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Journal Articles

Controlling the boron-to-titanium ratio in magnetron-sputter-deposited TiBx thin films

Ivan Petrov, Allen Hall, Antonio B. Mei, Nils Nedfors, Igor Zhirkov, Johanna Rosen, Amber Reed, Brandon Howe, Grzegorz Greczynski, Jens Birch, Lars Hultman, J. E. Greene
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 050601 (2017)
https://doi.org/10.1116/1.4982649
Published: April 2017
View article titled, Controlling the boron-to-titanium ratio in magnetron-sputter-deposited TiB<sub>x</sub> thin films
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Journal Articles

Achievements and problems in the first commissioning of superKEKB vacuum system

Yusuke Suetsugu, Kyo Shibata, Takuya Ishibashi, Hitoshi Fukuma, Makoto Tobiyama, John Flanagan, Emy Mulyani, Mitsuru Shirai, Shinji Terui, Ken-ichi Kanazawa, Hiromi Hisamatsu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 03E103 (2017)
https://doi.org/10.1116/1.4977764
Published: March 2017
View article titled, Achievements and problems in the first commissioning of superKEKB vacuum system
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Journal Articles

Electron-stimulated desorption from polished and vacuum fired 316LN stainless steel coated with Ti-Zr-Hf-V

Oleg B. Malyshev, Reza Valizadeh, Benjamin T. Hogan, Adrian N. Hannah
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 061601 (2014)
https://doi.org/10.1116/1.4897932
Published: October 2014
View article titled, Electron-stimulated desorption from polished and vacuum fired 316LN stainless steel coated with Ti-Zr-Hf-V
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Journal Articles

Design and construction of the SuperKEKB vacuum system

Yusuke Suetsugu, Ken-ichi Kanazawa, Kyo Shibata, Takuya Ishibashi, Hiromi Hisamatsu, Mitsuru Shirai, Shinji Terui
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 031602 (2012)
https://doi.org/10.1116/1.3696683
Published: March 2012
View article titled, Design and construction of the SuperKEKB vacuum system
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Journal Articles

Design and test of a magnetic shield for turbomolecular pumps

M. De Angeli, G. Gervasini, G. Gittini
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 1475–1479 (2007)
https://doi.org/10.1116/1.2771556
Published: August 2007
View article titled, Design and test of a magnetic shield for turbomolecular pumps
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Journal Articles

Influence of the external solenoid coil arrangement and excitation mode on plasma characteristics and target utilization in a dc-planar magnetron sputtering system

X. B. Zhang, J. Q. Xiao, Z. L. Pei, J. Gong, C. Sun
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 209–214 (2007)
https://doi.org/10.1116/1.2426980
Published: January 2007
View article titled, Influence of the external solenoid coil arrangement and excitation mode on plasma characteristics and target utilization in a dc-planar magnetron sputtering system
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Journal Articles

Time-resolved measurements of the E -to- H mode transition in electronegative pulse-modulated inductively coupled plasmas

Manabu Edamura, Eric C. Benck, Yicheng Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 2151–2158 (2006)
https://doi.org/10.1116/1.2359736
Published: October 2006
View article titled, Time-resolved measurements of the E -to- H mode transition in electronegative pulse-modulated inductively coupled plasmas
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Journal Articles

Control of plasma flux composition incident on TiN films during reactive magnetron sputtering and the effect on film microstructure

C. Muratore, S. G. Walton, D. Leonhardt, R. F. Fernsler
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 25–29 (2006)
https://doi.org/10.1116/1.2134706
Published: December 2005
View article titled, Control of plasma flux composition incident on TiN films during reactive magnetron sputtering and the effect on film microstructure
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Journal Articles

Discharge mode transitions in low-frequency inductively coupled plasmas with internal oscillating current sheets

Z. L. Tsakadze, K. Ostrikov, E. L. Tsakadze, S. Xu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 440–447 (2005)
https://doi.org/10.1116/1.1875252
Published: April 2005
View article titled, Discharge mode transitions in low-frequency inductively coupled plasmas with internal oscillating current sheets
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Journal Articles

Effects of voltage distribution along an induction coil and discharge frequency in inductively coupled plasmas

Manabu Edamura, Eric C. Benck
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 293–301 (2004)
https://doi.org/10.1116/1.1641052
Published: February 2004
View article titled, Effects of voltage distribution along an induction coil and discharge frequency in inductively coupled plasmas
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Journal Articles

Edison’s vacuum coating patents

Robert K. Waits
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 19, 1666–1673 (2001)
https://doi.org/10.1116/1.1326948
Published: July 2001
View article titled, Edison’s vacuum coating patents
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Journal Articles

Low-temperature magnetron sputter-deposition, hardness, and electrical resistivity of amorphous and crystalline alumina thin films

Quan Li, Yuan-Hsin Yu, C. Singh Bhatia, L. D. Marks, S. C. Lee, Y. W. Chung
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 2333–2338 (2000)
https://doi.org/10.1116/1.1286715
Published: September 2000
View article titled, Low-temperature magnetron sputter-deposition, hardness, and electrical resistivity of amorphous and crystalline alumina thin films
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Journal Articles

Graphite macroparticle filtering efficiency of three different magnetic filter designs used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon films

M. Hakovirta, K. C. Walter, B. P. Wood, M. Nastasi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 3077–3080 (1999)
https://doi.org/10.1116/1.582009
Published: September 1999
View article titled, Graphite macroparticle filtering efficiency of three different magnetic filter designs used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon films
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Journal Articles

Axially-resolved study of highly ionized physical vapor deposition

M. Dickson, J. Hopwood
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 15, 2307–2312 (1997)
https://doi.org/10.1116/1.580739
Published: July 1997
View article titled, Axially-resolved study of highly ionized physical vapor deposition
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Journal Articles

Spectroscopic studies of a solenoid filtered vacuum arc

Z. H. Wang, D. R. McKenzie, P. J. Martin, R. P. Netterfield
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 13, 2261–2265 (1995)
https://doi.org/10.1116/1.579505
Published: July 1995
View article titled, Spectroscopic studies of a solenoid filtered vacuum arc
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Journal Articles

Simple pulsed‐plasma‐beam gun for ultrahigh vacuum applications

Chikashi Yamada, Takahiro Kimura
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 12, 2940–2942 (1994)
https://doi.org/10.1116/1.578972
Published: September 1994
View article titled, Simple pulsed‐plasma‐beam gun for ultrahigh vacuum applications
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Journal Articles

Super‐wide electron cyclotron resonance plasma source excited by traveling microwave as an efficient tool for diamondlike carbon film deposition

A. Ishii, S. Amadatsu, S. Minomo, M. Taniguchi, M. Sugiyo, Y. Sakaguchi, T. Kobayashi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 12, 1241–1243 (1994)
https://doi.org/10.1116/1.579302
Published: July 1994
View article titled, Super‐wide electron cyclotron resonance plasma source excited by traveling microwave as an efficient tool for diamondlike carbon film deposition
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Journal Articles

Electron cyclotron resonance plasma source for metalorganic chemical vapor deposition of silicon oxide films

O. A. Popov, S. Y. Shapoval, M. D. Yoder, A. A. Chumakov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 12, 300–307 (1994)
https://doi.org/10.1116/1.578872
Published: March 1994
View article titled, Electron cyclotron resonance plasma source for metalorganic chemical vapor deposition of silicon oxide films
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Journal Articles

Use of an externally applied axial magnetic field to control ion/neutral flux ratios incident at the substrate during magnetron sputter deposition

I. Petrov, F. Adibi, J. E. Greene, W. D. Sproul, W.‐D. Münz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 10, 3283–3287 (1992)
https://doi.org/10.1116/1.577812
Published: September 1992
View article titled, Use of an externally applied axial magnetic field to control ion/neutral flux ratios incident at the substrate during magnetron sputter deposition
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Journal Articles

A study on electromagnetron for plasma polymerization

H. Yasuda, F. Olcaytug
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 9, 2342–2355 (1991)
https://doi.org/10.1116/1.577319
Published: July 1991
View article titled, A study on electromagnetron for plasma polymerization
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