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Journal Articles

Selective molecular gas phase etching in layered high aspect-ratio nanostructures for semiconductor processing. I. Modeling framework and simulation

Zach Zajo, David S. L. Mui, Ji Zhu, Mark Kawaguchi, Eric S. G. Shaqfeh

J. Vac. Sci. Technol. A 43, 013006 (2025)

https://doi.org/10.1116/6.0004155

Published: January 2025

View article titled, Selective molecular gas phase etching in layered high aspect-ratio nanostructures for semiconductor processing. I. Modeling framework and simulation

Journal Articles

Selective molecular gas phase etching in layered high aspect-ratio nanostructures for semiconductor processing. II. Experiments and model validation

Zach Zajo, David S. L. Mui, Ji Zhu, Yusef Shari’ati, Mark Kawaguchi, Eric S. G. Shaqfeh

J. Vac. Sci. Technol. A 43, 013007 (2025)

https://doi.org/10.1116/6.0004156

Published: January 2025

View article titled, Selective molecular gas phase etching in layered high aspect-ratio nanostructures for semiconductor processing. II. Experiments and model validation