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Journal Articles
J. Vac. Sci. Technol. A 38, 043206 (2020)
Published: June 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 37, 063201 (2019)
Published: October 2019
Journal Articles
J. Vac. Sci. Technol. A 34, 01A149 (2016)
Published: December 2015
Journal Articles
J. Vac. Sci. Technol. A 24, 708–712 (2006)
Published: May 2006