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Journal Articles

Sequence modeling for predicting three-dimensional plasma etching profiles with deep learning

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Jianming Guo, Zhiping Mou, Kun Ren, Dong Ni, Dawei Gao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043005 (2025)
https://doi.org/10.1116/6.0004669
Published: June 2025
View articletitled, Sequence modeling for predicting three-dimensional plasma etching profiles with deep learning
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Journal Articles

Improvement of data analytics techniques in reflection high-energy electron diffraction to enable machine learning

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Patrick T. Gemperline, Rajendra Paudel, Rama K. Vasudevan, Ryan B. Comes
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032701 (2025)
https://doi.org/10.1116/6.0004400
Published: March 2025
View articletitled, Improvement of data analytics techniques in reflection high-energy electron diffraction to enable machine learning
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Journal Articles

Numerical ellipsometry: AI for real-time, in situ process control for absorbing films growing on unknown transparent substrates

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F. K. Urban, III, D. Barton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053405 (2024)
https://doi.org/10.1116/6.0003817
Published: August 2024
View articletitled, Numerical ellipsometry: AI for real-time, in situ process control for absorbing films growing on unknown transparent substrates
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Journal Articles

Polysilicon-germanium gate patterning studies in a high density plasma helicon source

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S. Vallon, C. Monget, O. Joubert, L. Vallier, F. H. Bell, M. Pons, J. L. Regolini, C. Morin, I. Sagnes
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 15, 1874–1880 (1997)
https://doi.org/10.1116/1.580654
Published: July 1997
View articletitled, Polysilicon-germanium gate patterning studies in a high density plasma helicon source
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Journal Articles

Heteroepitaxy of lattice‐matched compound semiconductors on silicon

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Klaus J. Bachmann, Nikolaus Dietz, Amy E. Miller, David Venables, James T. Kelliher
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 13, 696–704 (1995)
https://doi.org/10.1116/1.579810
Published: May 1995
View articletitled, Heteroepitaxy of lattice‐matched compound semiconductors on silicon
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