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Journal Articles

Al2O3 atomic layer deposition on a porous matrix of carbon fibers (FiberForm) for oxidation resistance

Jack T. Widmer, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062412 (2023)
https://doi.org/10.1116/6.0003085
Published: November 2023
View article titled, Al<sub>2</sub>O<sub>3</sub> atomic layer deposition on a porous matrix of carbon fibers (FiberForm) for oxidation resistance
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Journal Articles

Study of Al2124-SiC nanocomposites by an improved statistical nanoindentation methodology

Esteban Broitman, Yuri Kadin, Predrag Andric
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063210 (2023)
https://doi.org/10.1116/6.0003048
Published: November 2023
View article titled, Study of Al2124-SiC nanocomposites by an improved statistical nanoindentation methodology
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Journal Articles

Surface functionalization of microporous carbon fibers by vapor phase methods for CO2 capture

Stephan Prünte, Gerben van Straaten, Dries van Eyck, Oscar Diaz-Morales, Jeroen Van Dijck, Hans de Neve, Mariadriana Creatore
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 032403 (2023)
https://doi.org/10.1116/6.0002419
Published: March 2023
View article titled, Surface functionalization of microporous carbon fibers by vapor phase methods for CO<sub>2</sub> capture
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Includes: Supplementary data
Journal Articles

Plasma-enhanced atomic layer deposition of WO3-SiO2 films using a heteronuclear precursor

Kamesh Mullapudi, Konner E. K. Holden, Jessica L. Peterson, Charles L. Dezelah, Daniel F. Moser, Ravindra K. Kanjolia, Douglas J. Tweet, John F. Conley, Jr
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 012406 (2023)
https://doi.org/10.1116/6.0002214
Published: December 2022
View article titled, Plasma-enhanced atomic layer deposition of WO<sub>3</sub>-SiO<sub>2</sub> films using a heteronuclear precursor
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Includes: Supplementary data
Journal Articles

Magnetron sputtered NiAl/TiBx multilayer thin films

Tomasz Wojcik, Vincent Ott, Sedat Özbilen, Harald Leiste, Sven Ulrich, Paul Heinz Mayrhofer, Helmut Riedl, Michael Stueber
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033410 (2022)
https://doi.org/10.1116/6.0001734
Published: April 2022
View article titled, Magnetron sputtered NiAl/TiB<sub>x</sub> multilayer thin films
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Journal Articles

Atomic layer deposition of titanium phosphate onto reinforcing fibers using titanium tetrachloride, water, and tris(trimethylsilyl) phosphate as precursors

Pauline Dill, Xiang Ren, Helen Hintersatz, Mathias Franz, Doreen Dentel, Christoph Tegenkamp, Susann Ebert
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 022403 (2022)
https://doi.org/10.1116/6.0001514
Published: January 2022
View article titled, Atomic layer deposition of titanium phosphate onto reinforcing fibers using titanium tetrachloride, water, and tris(trimethylsilyl) phosphate as precursors
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Includes: Supplementary data
Journal Articles

Atomic layer deposition onto fabrics of carbon and silicon carbide fibers: Preparation of multilayers comprising alumina, titania-furfuryl alcohol hybrid, and titanium phosphate

Pauline Dill, Florian Pachel, Christian Militzer, Alexander Held, Georg Puchas, Stefan Knohl, Walter Krenkel, Christoph Tegenkamp, Werner Andreas Goedel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 052406 (2021)
https://doi.org/10.1116/6.0001193
Published: August 2021
View article titled, Atomic layer deposition onto fabrics of carbon and silicon carbide fibers: Preparation of multilayers comprising alumina, titania-furfuryl alcohol hybrid, and titanium phosphate
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Includes: Supplementary data
Journal Articles

Molecular layer deposition of Nylon 2,6 polyamide polymer on flat and particle substrates in an isothermal enclosure containing a rotary reactor

Tyler J. Myers, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 052405 (2021)
https://doi.org/10.1116/6.0001162
Published: August 2021
View article titled, Molecular layer deposition of Nylon 2,6 polyamide polymer on flat and particle substrates in an isothermal enclosure containing a rotary reactor
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Journal Articles

Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures

Matti Putkonen, Pirjo Heikkilä, Antti T. Pasanen, Hille Rautkoski, Laura Svärd, Pekka Simell, Mika Vähä-Nissi, Timo Sajavaara
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 01A102 (2018)
https://doi.org/10.1116/1.4999826
Published: October 2017
View article titled, Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures
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Journal Articles

Adaptation of a dry metalorganic chemical vapor deposition metallization process to a wet chemical pretreatment of polymers

Anne Zhang, Fouzi Addou, Thomas Duguet, Nicolas Caussé, Constantin Vahlas
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 061101 (2017)
https://doi.org/10.1116/1.4986052
Published: August 2017
View article titled, Adaptation of a <em>dry</em> metalorganic chemical vapor deposition metallization process to a <em>wet</em> chemical pretreatment of polymers
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Journal Articles

Surface functionalization of carbon fibers with active screen plasma

Santiago Corujeira Gallo, Constantinos Charitidis, Hanshan Dong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 021404 (2017)
https://doi.org/10.1116/1.4974913
Published: January 2017
View article titled, Surface functionalization of carbon fibers with active screen plasma
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Journal Articles

Deposition of an organic–inorganic hybrid material onto carbon fibers via the introduction of furfuryl alcohol into the atomic layer deposition process of titania and subsequent pyrolysis

Christian Militzer, Stefan Knohl, Volodymyr Dzhagan, Dietrich R. T. Zahn, Werner A. Goedel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 01B107 (2017)
https://doi.org/10.1116/1.4965699
Published: November 2016
View article titled, Deposition of an organic–inorganic hybrid material onto carbon fibers via the introduction of furfuryl alcohol into the atomic layer deposition process of titania and subsequent pyrolysis
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Includes: Supplementary data
Journal Articles

Effect of helium pressure and flow rate on microplasma propagation along hollow-core fibers

Longfei Ji, Zhenhua Bi, Jinhai Niu, Xianhui Zhang, Renwu Zhou, Ying Song, Jiahong Liu, Dongping Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 021302 (2015)
https://doi.org/10.1116/1.4902967
Published: November 2014
View article titled, Effect of helium pressure and flow rate on microplasma propagation along hollow-core fibers
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Journal Articles

Inductively coupled plasma–reactive ion etching of c- and a-plane AlGaN over the entire Al composition range: Effect of BCl3 pretreatment in Cl2/Ar plasma chemistry

Amit P. Shah, Masihhur R. Laskar, A. Azizur Rahman, Maheshwar R. Gokhale, Arnab Bhattacharya
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 061305 (2013)
https://doi.org/10.1116/1.4818871
Published: August 2013
View article titled, Inductively coupled plasma–reactive ion etching of <em>c-</em> and <em>a-</em>plane AlGaN over the entire Al composition range: Effect of BCl<sub>3</sub> pretreatment in Cl<sub>2</sub>/Ar plasma chemistry
Open the PDF for Inductively coupled plasma–reactive ion etching of <em>c-</em> and <em>a-</em>plane AlGaN over the entire Al composition range: Effect of BCl<sub>3</sub> pretreatment in Cl<sub>2</sub>/Ar plasma chemistry in another window
Journal Articles

Atomic layer deposition onto carbon fiber: From single layer deposition via multilayer structure to metal oxide microtubes

Stefan Knohl, Amit Kumar Roy, Werner A. Goedel, Steffen Schulze, Michael Hietschold
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 01A139 (2013)
https://doi.org/10.1116/1.4768917
Published: December 2012
View article titled, Atomic layer deposition onto carbon fiber: From single layer deposition via multilayer structure to metal oxide microtubes
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Journal Articles

High resolution Raman imaging of single wall carbon nanotubes using electrochemically etched gold tips and a radially polarized annular beam

D. Roy, C. Williams
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 472–475 (2010)
https://doi.org/10.1116/1.3368499
Published: April 2010
View article titled, High resolution Raman imaging of single wall carbon nanotubes using electrochemically etched gold tips and a radially polarized annular beam
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Journal Articles

Modeling for calculation of vanadium oxide film composition in reactive-sputtering process

He Yu, Yadong Jiang, Tao Wang, Zhiming Wu, Junsheng Yu, Xiongbang Wei
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 466–471 (2010)
https://doi.org/10.1116/1.3400232
Published: April 2010
View article titled, Modeling for calculation of vanadium oxide film composition in reactive-sputtering process
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Journal Articles

Characterization of surface damage in AlSi alloys

J. Su, X. Nie, V. Stoilov, Q. Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 1096–1103 (2009)
https://doi.org/10.1116/1.3139898
Published: June 2009
View article titled, Characterization of surface damage in AlSi alloys
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Journal Articles

Photon emission during fracture of carbon materials

K. Yasuda, K. Yamamoto, T. Shiota, Y. Matsuo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 187–192 (2009)
https://doi.org/10.1116/1.3065677
Published: February 2009
View article titled, Photon emission during fracture of carbon materials
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Journal Articles

Physical vapor deposition synthesis of tungsten monocarbide (WC) thin films on different carbon substrates

E. C. Weigert, M. P. Humbert, Z. J. Mellinger, Q. Ren, T. P. Beebe, Jr., L. Bao, J. G. Chen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 23–28 (2008)
https://doi.org/10.1116/1.2806941
Published: December 2007
View article titled, Physical vapor deposition synthesis of tungsten monocarbide (WC) thin films on different carbon substrates
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