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Journal Articles

Fabrication of thick Cr masks for reactive ion substrate etching by electron beam lithography and lift-off techniques

Deyong Wang, Peter Kjær Kristensen, Manohar Chirumamilla, Kjeld Pedersen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063105 (2024)
https://doi.org/10.1116/6.0003965
Published: October 2024
View article titled, Fabrication of thick Cr masks for reactive ion substrate etching by electron beam lithography and lift-off techniques
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Journal Articles

Dislocation avalanches in nanostructured molybdenum nanopillars

Haw-Wen Hsiao, Jia-Hong Huang, Jian-Min Zuo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023412 (2024)
https://doi.org/10.1116/6.0003254
Published: January 2024
View article titled, Dislocation avalanches in nanostructured molybdenum nanopillars
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Journal Articles

Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by in situ scanning transmission electron microscopy

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Per O. Å. Persson, Johanna Rosen, Ivan Petrov, Justinas Palisaitis
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 020401 (2024)
https://doi.org/10.1116/6.0003389
Published: January 2024
View article titled, Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by <em>in situ</em> scanning transmission electron microscopy
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Includes: Supplementary data
Journal Articles

Apparatus design of operando hydrogen microscope for visualization of time-dependent distribution of hydrogen

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Naoya Miyauchi, Taro Yakabe, Yoshiharu Murase, Masahiro Kitajima, Shoji Takagi, Akiko N. Itakura
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 013201 (2024)
https://doi.org/10.1116/6.0003153
Published: December 2023
View article titled, Apparatus design of operando hydrogen microscope for visualization of time-dependent distribution of hydrogen
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Journal Articles

LixCoyOz thin-films deposition through thermal atomic layer deposition

Antoine Peisert, Noureddine Adjeroud, Damien Lenoble, Guillaume Lamblin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062403 (2023)
https://doi.org/10.1116/6.0002863
Published: October 2023
View article titled, Li<sub>x</sub>Co<sub>y</sub>O<sub>z</sub> thin-films deposition through thermal atomic layer deposition
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Journal Articles

Competition between ion beam sputtering and self-organization of point defects for surface nanostructuring on germanium

Naoto Oishi, Tatsuya Yasuoka, Toshiyuki Kawaharamura, Noriko Nitta
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063101 (2023)
https://doi.org/10.1116/6.0002878
Published: September 2023
View article titled, Competition between ion beam sputtering and self-organization of point defects for surface nanostructuring on germanium
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Includes: Supplementary data
Journal Articles

ToF-SIMS in battery research: Advantages, limitations, and best practices

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Teo Lombardo, Felix Walther, Christine Kern, Yannik Moryson, Timo Weintraut, Anja Henss, Marcus Rohnke
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053207 (2023)
https://doi.org/10.1116/6.0002850
Published: August 2023
View article titled, ToF-SIMS in battery research: Advantages, limitations, and best practices
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Includes: Supplementary data
Journal Articles

Ga+-focused ion beam damage in n-type Ga2O3

Xinyi Xia, Nahid Sultan Al-Mamun, Daudi Warywoba, Fan Ren, Aman Haque, S. J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 053403 (2022)
https://doi.org/10.1116/5.0099892
Published: August 2022
View article titled, Ga<sup>+</sup>-focused ion beam damage in n-type Ga<sub>2</sub>O<sub>3</sub>
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Journal Articles

Negative ion beam bombardment of a protic ionic liquid: Alleviating surface charging and damage and analyzing the surface of organic insulating materials

Yukio Fujiwara, Naoaki Saito
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 053203 (2022)
https://doi.org/10.1116/6.0001999
Published: August 2022
View article titled, Negative ion beam bombardment of a protic ionic liquid: Alleviating surface charging and damage and analyzing the surface of organic insulating materials
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Journal Articles

Submicrometer spectromicroscopy of UO2 aged under high humidity conditions

Alex S. Ditter, Joseph I. Pacold, Zurong Dai, M. Lee Davisson, David Vine, Scott B. Donald, Brandon W. Chung, David K. Shuh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043202 (2022)
https://doi.org/10.1116/6.0001880
Published: May 2022
View article titled, Submicrometer spectromicroscopy of UO<sub>2</sub> aged under high humidity conditions
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Includes: Supplementary data
Journal Articles

Lamellae preparation for atomic-resolution STEM imaging from ion-beam-sensitive topological insulator crystals

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Abdulhakim Bake, Weiyao Zhao, David Mitchell, Xiaolin Wang, Mitchell Nancarrow, David Cortie
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033203 (2022)
https://doi.org/10.1116/6.0001771
Published: April 2022
View article titled, Lamellae preparation for atomic-resolution STEM imaging from ion-beam-sensitive topological insulator crystals
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Journal Articles

CrN/AlN nanolaminates: Architecture, residual stresses, and cracking behavior

K. Bobzin, T. Brögelmann, N. C. Kruppe, H. J. Maier, T. Heidenblut, H.-B. Besserer, C. Kahra, J. Janowitz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 013414 (2022)
https://doi.org/10.1116/6.0001462
Published: December 2021
View article titled, CrN/AlN nanolaminates: Architecture, residual stresses, and cracking behavior
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Journal Articles

Negative-cluster ion beam production from the tip of a sharp needle: Suppression of surface charging and surface analysis of an insulated sample

Yukio Fujiwara, Naoaki Saito
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063218 (2021)
https://doi.org/10.1116/6.0001431
Published: October 2021
View article titled, Negative-cluster ion beam production from the tip of a sharp needle: Suppression of surface charging and surface analysis of an insulated sample
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Includes: Supplementary data
Journal Articles

Structural breakdown in high power GaN-on-GaN p-n diode devices stressed to failure

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Prudhvi Peri, Kai Fu, Houqiang Fu, Yuji Zhao, David J. Smith
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 063402 (2020)
https://doi.org/10.1116/6.0000488
Published: September 2020
View article titled, Structural breakdown in high power GaN-on-GaN <em>p-n</em> diode devices stressed to failure
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Journal Articles

Variation in plutonium dioxide sputter yields for 1–5 keV Ar+ ions

Scott B. Donald, Jeff A. Stanford, Rory T. Gollott, David J. Roberts, Art J. Nelson, W. McLean
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 053202 (2020)
https://doi.org/10.1116/6.0000301
Published: July 2020
View article titled, Variation in plutonium dioxide sputter yields for 1–5 keV Ar<sup>+</sup> ions
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Includes: Supplementary data
Journal Articles

Low temperature oxidation behavior of Mo2BC coatings

Jan-Ole Achenbach, Soheil Karimi Aghda, Marcus Hans, Daniel Primetzhofer, Damian M. Holzapfel, Danilo J. Miljanovic, Jochen M. Schneider
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 023403 (2020)
https://doi.org/10.1116/1.5141993
Published: February 2020
View article titled, Low temperature oxidation behavior of Mo<sub>2</sub>BC coatings
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Journal Articles

Oxidation behavior of intermetallic Al-Cr and Al-Cr-Fe macroparticles

Christian Martin Koller, Alexander Kirnbauer, Rainer Hahn, Beno Widrig, Szilárd Kolozsvári, Jürgen Ramm, Paul Heinz Mayrhofer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 061601 (2017)
https://doi.org/10.1116/1.4986928
Published: August 2017
View article titled, Oxidation behavior of intermetallic Al-Cr and Al-Cr-Fe macroparticles
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Journal Articles

Sputtering of silicon and glass substrates with polyatomic molecular ion beams generated from ionic liquids

Mitsuaki Takeuchi, Yuki Hoshide, Hiromichi Ryuto, Gikan H. Takaoka
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 02D108 (2016)
https://doi.org/10.1116/1.4942996
Published: March 2016
View article titled, Sputtering of silicon and glass substrates with polyatomic molecular ion beams generated from ionic liquids
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Includes: Supplementary data
Journal Articles

Solid phase epitaxial regrowth of (001) anatase titanium dioxide

David Eitan Barlaz, Edmund G. Seebauer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 020603 (2016)
https://doi.org/10.1116/1.4941446
Published: February 2016
View article titled, Solid phase epitaxial regrowth of (001) anatase titanium dioxide
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Journal Articles

Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells

Gu Young Cho, Seungtak Noh, Yoon Ho Lee, Sanghoon Ji, Soon Wook Hong, Bongjun Koo, Jihwan An, Young-Beom Kim, Suk Won Cha
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 01A151 (2016)
https://doi.org/10.1116/1.4938105
Published: December 2015
View article titled, Properties of nanostructured undoped ZrO<sub>2</sub> thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells
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