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Journal Articles
Jun-Hyeok Jeon, Sun Gil Kim, Hyun-Mi Kim, Hye-Young Kim, Chang-sub Park, Yong Soo Lee, Seul-Gi Kim, Hyeongkeun Kim, Jae-Boong Choi
J. Vac. Sci. Technol. A 43, 032408 (2025)
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Published: April 2025
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J. Vac. Sci. Technol. A 43, 033003 (2025)
Published: March 2025
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J. Vac. Sci. Technol. A 43, 033001 (2025)
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Published: March 2025
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J. Vac. Sci. Technol. A 43, 022409 (2025)
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J. Vac. Sci. Technol. A 43, 023407 (2025)
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Published: February 2025
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Yudong Li, Hubertus Marbach, Christian Preischl, Michael Budach, Daniel Rhinow, Michael Hinshelwood, Klaus Edinger, Gottlieb S. Oehrlein
J. Vac. Sci. Technol. A 43, 023005 (2025)
Published: February 2025
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J. Vac. Sci. Technol. A 43, 023003 (2025)
Published: February 2025
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J. Vac. Sci. Technol. A 43, 023001 (2025)
Published: January 2025
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Brian C. Welch, Jeanne Casetta, Rajesh Pathak, Jeffrey W. Elam, Céline Pochat-Bohatier, Philippe Miele, Tamar Segal-Peretz
J. Vac. Sci. Technol. A 43, 022402 (2025)
Published: January 2025
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J. Vac. Sci. Technol. A 43, 020801 (2025)
Published: January 2025
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J. Vac. Sci. Technol. A 43, 012603 (2025)
Published: January 2025
Journal Articles
Yudong Li, Hubertus Marbach, Christian Preischl, Michael Budach, Daniel Rhinow, Klaus Edinger, Gottlieb S. Oehrlein
J. Vac. Sci. Technol. A 43, 013004 (2025)
Published: January 2025
Journal Articles
Hojun Kang, Tomoko Ito, Junghwan Um, Hikaru Kokura, Sungil Cho, Hyunjung Park, Kazuhiro Karahashi, Satoshi Hamaguchi
J. Vac. Sci. Technol. A 43, 013003 (2025)
Published: January 2025
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J. Vac. Sci. Technol. A 43, 012601 (2025)
Published: December 2024
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