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Journal Articles

Magnetic properties and magnetocaloric effect of (Fe70Ni30)96Mo4 thin films grown by molecular beam epitaxy

Raghad S. H. Saqat, Andrew W. Forbes, Niraj Bhattarai, Ian L. Pegg, John Philip
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 013404 (2023)
https://doi.org/10.1116/6.0002213
Published: December 2022
View article titled, Magnetic properties and magnetocaloric effect of (Fe<sub>70</sub>Ni<sub>30</sub>)<sub>96</sub>Mo<sub>4</sub> thin films grown by molecular beam epitaxy
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Journal Articles

Cryogenic nanoscale etching of silicon nitride selectively to silicon by alternating SiF4/O2 and Ar plasmas

G. Antoun, T. Tillocher, A. Girard, P. Lefaucheux, J. Faguet, H. Kim, D. Zhang, M. Wang, K. Maekawa, C. Cardinaud, R. Dussart
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 052601 (2022)
https://doi.org/10.1116/6.0001885
Published: August 2022
View article titled, Cryogenic nanoscale etching of silicon nitride selectively to silicon by alternating SiF<sub>4</sub>/O<sub>2</sub> and Ar plasmas
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Journal Articles

Characterizations of two-dimensional materials with cryogenic ultrahigh vacuum near-field optical microscopy in the visible range

Jeremy F. Schultz, Nan Jiang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 040801 (2022)
https://doi.org/10.1116/6.0001853
Published: May 2022
View article titled, Characterizations of two-dimensional materials with cryogenic ultrahigh vacuum near-field optical microscopy in the visible range
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Journal Articles

Analysis of trace n-alkane in air by cryogenic-temperature programmed desorption

Taku T. Suzuki, Isao Sakaguchi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 041401 (2017)
https://doi.org/10.1116/1.4982930
Published: May 2017
View article titled, Analysis of trace <em>n</em>-alkane in air by cryogenic-temperature programmed desorption
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Journal Articles

Fast and low-cost method to fabricate large-area superhydrophobic surface on steel substrate with anticorrosion and anti-icing properties

Wei Yan, Hongtao Liu, Tianchi Chen, Qinghe Sun, Wei Zhu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 041401 (2016)
https://doi.org/10.1116/1.4953031
Published: June 2016
View article titled, Fast and low-cost method to fabricate large-area superhydrophobic surface on steel substrate with anticorrosion and anti-icing properties
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Includes: Supplementary data
Journal Articles

Thermal chemistry of copper acetamidinate atomic layer deposition precursors on silicon oxide surfaces studied by XPS

Yunxi Yao, Francisco Zaera
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 01A101 (2016)
https://doi.org/10.1116/1.4927843
Published: August 2015
View article titled, Thermal chemistry of copper acetamidinate atomic layer deposition precursors on silicon oxide surfaces studied by XPS
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Journal Articles

Long-life micro vacuum chamber for a micromachined cryogenic cooler

Haishan Cao, Cristian H. Vermeer, Srinivas Vanapalli, Harry J. Holland, H. J. Marcel ter Brake
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 061601 (2015)
https://doi.org/10.1116/1.4926961
Published: July 2015
View article titled, Long-life micro vacuum chamber for a micromachined cryogenic cooler
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Journal Articles

Development of atomic layer deposition-activated microchannel plates for single particle detection at cryogenic temperatures

Dmitry Gorelikov, Neal Sullivan, Philippe de Rouffignac, Huazhi Li, Jayasri Narayanamoorthy, Anton S. Tremsin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 020605 (2014)
https://doi.org/10.1116/1.4862947
Published: January 2014
View article titled, Development of atomic layer deposition-activated microchannel plates for single particle detection at cryogenic temperatures
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Journal Articles

Secondary electron yield on cryogenic surfaces as a function of physisorbed gases

Asena Kuzucan, Holger Neupert, Mauro Taborelli, Herbert Störi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 051401 (2012)
https://doi.org/10.1116/1.4736552
Published: July 2012
View article titled, Secondary electron yield on cryogenic surfaces as a function of physisorbed gases
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Journal Articles

Unique cryogenic pumping array for low sticking coefficient gas flows

Cedrick Ngalande, Andrew D. Ketsdever
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 1356–1362 (2010)
https://doi.org/10.1116/1.3497029
Published: October 2010
View article titled, Unique cryogenic pumping array for low sticking coefficient gas flows
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Journal Articles

Controlled formation of condensed frost layers in cryogenic high vacuum pumps

Sergei E. Syssoev, Michael J. Eacobacci, Jr., Allen J. Bartlett
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 925–930 (2010)
https://doi.org/10.1116/1.3275748
Published: June 2010
View article titled, Controlled formation of condensed frost layers in cryogenic high vacuum pumps
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Journal Articles

Cryogenic inductively coupled plasma etching for fabrication of tapered through-silicon vias

A. Kamto, R. Divan, A. V. Sumant, S. L. Burkett
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 719–725 (2010)
https://doi.org/10.1116/1.3281005
Published: June 2010
View article titled, Cryogenic inductively coupled plasma etching for fabrication of tapered through-silicon vias
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Journal Articles

Efficiency derivation for the Knudsen pump with and without thermal losses

Davor Copic, Shamus McNamara
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 496–502 (2009)
https://doi.org/10.1116/1.3114444
Published: April 2009
View article titled, Efficiency derivation for the Knudsen pump with and without thermal losses
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Journal Articles

Can the throttling of a perfect gas through a free molecular orifice produce a cooling effect?

Robert M. Young, Timothy T. Braggins, Christopher F. Kirby, J. Douglas Adam, Michael B. Petach, Emanuel Tward
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 624–633 (2008)
https://doi.org/10.1116/1.2929843
Published: June 2008
View article titled, Can the throttling of a perfect gas through a free molecular orifice produce a cooling effect?
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Journal Articles

X-ray photoelectron spectroscopy studies of water-induced surface reorganization of amphiphilic poly(2-hydroxyethyl methacrylate- g -dimethylsiloxane) copolymers using cryogenic sample handling techniques

Lu Chen, Daniel J. Hook, Paul L. Valint, Jr., Joseph A. Gardella, Jr
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 616–623 (2008)
https://doi.org/10.1116/1.2943643
Published: June 2008
View article titled, X-ray photoelectron spectroscopy studies of water-induced surface reorganization of amphiphilic poly(2-hydroxyethyl methacrylate- g -dimethylsiloxane) copolymers using cryogenic sample handling techniques
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Journal Articles

Finite element modeling and experimental validation of the sealing mechanism of the ConFlat® joint

P. Lutkiewicz, Ch. Rathjen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 537–544 (2008)
https://doi.org/10.1116/1.2906258
Published: April 2008
View article titled, Finite element modeling and experimental validation of the sealing mechanism of the ConFlat® joint
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Journal Articles

Thermotunnel refrigerator with vacuum/insulator tunnel barrier: A theoretical analysis

Avto Tavkhelidze, Vasiko Svanidze, Leri Tsakadze
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 5–7 (2008)
https://doi.org/10.1116/1.2803717
Published: December 2007
View article titled, Thermotunnel refrigerator with vacuum/insulator tunnel barrier: A theoretical analysis
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Includes: Supplementary data
Journal Articles

Compliant system of polyimide microwires for cryogenic detector applications

C. A. Allen, D. E. Franz, S. H. Moseley
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1552–1555 (2006)
https://doi.org/10.1116/1.2194922
Published: June 2006
View article titled, Compliant system of polyimide microwires for cryogenic detector applications
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Journal Articles

Effect of heat on the pumping performance of cryopump

H.-P. Cheng, Y.-H. Shen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1597–1600 (2006)
https://doi.org/10.1116/1.2201055
Published: June 2006
View article titled, Effect of heat on the pumping performance of cryopump
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Journal Articles

Oxidation threshold in silicon etching at cryogenic temperatures

T. Tillocher, R. Dussart, X. Mellhaoui, P. Lefaucheux, N. Mekkakia Maaza, P. Ranson, M. Boufnichel, L. J. Overzet
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1073–1082 (2006)
https://doi.org/10.1116/1.2210946
Published: June 2006
View article titled, Oxidation threshold in silicon etching at cryogenic temperatures
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