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Journal Articles

XPS guide for insulators: Electron flood gun operation and optimization, surface charging, controlled charging, differential charging, useful FWHMs, problems and solutions, and advice

Featured
B. Vincent Crist
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 032803 (2024)
https://doi.org/10.1116/6.0003439
Published: April 2024
View article titled, XPS guide for insulators: Electron flood gun operation and optimization, surface charging, controlled charging, differential charging, useful FWHMs, problems and solutions, and advice
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Journal Articles

Development and evaluation of CrAlAgN self-lubricating coatings for high temperature metal forming dies

Jianliang Lin, Chia-Lin Li, Jyh-Wei Lee, Xuhai Zhang, Jingcai Xiao, Sean C. Piper
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023105 (2024)
https://doi.org/10.1116/6.0003306
Published: February 2024
View article titled, Development and evaluation of CrAlAgN self-lubricating coatings for high temperature metal forming dies
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Journal Articles

Germanium surface cleaning and ALD of a protective boron nitride overlayer

Olatomide B. Omolere, Qasim Adesope, Samar Alhowity, Tochi L. Agbara, Jeffry A. Kelber
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062411 (2023)
https://doi.org/10.1116/6.0002928
Published: November 2023
View article titled, Germanium surface cleaning and ALD of a protective boron nitride overlayer
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Includes: Supplementary data
Journal Articles

Rhombohedral boron nitride epitaxy on ZrB2

Laurent Souqui, Justinas Palisaitis, Naureen Ghafoor, Henrik Pedersen, Hans Högberg
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 013405 (2021)
https://doi.org/10.1116/6.0000571
Published: December 2020
View article titled, Rhombohedral boron nitride epitaxy on ZrB<sub>2</sub>
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Includes: Supplementary data
Journal Articles

Chemical vapor deposition of sp2-boron nitride on Si(111) substrates from triethylboron and ammonia: Effect of surface treatments

Laurent Souqui, Henrik Pedersen, Hans Högberg
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 043402 (2020)
https://doi.org/10.1116/1.5145287
Published: May 2020
View article titled, Chemical vapor deposition of sp<sup>2</sup>-boron nitride on Si(111) substrates from triethylboron and ammonia: Effect of surface treatments
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Includes: Supplementary data
Journal Articles

Hexagonal boron nitride grown using high atomic boron emission during microwave plasma chemical vapor deposition

Kallol Chakrabarty, Ivan Arnold, Shane A. Catledge
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 061507 (2019)
https://doi.org/10.1116/1.5123210
Published: October 2019
View article titled, Hexagonal boron nitride grown using high atomic boron emission during microwave plasma chemical vapor deposition
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Journal Articles

Thermodynamic stability of hexagonal and rhombohedral boron nitride under chemical vapor deposition conditions from van der Waals corrected first principles calculations

Henrik Pedersen, Björn Alling, Hans Högberg, Annop Ektarawong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 040603 (2019)
https://doi.org/10.1116/1.5107455
Published: June 2019
View article titled, Thermodynamic stability of hexagonal and rhombohedral boron nitride under chemical vapor deposition conditions from van der Waals corrected first principles calculations
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Includes: Supplementary data
Journal Articles

Thermal chemical vapor deposition of epitaxial rhombohedral boron nitride from trimethylboron and ammonia

Laurent Souqui, Henrik Pedersen, Hans Högberg
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 020603 (2019)
https://doi.org/10.1116/1.5085192
Published: February 2019
View article titled, Thermal chemical vapor deposition of epitaxial rhombohedral boron nitride from trimethylboron and ammonia
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Includes: Supplementary data
Journal Articles

Experimental and computational studies on toughness enhancement in Ti-Al-Ta-N quaternaries

Marián Mikula, Martin Truchlý, Davide G. Sangiovanni, Dušan Plašienka, Tomáš Roch, Maroš Gregor, Pavol Ďurina, Marián Janík, Peter Kúš
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 060602 (2017)
https://doi.org/10.1116/1.4997431
Published: August 2017
View article titled, Experimental and computational studies on toughness enhancement in Ti-Al-Ta-N quaternaries
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Journal Articles

Initial stages of growth and the influence of temperature during chemical vapor deposition of sp2-BN films

Mikhail Chubarov, Henrik Pedersen, Hans Högberg, Anne Henry, Zsolt Czigány
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 061520 (2015)
https://doi.org/10.1116/1.4935155
Published: November 2015
View article titled, Initial stages of growth and the influence of temperature during chemical vapor deposition of sp<sup>2</sup>-BN films
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Includes: Supplementary data
Journal Articles

TaN metal gate etch mechanisms in B Cl 3 -based plasmas

Denis Shamiryan, Andrey Danila, Mikhail R. Baklanov, Werner Boullart
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 302–305 (2010)
https://doi.org/10.1116/1.3280170
Published: February 2010
View article titled, TaN metal gate etch mechanisms in B Cl 3 -based plasmas
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Journal Articles

Study of a micro chamber quadrupole mass spectrometer

Jinchan Wang, Xiaobing Zhang, Fuming Mao, Mei Xiao, Yunkang Cui, Daniel den Engelsen, Wei Lei
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 239–243 (2008)
https://doi.org/10.1116/1.2827512
Published: January 2008
View article titled, Study of a micro chamber quadrupole mass spectrometer
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Journal Articles

Chromium diboride thin films by low temperature chemical vapor deposition

Sreenivas Jayaraman, Emily J. Klein, Yu Yang, Do Young Kim, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 631–633 (2005)
https://doi.org/10.1116/1.1927534
Published: June 2005
View article titled, Chromium diboride thin films by low temperature chemical vapor deposition
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Journal Articles

Construction of a variable aperture cell for source flux control in a molecular-beam epitaxy environment

Terry J. Mattord, Michael M. Oye, David Gotthold, Chad Hansing, Archie L. Holmes, Jr., Ben G. Streetman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 735–738 (2004)
https://doi.org/10.1116/1.1710495
Published: May 2004
View article titled, Construction of a variable aperture cell for source flux control in a molecular-beam epitaxy environment
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Journal Articles

Effects of the insertion of a thick sp 2 buffer layer on the adhesion of c BN -rich film

S. F. Wong, C. W. Ong, G. K. H. Pang, K. Z. Baba-Kishi, W. M. Lau
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 676–682 (2004)
https://doi.org/10.1116/1.1723192
Published: April 2004
View article titled, Effects of the insertion of a thick sp 2 buffer layer on the adhesion of c BN -rich film
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Journal Articles

Control of pressure rise in a vacuum chamber by boron nitride and copper composite coating

Tetsuo Oishi, Youko Konishi, Masahiro Goto, Akira Kasahara, Masahiro Tosa, Kazuhiro Yoshihara
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 21, 1873–1876 (2003)
https://doi.org/10.1116/1.1615971
Published: October 2003
View article titled, Control of pressure rise in a vacuum chamber by boron nitride and copper composite coating
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Journal Articles

Characterization of B–C–N hybrid prepared by ion implantation

Iwao Shimoyama, Yuji Baba, Sekiguchi Tetsuhiro, Krishana G. Nath, Masayoshi Sasaki, Kenji Okuno
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 21, 1843–1848 (2003)
https://doi.org/10.1116/1.1611887
Published: October 2003
View article titled, Characterization of B–C–N hybrid prepared by ion implantation
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Journal Articles

Characterization of cubic boron nitride growth using UV-extended real-time spectroscopic ellipsometry: Effect of plasma additions and dynamic substrate bias steps

J. A. Zapien, R. W. Collins, R. Messier
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 1395–1407 (2002)
https://doi.org/10.1116/1.1486226
Published: June 2002
View article titled, Characterization of cubic boron nitride growth using UV-extended real-time spectroscopic ellipsometry: Effect of plasma additions and dynamic substrate bias steps
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Journal Articles

Low frictional coating by cosputtering in combination with excimer laser irradiation for aerospace applications

Masahiro Goto, Akira Kasahara, Masahiro Tosa, Jonathan Hobley, Maki Kishimoto, Kazuhiro Yoshihara, Hiroshi Fukumura
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 1458–1461 (2002)
https://doi.org/10.1116/1.1487873
Published: June 2002
View article titled, Low frictional coating by cosputtering in combination with excimer laser irradiation for aerospace applications
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Journal Articles

In situ characterization of thin film growth: Boron nitride on silicon

W. Fukarek
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 19, 2017–2024 (2001)
https://doi.org/10.1116/1.1372908
Published: July 2001
View article titled, <em>In situ</em> characterization of thin film growth: Boron nitride on silicon
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