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Journal Articles
J. Vac. Sci. Technol. A 38, 063202 (2020)
Published: September 2020
Journal Articles
J. Vac. Sci. Technol. A 36, 03E106 (2018)
Published: April 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 030802 (2018)
Published: April 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 031603 (2018)
Published: March 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 023201 (2018)
Published: January 2018
Journal Articles
Lucia Lain Amador, Paolo Chiggiato, Leonel M. A. Ferreira, Valentin Nistor, Ana T. Perez Fontenla, Mauro Taborelli, Wilhelmus Vollenberg, Marie-Laure Doche, Jean-Yves Hihn
J. Vac. Sci. Technol. A 36, 021601 (2018)
Published: December 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 041603 (2017)
Published: May 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 041602 (2017)
Published: May 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 041601 (2017)
Published: May 2017
Journal Articles
Kyo Shibata, Yusuke Suetsugu, Takuya Ishibashi, Mitsuru Shirai, Shinji Terui, Ken-ichi Kanazawa, Hiromi Hisamatsu
J. Vac. Sci. Technol. A 35, 03E106 (2017)
Published: March 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 031601 (2017)
Published: March 2017
Journal Articles
Yusuke Suetsugu, Kyo Shibata, Takuya Ishibashi, Hitoshi Fukuma, Makoto Tobiyama, John Flanagan, Emy Mulyani, Mitsuru Shirai, Shinji Terui, Ken-ichi Kanazawa, Hiromi Hisamatsu
J. Vac. Sci. Technol. A 35, 03E103 (2017)
Published: March 2017
Journal Articles
Hiraku Kodama, Shinya Ohno, Masatoshi Tanaka, Masato Tanaka, Koji K. Okudaira, Kazuhiko Mase, Takashi Kikuchi
J. Vac. Sci. Technol. A 34, 051601 (2016)
Published: August 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 050604 (2016)
Published: August 2016
Journal Articles
Jens Grosse, Stephan Tobias Seidel, Dennis Becker, Maike Diana Lachmann, Marco Scharringhausen, Claus Braxmaier, Ernst Maria Rasel
J. Vac. Sci. Technol. A 34, 031606 (2016)
Published: May 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 031603 (2016)
Published: April 2016
Journal Articles
Yusuke Suetsugu, Ken-ichi Kanazawa, Kyo Shibata, Takuya Ishibashi, Hiromi Hisamatsu, Mitsuru Shirai, Shinji Terui
J. Vac. Sci. Technol. A 34, 021605 (2016)
Published: February 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 021601 (2016)
Published: December 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 061603 (2015)
Published: November 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 061601 (2015)
Published: July 2015
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