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Journal Articles
Yundong Zhou, Alexis Franquet, Valentina Spampinato, Alex Merkulov, Michael R. Keenan, Paul A. W. van der Heide, Gustavo F. Trindade, Wilfried Vandervorst, Ian S. Gilmore
J. Vac. Sci. Technol. A 42, 053208 (2024)
Published: September 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 042201 (2024)
Published: May 2024
Includes: Supplementary data
Journal Articles
Xunwang Shi, Sam Zhang, Jingchuan Li, Yuhang You, Xiuhan Yu, Deen Sun, Yong Shao, Hongji Du, Dawen Wang, Minghua Zhao, Moshu Zhu, Fengji Li
J. Vac. Sci. Technol. A 42, 013102 (2024)
Published: December 2023
Journal Articles
Alexander S. Grenadyorov, Yuriy N. Yuriev, Аndrey А. Solovyev, Artem A. Runts, Konstantin V. Oskomov, Vyacheslav A. Semenov, Vladimir S. Sypchenko
J. Vac. Sci. Technol. A 42, 010402 (2024)
Published: December 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 063401 (2023)
Published: September 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 052701 (2022)
Published: July 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 043003 (2022)
Published: June 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 032201 (2022)
Published: March 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 060403 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 063404 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 013203 (2021)
Published: January 2021
Journal Articles
Matin Forouzmehr, Serges Zambou, Kimmo Lahtonen, Mari Honkanen, Rafi Md Nazmul Anam, Aleksi Ruhanen, Chakra Rokaya, Donald Lupo, Paul R. Berger
J. Vac. Sci. Technol. A 39, 012405 (2021)
Published: December 2020
Journal Articles
Ankit Kumar Singh, Wen-Fang Chou, Xiaojia Jia, Cheng-Yin Wang, Canek Fuentes-Hernandez, Bernard Kippelen, Samuel Graham
J. Vac. Sci. Technol. A 38, 033203 (2020)
Published: March 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 023402 (2020)
Published: January 2020
Journal Articles
J. Vac. Sci. Technol. A 36, 061302 (2018)
Published: October 2018
Journal Articles
Wenjin Xue, Prasana K. Sahoo, Jiru Liu, Haonan Zong, Xiaoyi Lai, Sharad Ambardar, Dmitri V. Voronine
J. Vac. Sci. Technol. A 36, 05G502 (2018)
Published: July 2018
Journal Articles
J. Vac. Sci. Technol. A 35, 041511 (2017)
Published: June 2017
Journal Articles
Tomasz Szymański, Mateusz Wośko, Bartłomiej Paszkiewicz, Bogdan Paszkiewicz, Regina Paszkiewicz, Iwona Sankowska
J. Vac. Sci. Technol. A 34, 051504 (2016)
Published: July 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 041512 (2016)
Published: June 2016
Journal Articles
Hernando S. Salapare, III, Hannah Shamina O. Cosiñero, Beverly Anne T. Suarez, Miguel Y. Bacaoco, Julius Andrew P. Nuñez, Frédéric Guittard, Henry J. Ramos
J. Vac. Sci. Technol. A 34, 041303 (2016)
Published: May 2016
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