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Journal Articles

Probabilistic distributions of pinhole defects in atomic layer deposited films on polymeric substrates

Alexander S. Yersak, Yung-Cheng Lee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 01A149 (2016)
https://doi.org/10.1116/1.4938496
Published: December 2015
View article titled, Probabilistic distributions of pinhole defects in atomic layer deposited films on polymeric substrates
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Journal Articles

Novel method for in-situ and simultaneous nanofriction and nanowear characterization of materials

Esteban Broitman, Francisco J. Flores-Ruiz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 043201 (2015)
https://doi.org/10.1116/1.4921584
Published: May 2015
View article titled, Novel method for <em>in-situ</em> and simultaneous nanofriction and nanowear characterization of materials
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Journal Articles

Simple Si(111) surface preparation by thin wafer cleavage

William Paul, Yoichi Miyahara, Peter H. Grütter
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 023201 (2013)
https://doi.org/10.1116/1.4790475
Published: February 2013
View article titled, Simple Si(111) surface preparation by thin wafer cleavage
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Journal Articles

Height distribution of atomic force microscopy images as a tool for atomic layer deposition characterization

Krzysztof Kolanek, Massimo Tallarida, Dieter Schmeisser
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 01A104 (2013)
https://doi.org/10.1116/1.4754557
Published: October 2012
View article titled, Height distribution of atomic force microscopy images as a tool for atomic layer deposition characterization
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Journal Articles

Effect of O2 gas partial pressure on mechanical properties of Al2O3 films deposited by inductively coupled plasma-assisted radio frequency magnetron sputtering

Hirokazu Fujiyama, Tsunetaka Sumomogi, Masayoshi Nakamura
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 051511 (2012)
https://doi.org/10.1116/1.4746013
Published: August 2012
View article titled, Effect of O<sub>2</sub> gas partial pressure on mechanical properties of Al<sub>2</sub>O<sub>3</sub> films deposited by inductively coupled plasma-assisted radio frequency magnetron sputtering
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Journal Articles

Characterization studies of aluminum oxide barrier coatings on polymeric substrates

Carolin F. Struller, Peter J. Kelly, Nick J. Copeland, Christopher M. Liauw
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 041502 (2012)
https://doi.org/10.1116/1.4709451
Published: April 2012
View article titled, Characterization studies of aluminum oxide barrier coatings on polymeric substrates
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Journal Articles

Silicon nanoparticle synthesis by short-period thermal anneals at atmospheric pressure in argon

Gregory Spencer, Benedict Anyamesem-Mensah, Heather C. Galloway, Anup Bandyopadhyay, Daniel Frasier
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 29, 051508 (2011)
https://doi.org/10.1116/1.3620422
Published: August 2011
View article titled, Silicon nanoparticle synthesis by short-period thermal anneals at atmospheric pressure in argon
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Journal Articles

Influence of surface topography on in situ reflection electron energy loss spectroscopy plasmon spectra of AlN, GaN, and InN semiconductors

B. Strawbridge, N. Cernetic, J. Chapley, R. K. Singh, S. Mahajan, N. Newman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 29, 041602 (2011)
https://doi.org/10.1116/1.3584775
Published: May 2011
View article titled, Influence of surface topography on <em>in situ</em> reflection electron energy loss spectroscopy plasmon spectra of AlN, GaN, and InN semiconductors
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Journal Articles

Ripple formation on atomically flat cleaved Si surface with roughness of 0.038 nm rms by low-energy Ar 1 + ion bombardment

Shahjada A. Pahlovy, S. F. Mahmud, K. Yanagimoto, I. Miyamoto
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 29, 021015 (2011)
https://doi.org/10.1116/1.3554636
Published: February 2011
View article titled, Ripple formation on atomically flat cleaved Si surface with roughness of 0.038 nm rms by low-energy Ar 1 + ion bombardment
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Journal Articles

Formation of nanoscale clusters during the initial stages of CaF 2 growth on miscut Si(111)

T. E. Kidd, S. Davis, D. Klein, V. Matveeva, V. Sifeeva, N. G. Becker
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 1245–1249 (2010)
https://doi.org/10.1116/1.3478678
Published: September 2010
View article titled, Formation of nanoscale clusters during the initial stages of CaF 2 growth on miscut Si(111)
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Journal Articles

Preparation and topography analysis of randomly textured glass substrates

Eerke Bunte, Wendi Zhang, Jürgen Hüpkes
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 1255–1258 (2010)
https://doi.org/10.1116/1.3480338
Published: September 2010
View article titled, Preparation and topography analysis of randomly textured glass substrates
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Journal Articles

Characterization of surface damage in AlSi alloys

J. Su, X. Nie, V. Stoilov, Q. Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 1096–1103 (2009)
https://doi.org/10.1116/1.3139898
Published: June 2009
View article titled, Characterization of surface damage in AlSi alloys
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Journal Articles

Atomic force microscopy measurement of boundary slip on hydrophilic, hydrophobic, and superhydrophobic surfaces

Yuliang Wang, Bharat Bhushan, Abdelhamid Maali
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 754–760 (2009)
https://doi.org/10.1116/1.3086637
Published: June 2009
View article titled, Atomic force microscopy measurement of boundary slip on hydrophilic, hydrophobic, and superhydrophobic surfaces
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Journal Articles

Effect of negative bias voltage on CrN films deposited by arc ion plating. I. Macroparticles filtration and film-growth characteristics

Qi Min Wang, Kwang Ho Kim
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 1258–1266 (2008)
https://doi.org/10.1116/1.2966432
Published: August 2008
View article titled, Effect of negative bias voltage on CrN films deposited by arc ion plating. I. Macroparticles filtration and film-growth characteristics
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Journal Articles

Multiparameter investigation of the sputtering behavior of Ag ∕ Cu Alloys for low energy argon ion bombardment

K. W. Pierson, C. D. Hawes, J. T. Kollwitz, A. S. Padrón
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 522–536 (2008)
https://doi.org/10.1116/1.2905247
Published: April 2008
View article titled, Multiparameter investigation of the sputtering behavior of Ag ∕ Cu Alloys for low energy argon ion bombardment
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Journal Articles

Electrochemical planarization of copper surfaces with submicron features

R. Chalupa, T. Andryushchenko, J. Han, T. Ghosh, S. Shankar, P. Fischer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 1019–1024 (2007)
https://doi.org/10.1116/1.2731340
Published: July 2007
View article titled, Electrochemical planarization of copper surfaces with submicron features
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Journal Articles

Virtual integrated processing for integrated circuit manufacturing

Radek Chalupa, Lei Jiang, Harsono Simka, Sadasivan Shankar, Dipto Thakurta
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 1013–1018 (2007)
https://doi.org/10.1116/1.2731341
Published: July 2007
View article titled, Virtual integrated processing for integrated circuit manufacturing
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Journal Articles

Reduction of thin oxidized copper films using a hot-filament hydrogen radical source

E. Kondoh, M. Fukasawa, T. Ojimi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 415–420 (2007)
https://doi.org/10.1116/1.2712197
Published: March 2007
View article titled, Reduction of thin oxidized copper films using a hot-filament hydrogen radical source
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Journal Articles

Anisotropic resistivity of thin films due to quantum electron scattering from anisotropic surface roughness

M. C. Salvadori, M. Cattani, F. S. Teixeira, R. S. Wiederkehr, I. G. Brown
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 330–333 (2007)
https://doi.org/10.1116/1.2699254
Published: February 2007
View article titled, Anisotropic resistivity of thin films due to quantum electron scattering from anisotropic surface roughness
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Journal Articles

Power-law scaling during shadowing growth of nanocolumns by oblique angle deposition

F. Tang, T. Karabacak, L. Li, M. Pelliccione, G.-C. Wang, T.-M. Lu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 160–166 (2007)
https://doi.org/10.1116/1.2406059
Published: January 2007
View article titled, Power-law scaling during shadowing growth of nanocolumns by oblique angle deposition
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