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Journal Articles
J. Vac. Sci. Technol. A 40, 032801 (2022)
Published: March 2022
Journal Articles
J. Vac. Sci. Technol. A 35, 020602 (2017)
Published: November 2016
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 33, 061517 (2015)
Published: October 2015
Journal Articles
J. Vac. Sci. Technol. A 26, 898–902 (2008)
Published: July 2008
Journal Articles
J. Vac. Sci. Technol. A 23, 1006–1009 (2005)
Published: June 2005
Journal Articles
J. Vac. Sci. Technol. A 18, 2230–2238 (2000)
Published: September 2000
Journal Articles
Mitsuru Imaizumi, Kazuhiko Okitsu, Masafumi Yamaguchi, Tamio Hara, Tadashi Ito, Ichiro Konomi, Masahito Ban, Masakuni Tokai, Kazuhiko Kawamura
J. Vac. Sci. Technol. A 16, 3134–3137 (1998)
Published: September 1998