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Journal Articles
J. Vac. Sci. Technol. A 41, 062401 (2023)
Published: September 2023
Includes: Supplementary data
Journal Articles
Yifeng Xu, Xiong Zhang, Ruiting Fang, Xuguang Luo, Lin Chen, Shenyu Xu, Zhiyi Lou, Jia Cui, Guohua Hu
J. Vac. Sci. Technol. A 41, 052706 (2023)
Published: August 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 053406 (2023)
Published: July 2023
Journal Articles
Zhe Chuan Feng, Deng Xie, Manika Tun Nafisa, Hao-Hsiung Lin, Weijie Lu, Jin-Ming Chen, Jeffrey Yiin, Kuei-Hsien Chen, Li-Chyong Chen, Benjamin Klein, Ian T. Ferguson
J. Vac. Sci. Technol. A 41, 053401 (2023)
Published: July 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 042406 (2023)
Published: July 2023
Journal Articles
William A. Callahan, Edwin Supple, David Ginley, Michael Sanders, Brian P. Gorman, Ryan O’Hayre, Andriy Zakutayev
J. Vac. Sci. Technol. A 41, 043211 (2023)
Published: June 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 043411 (2023)
Published: June 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 042601 (2023)
Published: June 2023
Journal Articles
Fedor Hrubišák, Kristína Hušeková, Xiang Zheng, Alica Rosová, Edmund Dobročka, Milan Ťapajna, Matej Mičušík, Peter Nádaždy, Fridrich Egyenes, Javad Keshtkar, Eva Kováčová, James W. Pomeroy, Martin Kuball, Filip Gucmann
J. Vac. Sci. Technol. A 41, 042708 (2023)
Published: June 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 042201 (2023)
Published: May 2023
Includes: Supplementary data
Journal Articles
Kornelius Tetzner, Andreas Thies, Palvan Seyidov, Ta-Shun Chou, Jana Rehm, Ina Ostermay, Zbigniew Galazka, Andreas Fiedler, Andreas Popp, Joachim Würfl, Oliver Hilt
J. Vac. Sci. Technol. A 41, 043102 (2023)
Published: May 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 032607 (2023)
Published: May 2023
Includes: Supplementary data
Journal Articles
Xinyi Xia, Jian-Sian Li, Zhuoqun Wen, Kamruzzaman Khan, Md Irfan Khan, Elaheh Ahmadi, Yuichi Oshima, David C. Hays, Fan Ren, S. J. Pearton
J. Vac. Sci. Technol. A 41, 023205 (2023)
Published: March 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 023003 (2023)
Published: February 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 023203 (2023)
Published: February 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 023001 (2023)
Published: February 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 022201 (2023)
Published: February 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 013205 (2023)
Published: January 2023
Journal Articles
Thermal atomic layer deposition of molybdenum carbide films using bis(ethylbenzene)molybdenum and H2
J. Vac. Sci. Technol. A 41, 012405 (2023)
Published: December 2022
Includes: Supplementary data
Journal Articles
Xinyi Xia, Jian-Sian Li, Chao-Ching Chiang, Timothy Jinsoo Yoo, Eitan Hershkovitz, Fan Ren, Honggyu Kim, Jihyun Kim, Dae-Woo Jeon, Ji-Hyeon Park, S. J. Pearton
J. Vac. Sci. Technol. A 40, 063408 (2022)
Published: November 2022
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