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Journal Articles
Xin Li, Zixiang Zhou, Chenglei Wang, Haiqing Qin, Jijie Yang, Weijie Liu, Mulin Liang, Chong Liu, Hong Tan, Zhenjun Zhang
J. Vac. Sci. Technol. A 41, 063105 (2023)
Published: September 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 063103 (2023)
Published: September 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 063102 (2023)
Published: September 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 053109 (2023)
Published: August 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 053108 (2023)
Published: August 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 053107 (2023)
Published: July 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 053103 (2023)
Published: July 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 043210 (2023)
Published: June 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 043105 (2023)
Published: June 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 043103 (2023)
Published: May 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 033101 (2023)
Published: March 2023
Journal Articles
Achieving high tribological and corrosion performances via a new approach: Al2O3/CrN duplex coatings
J. Vac. Sci. Technol. A 41, 023103 (2023)
Published: February 2023
Journal Articles
Olayinka O. Abegunde, Mohammed Makha, Hicham Larhlimi, Mohamed Lahouij, Youssef Samih, Heinz Busch, Jones Alami
J. Vac. Sci. Technol. A 41, 013101 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 030801 (2022)
Published: April 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 033405 (2022)
Published: April 2022
Journal Articles
K. Bobzin, T. Brögelmann, N. C. Kruppe, H. J. Maier, T. Heidenblut, H.-B. Besserer, C. Kahra, J. Janowitz
J. Vac. Sci. Technol. A 40, 013414 (2022)
Published: December 2021
Journal Articles
Vaithiyalingam Shutthanandan, Abraham Martinez, Tamas Varga, Arun Devaraj, Swadipta Roy, Elizabeth Stephens, Olga A. Marina, Suntharampillai Thevuthasan, Vijayakumar Murugesan, Vineet Joshi
J. Vac. Sci. Technol. A 39, 063213 (2021)
Published: October 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 063404 (2021)
Published: September 2021
Journal Articles
Émile Lalande, Alexandre W. Lussier, Carl Lévesque, Marianne Ward, Bill Baloukas, Ludvik Martinu, Gabriele Vajente, Garilynn Billingsley, Alena Ananyeva, Riccardo Bassiri, Martin M. Fejer, François Schiettekatte
J. Vac. Sci. Technol. A 39, 043416 (2021)
Published: June 2021
Journal Articles
Meihua Shen, Thorsten Lill, Nick Altieri, John Hoang, Steven Chiou, Jim Sims, Andrew McKerrow, Rafal Dylewicz, Ernest Chen, Hamid Razavi, Jane P. Chang
J. Vac. Sci. Technol. A 38, 060802 (2020)
Published: September 2020
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