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Journal Articles

Effect of local pressure difference caused by argon flow on properties of DLC films on rubber

Haoran Zeng, Jiaqi Liu, Tao Yang, Qiaoyuan Deng, Feng Wen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053410 (2023)
https://doi.org/10.1116/6.0002806
Published: July 2023
View article titled, Effect of local pressure difference caused by argon flow on properties of DLC films on rubber
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Includes: Supplementary data
Journal Articles

Comparison of BCl3, TiCl4, and SOCl2 chlorinating agents for atomic layer etching of TiO2 and ZrO2 using tungsten hexafluoride

Editor’s Pick
Holger Saare, Wenyi Xie, Gregory N. Parsons
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 042602 (2023)
https://doi.org/10.1116/6.0002708
Published: June 2023
View article titled, Comparison of BCl<sub>3</sub>, TiCl<sub>4</sub>, and SOCl<sub>2</sub> chlorinating agents for atomic layer etching of TiO<sub>2</sub> and ZrO<sub>2</sub> using tungsten hexafluoride
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Includes: Supplementary data
Journal Articles

Flexible atomic layer deposition system for coating porous materials

Woo-Jae Lee, Ohhun Kwon, Renjing Huang, Chao Lin, Raymond J. Gorte, John M. Vohs
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 032401 (2022)
https://doi.org/10.1116/6.0001679
Published: March 2022
View article titled, Flexible atomic layer deposition system for coating porous materials
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Includes: Supplementary data
Journal Articles

Atomic layer deposition of lithium metaphosphate from H3PO4 and P4O10 facilitated via direct liquid injection: Experiment and theory

Ivan Kundrata, Antónia Mošková, Martin Moško, Matej Mičušík, Edmund Dobročka, Karol Fröhlich
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 062407 (2021)
https://doi.org/10.1116/6.0001255
Published: November 2021
View article titled, Atomic layer deposition of lithium metaphosphate from H<sub>3</sub>PO<sub>4</sub> and P<sub>4</sub>O<sub>10</sub> facilitated via direct liquid injection: Experiment and theory
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Includes: Supplementary data
Journal Articles

Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions

Md. Istiaque Chowdhury, Mark Sowa, Alexander C. Kozen, Brandon A. Krick, Jewel Haik, Tomas F. Babuska, Nicholas C. Strandwitz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 012407 (2021)
https://doi.org/10.1116/6.0000717
Published: December 2020
View article titled, Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
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Journal Articles

Improving vacuum performance in the warm linac of the Spallation Neutron Source

Christopher M. Stone, Neal Gerber, Jeremy P. Price, Jonathan D. Pelfrey, Jonathan D. Johnson, James Steven Crawford, Stan Baker, Xiaosong Geng, Derrick Williams, Katherine D. Ocker
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 061601 (2019)
https://doi.org/10.1116/1.5118352
Published: October 2019
View article titled, Improving vacuum performance in the warm linac of the Spallation Neutron Source
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Journal Articles

Hydrogen incorporation and release from nonevaporable getter coatings based on oxygen-free Pd/Ti thin films

Masuaki Matsumoto, Tomohiro Okada, Tetsuya Miyazawa, Kazuhiko Mase, Misao Yamanaka, Ayako Hashimoto, Markus Wilde, Katsuyuki Fukutani
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 051601 (2019)
https://doi.org/10.1116/1.5108983
Published: July 2019
View article titled, Hydrogen incorporation and release from nonevaporable getter coatings based on oxygen-free Pd/Ti thin films
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Journal Articles

Commissioning of vacuum system for SuperKEKB positron damping ring

Kyo Shibata, Yusuke Suetsugu, Takuya Ishibashi, Mitsuru Shirai, Shinji Terui, Ken-ichi Kanazawa, Hiromi Hisamatsu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 041601 (2019)
https://doi.org/10.1116/1.5092956
Published: June 2019
View article titled, Commissioning of vacuum system for SuperKEKB positron damping ring
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Journal Articles

Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of outgassing by baking under oxygen

Tetsuya Miyazawa, Yu Kano, Yasuo Nakayama, Kenichi Ozawa, Toshiharu Iga, Misao Yamanaka, Ayako Hashimoto, Takashi Kikuchi, Kazuhiko Mase
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021601 (2019)
https://doi.org/10.1116/1.5074160
Published: January 2019
View article titled, Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of outgassing by baking under oxygen
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Journal Articles

Oxygen-free palladium/titanium coating, a novel nonevaporable getter coating with an activation temperature of 133 °C

Tetsuya Miyazawa, Masashi Kurihara, Shinya Ohno, Naoya Terashima, Yuto Natsui, Hiroo Kato, Yoshihiro Kato, Ayako Hashimoto, Takashi Kikuchi, Kazuhiko Mase
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 051601 (2018)
https://doi.org/10.1116/1.5037023
Published: August 2018
View article titled, Oxygen-free palladium/titanium coating, a novel nonevaporable getter coating with an activation temperature of 133 °C
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Journal Articles

New leak element based on graphene oxide membranes

Donghui Meng, Rongxin Yan, Guohua Ren, Lichen Sun, Lina Wang, Chongwu Guo, Li Wang, Rongping Shao, Yong Wang, Wei Sun
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 041603 (2018)
https://doi.org/10.1116/1.5035347
Published: June 2018
View article titled, New leak element based on graphene oxide membranes
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Journal Articles

Measurement and simulation of rarefied Couette Poiseuille flow with variable cross section

Christopher Huck, Heiko Pleskun, Andreas Brümmer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031606 (2018)
https://doi.org/10.1116/1.5024899
Published: May 2018
View article titled, Measurement and simulation of rarefied Couette Poiseuille flow with variable cross section
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Journal Articles

Review Article: Recommended practice for calibrating vacuum gauges of the ionization type

James A. Fedchak, Patrick J. Abbott, Jay H. Hendricks, Paul C. Arnold, Neil T. Peacock
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 030802 (2018)
https://doi.org/10.1116/1.5025060
Published: April 2018
View article titled, Review Article: Recommended practice for calibrating vacuum gauges of the ionization type
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Journal Articles

Quantitative measurements of various gases in high and ultrahigh vacuum

Hajime Yoshida, Kenta Arai
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031604 (2018)
https://doi.org/10.1116/1.5018210
Published: March 2018
View article titled, Quantitative measurements of various gases in high and ultrahigh vacuum
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Journal Articles

Nonevaporable getter coating chambers for extreme high vacuum

Marcy L. Stutzman, Philip A. Adderley, Md Abdullah A. Mamun, Matt Poelker
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031603 (2018)
https://doi.org/10.1116/1.5010154
Published: March 2018
View article titled, Nonevaporable getter coating chambers for extreme high vacuum
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Journal Articles

Vacuum furnace for degassing stainless-steel vacuum components

James A. Fedchak, Julia Scherschligt, Daniel Barker, Stephen Eckel, Alex P. Farrell, Makfir Sefa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 023201 (2018)
https://doi.org/10.1116/1.5016181
Published: January 2018
View article titled, Vacuum furnace for degassing stainless-steel vacuum components
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Journal Articles

Outgassing behavior of different high-temperature resistant polymers

Katharina Battes, Christian Day, Volker Hauer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 021602 (2018)
https://doi.org/10.1116/1.5001243
Published: December 2017
View article titled, Outgassing behavior of different high-temperature resistant polymers
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Journal Articles

Qualification of TA6V alloy cleaning processes using supercritical CO2 cleaning, from coupled SEM, XPS, and TPD analyses

Sophie Charton, Ludovic Avril, Rémy Besnard, Bruno Domenichini
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 021401 (2018)
https://doi.org/10.1116/1.4998345
Published: November 2017
View article titled, Qualification of TA6V alloy cleaning processes using supercritical CO<sub>2</sub> cleaning, from coupled SEM, XPS, and TPD analyses
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Journal Articles

Vacuum properties and operation stability of the radio-frequency quadrupole accelerator in Japan Proton Accelerator Research Complex linac

Takatoshi Morishita, Yasuhiro Kondo, Hidetomo Oguri, Kazuo Hasegawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 041602 (2017)
https://doi.org/10.1116/1.4983527
Published: May 2017
View article titled, Vacuum properties and operation stability of the radio-frequency quadrupole accelerator in Japan Proton Accelerator Research Complex linac
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Journal Articles

Investigations of medium-temperature heat treatments to achieve low outgassing rates in stainless steel ultrahigh vacuum chambers

Makfir Sefa, James A. Fedchak, Julia Scherschligt
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 041601 (2017)
https://doi.org/10.1116/1.4983211
Published: May 2017
View article titled, Investigations of medium-temperature heat treatments to achieve low outgassing rates in stainless steel ultrahigh vacuum chambers
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