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Journal Articles

Second-order resonant ZnO-based film bulk acoustic resonator devices and thermal techniques to improve their resonant characteristics

Linh Mai, Van-Su Pham, Giwan Yoon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 67–72 (2009)
https://doi.org/10.1116/1.3039681
Published: December 2008
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Journal Articles

Atomistic feature scale modeling of the titanium ionized physical vapor deposition process

A. Kersch, U. Hansen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 1284–1294 (2002)
https://doi.org/10.1116/1.1481041
Published: June 2002
View article titled, Atomistic feature scale modeling of the titanium ionized physical vapor deposition process
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Journal Articles

Quantum-dot cellular automata

G. L. Snider, A. O. Orlov, I. Amlani, X. Zuo, G. H. Bernstein, C. S. Lent, J. L. Merz, W. Porod
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 1394–1398 (1999)
https://doi.org/10.1116/1.581826
Published: July 1999
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