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Format
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Availability
Journal Articles
J. Vac. Sci. Technol. A 22, 1428–1432 (2004)
Published: July 2004
Journal Articles
J. Vac. Sci. Technol. A 21, 1665–1670 (2003)
Published: July 2003
Journal Articles
J. Vac. Sci. Technol. A 20, 1738–1743 (2002)
Published: September 2002
Journal Articles
J. Vac. Sci. Technol. A 15, 2173–2180 (1997)
Published: July 1997
Journal Articles
J. Vac. Sci. Technol. A 14, 1794–1800 (1996)
Published: May 1996
Journal Articles
J. Vac. Sci. Technol. A 14, 1949–1956 (1996)
Published: May 1996
Journal Articles
J. Vac. Sci. Technol. A 12, 2577–2580 (1994)
Published: July 1994