu–Li alloy

Shuwei Duan, Fuqiang Guo, Wenting Ma, Zhongli Liu, Xiaoyang Yi, Kenji Matsuda, Yue Li, Yong Zou
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 052701 (2024)
https://doi.org/10.1116/6.0003679
Published: July 2024
View articletitled, Influence of pre-rolling deformation on distribution characteristics of T1 precipitate in artificially aged Al–Cu–Li alloy
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Journal Articles

Microstructural evolution and strengthening behavior induced by N addition in TiVCrAl medium entropy alloy films

Z. Y. Zhang, L. Wang, Y. J. Ma, Y. W. Zhang, X. C. Shen, X. Hua, G. J. Li, Z. H. Cao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043410 (2024)
https://doi.org/10.1116/6.0003625
Published: June 2024
View articletitled, Microstructural evolution and strengthening behavior induced by N addition in TiVCrAl medium entropy alloy films
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Journal Articles

Density functional theory and molecular dynamics study on the growth of graphene by chemical vapor deposition on copper substrate

Qihang Li, Jinping Luo, Zaoyang Li, Mark H. Rummeli, Lijun Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 042202 (2024)
https://doi.org/10.1116/6.0003667
Published: June 2024
View articletitled, Density functional theory and molecular dynamics study on the growth of graphene by chemical vapor deposition on copper substrate
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Journal Articles

Microstructural features, martensitic transformation, and functional properties of multicomponent Ti–Ni based shape memory alloys

Haizhen Wang, Xinnuo Liu, Bowen Jiang, Xinjian Cao, Zhiyong Gao, Xiaoyang Yi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 042704 (2024)
https://doi.org/10.1116/6.0003622
Published: May 2024
View articletitled, Microstructural features, martensitic transformation, and functional properties of multicomponent Ti–Ni based shape memory alloys
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Journal Articles

Lattice defects distribution of H+ implanted 4H-SiC investigated by deep-ultraviolet Raman spectroscopy

Editor’s Pick
Gengyu Wang, Wenbo Luo, Dailei Zhu, Yuedong Wang, Yao Shuai, Chuangui Wu, Wanli Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043405 (2024)
https://doi.org/10.1116/6.0003643
Published: May 2024
View articletitled, Lattice defects distribution of H+ implanted 4H-SiC investigated by deep-ultraviolet Raman spectroscopy
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Journal Articles

Novel 3D reciprocal space visualization of strain relaxation in InSb on GaAs substrates

Editor’s Pick
T. Blaikie, Y. Shi, M. C. Tam, B. D. Moreno, Z. R. Wasilewski
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 032704 (2024)
https://doi.org/10.1116/6.0003455
Published: April 2024
View articletitled, Novel 3D reciprocal space visualization of strain relaxation in InSb on GaAs substrates
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Journal Articles

Radiation damage effects on electronic and optical properties of β-Ga2O3 from first-principles

Xiaoning Zhang, Xi Liang, Xing Li, Yuan Li, Jia-Yue Yang, Linhua Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033201 (2024)
https://doi.org/10.1116/6.0003430
Published: March 2024
View articletitled, Radiation damage effects on electronic and optical properties of β-Ga2O3 from first-principles
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Includes: Supplementary data
Journal Articles

Intrinsic and extrinsic contributions in the ferroelectric response of chemically synthesized BiFeO3-xPbTiO3 thin films

Layiq Zia, Eesha Tur Razia, G. Hassnain Jaffari, S. Ismat Shah
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023114 (2024)
https://doi.org/10.1116/6.0003371
Published: February 2024
View articletitled, Intrinsic and extrinsic contributions in the ferroelectric response of chemically synthesized BiFeO3-xPbTiO3 thin films
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Journal Articles

Microstructures and improved properties of Cu–Mo alloys induced by high current pulsed electron beam irradiation

Fangqiang Guo, Conglin Zhang, Jintong Guan, Chengjian Ma, Zirun Yang, Qingfeng Guan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023112 (2024)
https://doi.org/10.1116/6.0003374
Published: February 2024
View articletitled, Microstructures and improved properties of Cu–Mo alloys induced by high current pulsed electron beam irradiation
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Journal Articles

Review on ultrahigh growth rate GaAs solar cells by metalorganic vapor-phase epitaxy

Robin Lang, Christoph Klein, Jens Ohlmann, Frank Dimroth, David Lackner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 020801 (2024)
https://doi.org/10.1116/6.0003393
Published: February 2024
View articletitled, Review on ultrahigh growth rate GaAs solar cells by metalorganic vapor-phase epitaxy
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