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Journal Articles
J. Vac. Sci. Technol. A 39, 063214 (2021)
Published: October 2021
Journal Articles
Hwanhui Yun, Mehmet Topsakal, Abhinav Prakash, Koustav Ganguly, Chris Leighton, Bharat Jalan, Renata M. Wentzcovitch, K. Andre Mkhoyan, Jong Seok Jeong
J. Vac. Sci. Technol. A 36, 031503 (2018)
Published: March 2018
Journal Articles
J. Vac. Sci. Technol. A 33, 021401 (2015)
Published: November 2014
Journal Articles
J. Vac. Sci. Technol. A 32, 051602 (2014)
Published: July 2014
Journal Articles
Anant Patel, Kateryna Artyushkova, Plamen Atanassov, Vesna Colbow, Monica Dutta, David Harvey, Silvia Wessel
J. Vac. Sci. Technol. A 30, 04D107 (2012)
Published: April 2012
Journal Articles
Conan R. Weiland, Liu Yang, Douglas J. Doren, Carl A. Menning, Dimitri Skliar, Brian G. Willis, Jingguang G. Chen, Robert L. Opila
J. Vac. Sci. Technol. A 30, 031401 (2012)
Published: April 2012
Journal Articles
J. Vac. Sci. Technol. A 30, 021509 (2012)
Published: February 2012
Journal Articles
J. Vac. Sci. Technol. A 29, 041402 (2011)
Published: June 2011
Journal Articles
J. Vac. Sci. Technol. A 26, 62–67 (2008)
Published: December 2007
Journal Articles
J. Vac. Sci. Technol. A 25, 967–970 (2007)
Published: July 2007
Journal Articles
J. Vac. Sci. Technol. A 25, 645–650 (2007)
Published: May 2007
Journal Articles
J. Vac. Sci. Technol. A 23, 1061–1066 (2005)
Published: June 2005
Journal Articles
J. Vac. Sci. Technol. A 23, 617–620 (2005)
Published: June 2005
Journal Articles
J. Vac. Sci. Technol. A 23, 316–321 (2005)
Published: March 2005
Journal Articles
J. Vac. Sci. Technol. A 22, 1572–1578 (2004)
Published: July 2004
Journal Articles
J. Vac. Sci. Technol. A 21, 1488–1493 (2003)
Published: July 2003
Journal Articles
J. Vac. Sci. Technol. A 21, 1302–1306 (2003)
Published: July 2003
Journal Articles
J. Vac. Sci. Technol. A 19, 2941–2945 (2001)
Published: November 2001
Journal Articles
J. Vac. Sci. Technol. A 19, 1977–1982 (2001)
Published: July 2001
Journal Articles
J. Vac. Sci. Technol. A 19, 856–860 (2001)
Published: May 2001
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