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Journal Articles
J. Vac. Sci. Technol. A 42, 043406 (2024)
Published: May 2024
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 38, 063404 (2020)
Published: October 2020
Includes: Supplementary data
Journal Articles
Tetsuya Miyazawa, Yu Kano, Yasuo Nakayama, Kenichi Ozawa, Toshiharu Iga, Misao Yamanaka, Ayako Hashimoto, Takashi Kikuchi, Kazuhiko Mase
J. Vac. Sci. Technol. A 37, 021601 (2019)
Published: January 2019
Journal Articles
Tetsuya Miyazawa, Masashi Kurihara, Shinya Ohno, Naoya Terashima, Yuto Natsui, Hiroo Kato, Yoshihiro Kato, Ayako Hashimoto, Takashi Kikuchi, Kazuhiko Mase
J. Vac. Sci. Technol. A 36, 051601 (2018)
Published: August 2018
Journal Articles
J. Vac. Sci. Technol. A 35, 020603 (2017)
Published: December 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 02D105 (2016)
Published: January 2016
Journal Articles
J. Vac. Sci. Technol. A 33, 060609 (2015)
Published: October 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 031510 (2015)
Published: April 2015
Journal Articles
Naidu Revathi, Sergei Bereznev, Mihkel Loorits, Jaan Raudoja, Julia Lehner, Jelena Gurevits, Rainer Traksmaa, Valdek Mikli, Enn Mellikov, Olga Volobujeva
J. Vac. Sci. Technol. A 32, 061506 (2014)
Published: September 2014
Journal Articles
J. Vac. Sci. Technol. A 32, 041502 (2014)
Published: May 2014
Journal Articles
J. Vac. Sci. Technol. A 31, 041401 (2013)
Published: June 2013
Includes: Supplementary data
Journal Articles
Nobuto Oka, Hiroki Watanabe, Yasushi Sato, Hiroshi Yamaguchi, Norihiro Ito, Hiroya Tsuji, Yuzo Shigesato
J. Vac. Sci. Technol. A 28, 886–889 (2010)
Published: June 2010
Journal Articles
Motofumi Suzuki, Koji Nagai, Sadamu Kinoshita, Kaoru Nakajima, Kenji Kimura, Tomoki Okano, Kaoru Sasakawa
J. Vac. Sci. Technol. A 25, 1098–1102 (2007)
Published: July 2007
Journal Articles
J. Vac. Sci. Technol. A 24, 1664–1667 (2006)
Published: June 2006
Journal Articles
J. Vac. Sci. Technol. A 22, 1079–1082 (2004)
Published: May 2004
Journal Articles
J. Vac. Sci. Technol. A 21, 1702–1707 (2003)
Published: August 2003
Journal Articles
J. Vac. Sci. Technol. A 21, 226–233 (2003)
Published: December 2002
Journal Articles
Steel coating by self-induced ion plating, a new high throughput metallization ion plating technique
J. Vac. Sci. Technol. A 18, 1555–1560 (2000)
Published: July 2000
Journal Articles
J. Vac. Sci. Technol. A 17, 1840–1842 (1999)
Published: July 1999
Journal Articles
J. Vac. Sci. Technol. A 16, 2510–2516 (1998)
Published: July 1998
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