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Journal Articles
J. Vac. Sci. Technol. A 42, 053201 (2024)
Published: July 2024
Journal Articles
Tianzuo Fu, Yiqiang Zhong, Lihua Zhou, Shuwen Meng, Zhengang Tian, Yiwu Chen, Tianfu Li, Xiaoyu Zou, Zhengcao Li, Tinggui Yang
J. Vac. Sci. Technol. A 41, 043212 (2023)
Published: July 2023
Journal Articles
Nupur Bihari, Ismo T. S. Heikkinen, Giovanni Marin, Craig Ekstrum, Pierce J. Mayville, Shane Oberloier, Hele Savin, Maarit Karppinen, Joshua M. Pearce
J. Vac. Sci. Technol. A 38, 053204 (2020)
Published: August 2020
Includes: Supplementary data
Journal Articles
Christopher M. Stone, Neal Gerber, Jeremy P. Price, Jonathan D. Pelfrey, Jonathan D. Johnson, James Steven Crawford, Stan Baker, Xiaosong Geng, Derrick Williams, Katherine D. Ocker
J. Vac. Sci. Technol. A 37, 061601 (2019)
Published: October 2019
Journal Articles
Kyo Shibata, Yusuke Suetsugu, Takuya Ishibashi, Mitsuru Shirai, Shinji Terui, Ken-ichi Kanazawa, Hiromi Hisamatsu
J. Vac. Sci. Technol. A 37, 041601 (2019)
Published: June 2019
Journal Articles
J. Vac. Sci. Technol. A 37, 031601 (2019)
Published: March 2019
Journal Articles
Yusuke Suetsugu, Kyo Shibata, Takuya Ishibashi, Mitsuru Shirai, Shinji Terui, Ken-ichi Kanazawa, Hiromi Hisamatsu
J. Vac. Sci. Technol. A 37, 021602 (2019)
Published: February 2019
Journal Articles
Tetsuya Miyazawa, Masashi Kurihara, Shinya Ohno, Naoya Terashima, Yuto Natsui, Hiroo Kato, Yoshihiro Kato, Ayako Hashimoto, Takashi Kikuchi, Kazuhiko Mase
J. Vac. Sci. Technol. A 36, 051601 (2018)
Published: August 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 030802 (2018)
Published: April 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 023201 (2018)
Published: January 2018
Journal Articles
J. Vac. Sci. Technol. A 35, 041603 (2017)
Published: May 2017
Journal Articles
Kyo Shibata, Yusuke Suetsugu, Takuya Ishibashi, Mitsuru Shirai, Shinji Terui, Ken-ichi Kanazawa, Hiromi Hisamatsu
J. Vac. Sci. Technol. A 35, 03E106 (2017)
Published: March 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 031601 (2017)
Published: March 2017
Journal Articles
Yusuke Suetsugu, Kyo Shibata, Takuya Ishibashi, Hitoshi Fukuma, Makoto Tobiyama, John Flanagan, Emy Mulyani, Mitsuru Shirai, Shinji Terui, Ken-ichi Kanazawa, Hiromi Hisamatsu
J. Vac. Sci. Technol. A 35, 03E103 (2017)
Published: March 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 021605 (2017)
Published: January 2017
Journal Articles
J. Vac. Sci. Technol. A 34, 061603 (2016)
Published: October 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 061602 (2016)
Published: October 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 041503 (2016)
Published: May 2016
Journal Articles
Jens Grosse, Stephan Tobias Seidel, Dennis Becker, Maike Diana Lachmann, Marco Scharringhausen, Claus Braxmaier, Ernst Maria Rasel
J. Vac. Sci. Technol. A 34, 031606 (2016)
Published: May 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 031603 (2016)
Published: April 2016
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