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Journal Articles

Sequence modeling for predicting three-dimensional plasma etching profiles with deep learning

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Jianming Guo, Zhiping Mou, Kun Ren, Dong Ni, Dawei Gao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043005 (2025)
https://doi.org/10.1116/6.0004669
Published: June 2025
View articletitled, Sequence modeling for predicting three-dimensional plasma etching profiles with deep learning
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Journal Articles

AI-guided frame prediction techniques to model single crystal diamond growth

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Rohan Reddy Mekala, Arjun Srinivasan, Matthias Muehle, Elias Garratt, Adam Porter, Mikael Lindvall
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032708 (2025)
https://doi.org/10.1116/6.0004290
Published: May 2025
View articletitled, AI-guided frame prediction techniques to model single crystal diamond growth
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Journal Articles

Attention-enhanced conditional variational autoencoder integrating 3D plasma etching simulation for etching process optimization

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Jianming Guo, Kun Ren, Dong Ni, Dawei Gao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 023003 (2025)
https://doi.org/10.1116/6.0004166
Published: February 2025
View articletitled, Attention-enhanced conditional variational autoencoder integrating 3D plasma etching simulation for etching process optimization
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Journal Articles

Materials characterization: Can artificial intelligence be used to address reproducibility challenges?

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Miu Lun Lau, Abraham Burleigh, Jeff Terry, Min Long
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 060801 (2023)
https://doi.org/10.1116/6.0002809
Published: November 2023
View articletitled, Materials characterization: Can artificial intelligence be used to address reproducibility challenges?
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