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Journal Articles

Full-angle high-reflection ultrathin composite film realizing high spatial resolution of scintillation crystal array

Jing Yang, Linwei Wang, Zhang Chen, Zhongjun Xue, Shuwen Zhao, Dongzhou Ding
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063401 (2023)
https://doi.org/10.1116/6.0002875
Published: September 2023
View article titled, Full-angle high-reflection ultrathin composite film realizing high spatial resolution of scintillation crystal array
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Includes: Supplementary data
Journal Articles

Deposition-last lithographically defined epitaxial complex oxide devices on Si(100)

M. Chrysler, J. C. Jiang, G. Lorkowski, E. I. Meletis, J. H. Ngai
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 052701 (2022)
https://doi.org/10.1116/6.0001939
Published: July 2022
View article titled, Deposition-last lithographically defined epitaxial complex oxide devices on Si(100)
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Journal Articles

Propagation of nanosecond plasmas in liquids—Streamer velocities and streamer lengths

E. Jüngling, K. Grosse, A. von Keudell
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043003 (2022)
https://doi.org/10.1116/6.0001669
Published: June 2022
View article titled, Propagation of nanosecond plasmas in liquids—Streamer velocities and streamer lengths
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Journal Articles

Effect of substrate and substrate temperature on the deposition of MoS2 by radio frequency magnetron sputtering

Valiyaparambil J. Cicily Rigi, Madambi K. Jayaraj, Kachirayil J. Saji
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 032201 (2022)
https://doi.org/10.1116/6.0001685
Published: March 2022
View article titled, Effect of substrate and substrate temperature on the deposition of MoS<sub>2</sub> by radio frequency magnetron sputtering
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Includes: Supplementary data
Journal Articles

Formation, evolution, and prevention of thermally induced defects on germanium and silicon upon high-temperature vacuum annealing

Taeyeong Kim, Mun Goung Jeong, Bong Jae Lee, Jungchul Lee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 060403 (2021)
https://doi.org/10.1116/6.0001308
Published: September 2021
View article titled, Formation, evolution, and prevention of thermally induced defects on germanium and silicon upon high-temperature vacuum annealing
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Journal Articles

Improving the abrasive wear resistance of biomass briquetting machine components using cathodic arc physical vapor deposition coatings: A comparative study

Pooja Miryalkar, Sekhar Chavitlo, Nitin Tandekar, Krishna Valleti
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063404 (2021)
https://doi.org/10.1116/6.0001228
Published: September 2021
View article titled, Improving the abrasive wear resistance of biomass briquetting machine components using cathodic arc physical vapor deposition coatings: A comparative study
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Journal Articles

High temperature isotropic and anisotropic etching of silicon carbide using forming gas

C. D. Frye, Devin Funaro, A. M. Conway, D. L. Hall, P. V. Grivickas, M. Bora, L. F. Voss
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 013203 (2021)
https://doi.org/10.1116/6.0000533
Published: January 2021
View article titled, High temperature isotropic and anisotropic etching of silicon carbide using forming gas
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Journal Articles

Selective atomic layer deposition on flexible polymeric substrates employing a polyimide adhesive as a physical mask

Matin Forouzmehr, Serges Zambou, Kimmo Lahtonen, Mari Honkanen, Rafi Md Nazmul Anam, Aleksi Ruhanen, Chakra Rokaya, Donald Lupo, Paul R. Berger
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 012405 (2021)
https://doi.org/10.1116/6.0000566
Published: December 2020
View article titled, Selective atomic layer deposition on flexible polymeric substrates employing a polyimide adhesive as a physical mask
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Journal Articles

Impact of interface materials on side permeation in indirect encapsulation of organic electronics

Ankit Kumar Singh, Wen-Fang Chou, Xiaojia Jia, Cheng-Yin Wang, Canek Fuentes-Hernandez, Bernard Kippelen, Samuel Graham
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 033203 (2020)
https://doi.org/10.1116/1.5140665
Published: March 2020
View article titled, Impact of interface materials on side permeation in indirect encapsulation of organic electronics
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Journal Articles

Tunable light emission from chemical vapor deposited two-dimensional MoSe2 by layer variation and S incorporation

Vineeta Singh, Dattatray J. Late, Shyama Rath
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 023402 (2020)
https://doi.org/10.1116/1.5124998
Published: January 2020
View article titled, Tunable light emission from chemical vapor deposited two-dimensional MoSe<sub>2</sub> by layer variation and S incorporation
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Journal Articles

Hydrophobic surface modification of polymethyl methacrylate by two-dimensional plasma jet array at atmospheric pressure

Feng Liu, Meiling Cai, Bo Zhang, Zhi Fang, Chunqi Jiang, Kostya (Ken) Ostrikov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 061302 (2018)
https://doi.org/10.1116/1.5030718
Published: October 2018
View article titled, Hydrophobic surface modification of polymethyl methacrylate by two-dimensional plasma jet array at atmospheric pressure
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Journal Articles

Nano-optical imaging of monolayer MoSe2-WSe2 lateral heterostructure with subwavelength domains

Wenjin Xue, Prasana K. Sahoo, Jiru Liu, Haonan Zong, Xiaoyi Lai, Sharad Ambardar, Dmitri V. Voronine
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 05G502 (2018)
https://doi.org/10.1116/1.5035437
Published: July 2018
View article titled, Nano-optical imaging of monolayer MoSe<sub>2</sub>-WSe<sub>2</sub> lateral heterostructure with subwavelength domains
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Journal Articles

Nucleation and growth of CuCl thin films on commercially available SnO2/glass substrates by the sublimation method

Anthony P. Nicholson, Davis R. Hemenway, Walajabad S. Sampath, Kurt L. Barth
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 041511 (2017)
https://doi.org/10.1116/1.4986944
Published: June 2017
View article titled, Nucleation and growth of CuCl thin films on commercially available SnO<sub>2</sub>/glass substrates by the sublimation method
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Journal Articles

Influence of surface roughness on secondary electron emission from graphite

Thomas S. Burton, Tyson C. Back, Steven B. Fairchild, Gregory B. Thompson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 041404 (2017)
https://doi.org/10.1116/1.4986629
Published: June 2017
View article titled, Influence of surface roughness on secondary electron emission from graphite
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Journal Articles

Growth and coalescence control of inclined c-axis polar and semipolar GaN multilayer structures grown on Si(111), Si(112), and Si(115) by metalorganic vapor phase epitaxy

Tomasz Szymański, Mateusz Wośko, Bartłomiej Paszkiewicz, Bogdan Paszkiewicz, Regina Paszkiewicz, Iwona Sankowska
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 051504 (2016)
https://doi.org/10.1116/1.4958805
Published: July 2016
View article titled, Growth and coalescence control of inclined c-axis polar and semipolar GaN multilayer structures grown on Si(111), Si(112), and Si(115) by metalorganic vapor phase epitaxy
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Journal Articles

Studies on cathodic arc PVD grown TiCrN based erosion resistant thin films

Krishna Valleti, Puneet C, Rama Krishna L, Shrikant V. Joshi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 041512 (2016)
https://doi.org/10.1116/1.4953466
Published: June 2016
View article titled, Studies on cathodic arc PVD grown TiCrN based erosion resistant thin films
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Journal Articles

Gas discharge plasma treatment of poly(ethylene glycol-co-1,3/1,4 cyclohexanedimethanol terephthalate) for enhanced paint adhesion

Hernando S. Salapare, III, Hannah Shamina O. Cosiñero, Beverly Anne T. Suarez, Miguel Y. Bacaoco, Julius Andrew P. Nuñez, Frédéric Guittard, Henry J. Ramos
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 041303 (2016)
https://doi.org/10.1116/1.4949867
Published: May 2016
View article titled, Gas discharge plasma treatment of poly(ethylene glycol-<em>co</em>-1,3/1,4 cyclohexanedimethanol terephthalate) for enhanced paint adhesion
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Journal Articles

Low-kilovolt coherent electron diffractive imaging instrument based on a single-atom electron source

Chun-Yueh Lin, Wei-Tse Chang, Yi-Sheng Chen, En-Te Hwu, Chia-Seng Chang, Ing-Shouh Hwang, Wei-Hao Hsu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 021602 (2016)
https://doi.org/10.1116/1.4938408
Published: December 2015
View article titled, Low-kilovolt coherent electron diffractive imaging instrument based on a single-atom electron source
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Journal Articles

Blistering during the atomic layer deposition of iridium

Pascal Genevée, Ernest Ahiavi, Norik Janunts, Thomas Pertsch, Maria Oliva, Ernst-Bernhard Kley, Adriana Szeghalmi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 01A113 (2016)
https://doi.org/10.1116/1.4934753
Published: October 2015
View article titled, Blistering during the atomic layer deposition of iridium
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Journal Articles

Framework for alternating-least-squares-based multivariate curve resolution with application to time-of-flight secondary ion mass spectrometry imaging

Michael R. Keenan, Willem Windig, Henrik Arlinghaus
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 05E123 (2015)
https://doi.org/10.1116/1.4927528
Published: August 2015
View article titled, Framework for alternating-least-squares-based multivariate curve resolution with application to time-of-flight secondary ion mass spectrometry imaging
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