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Journal Articles

Li_xCo_yO_z thin-films deposition through thermal atomic layer deposition

Antoine Peisert, Noureddine Adjeroud, Damien Lenoble, Guillaume Lamblin

J. Vac. Sci. Technol. A 41, 062403 (2023)

https://doi.org/10.1116/6.0002863

Published: October 2023

View article titled, LixCoyOz thin-films deposition through thermal atomic layer deposition

Journal Articles

Competition between ion beam sputtering and self-organization of point defects for surface nanostructuring on germanium

Naoto Oishi, Tatsuya Yasuoka, Toshiyuki Kawaharamura, Noriko Nitta

J. Vac. Sci. Technol. A 41, 063101 (2023)

https://doi.org/10.1116/6.0002878

Published: September 2023

View article titled, Competition between ion beam sputtering and self-organization of point defects for surface nanostructuring on germanium

Includes: Supplementary data

Journal Articles

ToF-SIMS in battery research: Advantages, limitations, and best practices

Teo Lombardo, Felix Walther, Christine Kern, Yannik Moryson, Timo Weintraut, Anja Henss, Marcus Rohnke

J. Vac. Sci. Technol. A 41, 053207 (2023)

https://doi.org/10.1116/6.0002850

Published: August 2023

View article titled, ToF-SIMS in battery research: Advantages, limitations, and best practices

Includes: Supplementary data

Journal Articles

Ga⁺-focused ion beam damage in n-type Ga₂O₃

Xinyi Xia, Nahid Sultan Al-Mamun, Daudi Warywoba, Fan Ren, Aman Haque, S. J. Pearton

J. Vac. Sci. Technol. A 40, 053403 (2022)

https://doi.org/10.1116/5.0099892

Published: August 2022

View article titled, Ga+-focused ion beam damage in n-type Ga2O3

Journal Articles

Negative ion beam bombardment of a protic ionic liquid: Alleviating surface charging and damage and analyzing the surface of organic insulating materials

Yukio Fujiwara, Naoaki Saito

J. Vac. Sci. Technol. A 40, 053203 (2022)

https://doi.org/10.1116/6.0001999

Published: August 2022

View article titled, Negative ion beam bombardment of a protic ionic liquid: Alleviating surface charging and damage and analyzing the surface of organic insulating materials

Journal Articles

Submicrometer spectromicroscopy of UO₂ aged under high humidity conditions

Alex S. Ditter, Joseph I. Pacold, Zurong Dai, M. Lee Davisson, David Vine, Scott B. Donald, Brandon W. Chung, David K. Shuh

J. Vac. Sci. Technol. A 40, 043202 (2022)

https://doi.org/10.1116/6.0001880

Published: May 2022

View article titled, Submicrometer spectromicroscopy of UO2 aged under high humidity conditions

Includes: Supplementary data

Journal Articles

Lamellae preparation for atomic-resolution STEM imaging from ion-beam-sensitive topological insulator crystals

Abdulhakim Bake, Weiyao Zhao, David Mitchell, Xiaolin Wang, Mitchell Nancarrow, David Cortie

J. Vac. Sci. Technol. A 40, 033203 (2022)

https://doi.org/10.1116/6.0001771

Published: April 2022

View article titled, Lamellae preparation for atomic-resolution STEM imaging from ion-beam-sensitive topological insulator crystals

Journal Articles

CrN/AlN nanolaminates: Architecture, residual stresses, and cracking behavior

K. Bobzin, T. Brögelmann, N. C. Kruppe, H. J. Maier, T. Heidenblut, H.-B. Besserer, C. Kahra, J. Janowitz

J. Vac. Sci. Technol. A 40, 013414 (2022)

https://doi.org/10.1116/6.0001462

Published: December 2021

View article titled, CrN/AlN nanolaminates: Architecture, residual stresses, and cracking behavior

Journal Articles

Negative-cluster ion beam production from the tip of a sharp needle: Suppression of surface charging and surface analysis of an insulated sample

Yukio Fujiwara, Naoaki Saito

J. Vac. Sci. Technol. A 39, 063218 (2021)

https://doi.org/10.1116/6.0001431

Published: October 2021

View article titled, Negative-cluster ion beam production from the tip of a sharp needle: Suppression of surface charging and surface analysis of an insulated sample

Includes: Supplementary data

Journal Articles

Structural breakdown in high power GaN-on-GaN p-n diode devices stressed to failure

Prudhvi Peri, Kai Fu, Houqiang Fu, Yuji Zhao, David J. Smith

J. Vac. Sci. Technol. A 38, 063402 (2020)

https://doi.org/10.1116/6.0000488

Published: September 2020

View article titled, Structural breakdown in high power GaN-on-GaN p-n diode devices stressed to failure

Journal Articles

Variation in plutonium dioxide sputter yields for 1–5 keV Ar⁺ ions

Scott B. Donald, Jeff A. Stanford, Rory T. Gollott, David J. Roberts, Art J. Nelson, W. McLean

J. Vac. Sci. Technol. A 38, 053202 (2020)

https://doi.org/10.1116/6.0000301

Published: July 2020

View article titled, Variation in plutonium dioxide sputter yields for 1–5 keV Ar+ ions

Includes: Supplementary data

Journal Articles

Low temperature oxidation behavior of Mo₂BC coatings

Jan-Ole Achenbach, Soheil Karimi Aghda, Marcus Hans, Daniel Primetzhofer, Damian M. Holzapfel, Danilo J. Miljanovic, Jochen M. Schneider

J. Vac. Sci. Technol. A 38, 023403 (2020)

https://doi.org/10.1116/1.5141993

Published: February 2020

View article titled, Low temperature oxidation behavior of Mo2BC coatings

Journal Articles

Smallest microhouse in the world, assembled on the facet of an optical fiber by origami and welded in the μRobotex nanofactory

Jean-Yves Rauch, Olivier Lehmann, Patrick Rougeot, Joel Abadie, Joel Agnus, Miguel. Angel Suarez

J. Vac. Sci. Technol. A 36, 041601 (2018)

https://doi.org/10.1116/1.5020128

Published: May 2018

View article titled, Smallest microhouse in the world, assembled on the facet of an optical fiber by origami and welded in the μRobotex nanofactory

Journal Articles

Review Article: Stress in thin films and coatings: Current status, challenges, and prospects

Grégory Abadias, Eric Chason, Jozef Keckes, Marco Sebastiani, Gregory B. Thompson, Etienne Barthel, Gary L. Doll, Conal E. Murray, Chris H. Stoessel, Ludvik Martinu

J. Vac. Sci. Technol. A 36, 020801 (2018)

https://doi.org/10.1116/1.5011790

Published: March 2018

View article titled, Review Article: Stress in thin films and coatings: Current status, challenges, and prospects

Journal Articles

Oxidation behavior of intermetallic Al-Cr and Al-Cr-Fe macroparticles

Christian Martin Koller, Alexander Kirnbauer, Rainer Hahn, Beno Widrig, Szilárd Kolozsvári, Jürgen Ramm, Paul Heinz Mayrhofer

J. Vac. Sci. Technol. A 35, 061601 (2017)

https://doi.org/10.1116/1.4986928

Published: August 2017

View article titled, Oxidation behavior of intermetallic Al-Cr and Al-Cr-Fe macroparticles

Journal Articles

Sputtering of silicon and glass substrates with polyatomic molecular ion beams generated from ionic liquids

Mitsuaki Takeuchi, Yuki Hoshide, Hiromichi Ryuto, Gikan H. Takaoka

J. Vac. Sci. Technol. A 34, 02D108 (2016)

https://doi.org/10.1116/1.4942996

Published: March 2016

View article titled, Sputtering of silicon and glass substrates with polyatomic molecular ion beams generated from ionic liquids

Includes: Supplementary data

Journal Articles

Solid phase epitaxial regrowth of (001) anatase titanium dioxide

David Eitan Barlaz, Edmund G. Seebauer

J. Vac. Sci. Technol. A 34, 020603 (2016)

https://doi.org/10.1116/1.4941446

Published: February 2016

View article titled, Solid phase epitaxial regrowth of (001) anatase titanium dioxide

Journal Articles

Properties of nanostructured undoped ZrO₂ thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells

Gu Young Cho, Seungtak Noh, Yoon Ho Lee, Sanghoon Ji, Soon Wook Hong, Bongjun Koo, Jihwan An, Young-Beom Kim, Suk Won Cha

J. Vac. Sci. Technol. A 34, 01A151 (2016)

https://doi.org/10.1116/1.4938105

Published: December 2015

View article titled, Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells

Journal Articles

Microstructural modifications in powder-metallurgically produced Al_0.675Cr_0.275Fe_0.05 targets during cathodic arc evaporation

Christian M. Koller, Rainer Hahn, Jürgen Ramm, Szilárd Kolozsvári, Paul H. Mayrhofer

J. Vac. Sci. Technol. A 34, 021603 (2016)

https://doi.org/10.1116/1.4938407

Published: December 2015

View article titled, Microstructural modifications in powder-metallurgically produced Al0.675Cr0.275Fe0.05 targets during cathodic arc evaporation

Journal Articles

Low-kilovolt coherent electron diffractive imaging instrument based on a single-atom electron source

Chun-Yueh Lin, Wei-Tse Chang, Yi-Sheng Chen, En-Te Hwu, Chia-Seng Chang, Ing-Shouh Hwang, Wei-Hao Hsu

J. Vac. Sci. Technol. A 34, 021602 (2016)

https://doi.org/10.1116/1.4938408

Published: December 2015

View article titled, Low-kilovolt coherent electron diffractive imaging instrument based on a single-atom electron source

NARROW

Topics

Li_xCo_yO_z thin-films deposition through thermal atomic layer deposition

Competition between ion beam sputtering and self-organization of point defects for surface nanostructuring on germanium

ToF-SIMS in battery research: Advantages, limitations, and best practices

Ga⁺-focused ion beam damage in n-type Ga₂O₃

Negative ion beam bombardment of a protic ionic liquid: Alleviating surface charging and damage and analyzing the surface of organic insulating materials

Submicrometer spectromicroscopy of UO₂ aged under high humidity conditions

Lamellae preparation for atomic-resolution STEM imaging from ion-beam-sensitive topological insulator crystals

CrN/AlN nanolaminates: Architecture, residual stresses, and cracking behavior

Negative-cluster ion beam production from the tip of a sharp needle: Suppression of surface charging and surface analysis of an insulated sample

Structural breakdown in high power GaN-on-GaN p-n diode devices stressed to failure

Variation in plutonium dioxide sputter yields for 1–5 keV Ar⁺ ions

Low temperature oxidation behavior of Mo₂BC coatings

Smallest microhouse in the world, assembled on the facet of an optical fiber by origami and welded in the μRobotex nanofactory

Review Article: Stress in thin films and coatings: Current status, challenges, and prospects

Oxidation behavior of intermetallic Al-Cr and Al-Cr-Fe macroparticles

Sputtering of silicon and glass substrates with polyatomic molecular ion beams generated from ionic liquids

Solid phase epitaxial regrowth of (001) anatase titanium dioxide

Properties of nanostructured undoped ZrO₂ thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells

Microstructural modifications in powder-metallurgically produced Al_0.675Cr_0.275Fe_0.05 targets during cathodic arc evaporation

Low-kilovolt coherent electron diffractive imaging instrument based on a single-atom electron source

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